DE60239128D1 - Microwave plasma generator - Google Patents

Microwave plasma generator

Info

Publication number
DE60239128D1
DE60239128D1 DE60239128T DE60239128T DE60239128D1 DE 60239128 D1 DE60239128 D1 DE 60239128D1 DE 60239128 T DE60239128 T DE 60239128T DE 60239128 T DE60239128 T DE 60239128T DE 60239128 D1 DE60239128 D1 DE 60239128D1
Authority
DE
Germany
Prior art keywords
plasma generator
microwave plasma
microwave
generator
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60239128T
Other languages
German (de)
Inventor
Yuichi Sakamoto
Kazuaki Senda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SE Corp
Original Assignee
Mikuro Denshi Corp Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mikuro Denshi Corp Ltd filed Critical Mikuro Denshi Corp Ltd
Priority claimed from EP02255823A external-priority patent/EP1391911B1/en
Application granted granted Critical
Publication of DE60239128D1 publication Critical patent/DE60239128D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

DE60239128T 2002-08-21 2002-08-21 Microwave plasma generator Expired - Lifetime DE60239128D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP02255823A EP1391911B1 (en) 2001-03-15 2002-08-21 Microwave plasma generator

Publications (1)

Publication Number Publication Date
DE60239128D1 true DE60239128D1 (en) 2011-03-24

Family

ID=43603696

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60239128T Expired - Lifetime DE60239128D1 (en) 2002-08-21 2002-08-21 Microwave plasma generator

Country Status (1)

Country Link
DE (1) DE60239128D1 (en)

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