DE60300981D1 - Mikroschalter mit einem mikro-elektromechanischen system - Google Patents

Mikroschalter mit einem mikro-elektromechanischen system

Info

Publication number
DE60300981D1
DE60300981D1 DE60300981T DE60300981T DE60300981D1 DE 60300981 D1 DE60300981 D1 DE 60300981D1 DE 60300981 T DE60300981 T DE 60300981T DE 60300981 T DE60300981 T DE 60300981T DE 60300981 D1 DE60300981 D1 DE 60300981D1
Authority
DE
Germany
Prior art keywords
electrodes
auxiliary
auxiliary electrodes
charge carriers
lateral direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60300981T
Other languages
English (en)
Other versions
DE60300981T2 (de
Inventor
Michael Meixner
Paivikki Buchwalter
Louise Lund
Hariklia Deligianni
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Telefonaktiebolaget LM Ericsson AB
International Business Machines Corp
Original Assignee
Telefonaktiebolaget LM Ericsson AB
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Telefonaktiebolaget LM Ericsson AB, International Business Machines Corp filed Critical Telefonaktiebolaget LM Ericsson AB
Publication of DE60300981D1 publication Critical patent/DE60300981D1/de
Application granted granted Critical
Publication of DE60300981T2 publication Critical patent/DE60300981T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays

Landscapes

  • Micromachines (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Push-Button Switches (AREA)
DE2003600981 2002-02-11 2003-02-10 Mikroschalter mit einem mikro-elektromechanischen system Expired - Lifetime DE60300981T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP02002963 2002-02-11
EP20020002963 EP1335398A1 (de) 2002-02-11 2002-02-11 Mikroschalter
PCT/US2003/003919 WO2003069646A1 (en) 2002-02-11 2003-02-10 Microswitch with a micro-electromechanical system

Publications (2)

Publication Number Publication Date
DE60300981D1 true DE60300981D1 (de) 2005-08-11
DE60300981T2 DE60300981T2 (de) 2006-04-20

Family

ID=27589102

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2003600981 Expired - Lifetime DE60300981T2 (de) 2002-02-11 2003-02-10 Mikroschalter mit einem mikro-elektromechanischen system

Country Status (9)

Country Link
US (1) US6818843B2 (de)
EP (2) EP1335398A1 (de)
JP (1) JP4313210B2 (de)
KR (1) KR100977917B1 (de)
CN (1) CN1286134C (de)
AT (1) ATE299291T1 (de)
AU (1) AU2003215126A1 (de)
DE (1) DE60300981T2 (de)
WO (1) WO2003069646A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8723277B2 (en) * 2012-02-29 2014-05-13 Infineon Technologies Ag Tunable MEMS device and method of making a tunable MEMS device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9309327D0 (en) * 1993-05-06 1993-06-23 Smith Charles G Bi-stable memory element
US6127744A (en) * 1998-11-23 2000-10-03 Raytheon Company Method and apparatus for an improved micro-electrical mechanical switch
US6069540A (en) * 1999-04-23 2000-05-30 Trw Inc. Micro-electro system (MEMS) switch
US6143997A (en) * 1999-06-04 2000-11-07 The Board Of Trustees Of The University Of Illinois Low actuation voltage microelectromechanical device and method of manufacture
US6543286B2 (en) * 2001-01-26 2003-04-08 Movaz Networks, Inc. High frequency pulse width modulation driver, particularly useful for electrostatically actuated MEMS array

Also Published As

Publication number Publication date
JP4313210B2 (ja) 2009-08-12
KR20040111354A (ko) 2004-12-31
ATE299291T1 (de) 2005-07-15
EP1335398A1 (de) 2003-08-13
CN1630923A (zh) 2005-06-22
EP1474817B1 (de) 2005-07-06
JP2005518070A (ja) 2005-06-16
AU2003215126A1 (en) 2003-09-04
CN1286134C (zh) 2006-11-22
EP1474817A1 (de) 2004-11-10
US20040021151A1 (en) 2004-02-05
US6818843B2 (en) 2004-11-16
DE60300981T2 (de) 2006-04-20
WO2003069646A1 (en) 2003-08-21
KR100977917B1 (ko) 2010-08-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition