DE60235721D1 - METHOD FOR FORMING A FLAT DIGIT STRUCTURE WITH IMPROVED ROOTING OF THE GRAY CEILINGS - Google Patents

METHOD FOR FORMING A FLAT DIGIT STRUCTURE WITH IMPROVED ROOTING OF THE GRAY CEILINGS

Info

Publication number
DE60235721D1
DE60235721D1 DE60235721T DE60235721T DE60235721D1 DE 60235721 D1 DE60235721 D1 DE 60235721D1 DE 60235721 T DE60235721 T DE 60235721T DE 60235721 T DE60235721 T DE 60235721T DE 60235721 D1 DE60235721 D1 DE 60235721D1
Authority
DE
Germany
Prior art keywords
ceilings
gray
flat
forming
digit structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60235721T
Other languages
German (de)
Inventor
Unsoon Kim
Yu Sun
Hiroyuki Kinoshita
Kuo-Tung Chang
Harpreet K Sachar
Mark S Chang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Spansion LLC
Original Assignee
Spansion LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/277,395 external-priority patent/US7439141B2/en
Application filed by Spansion LLC filed Critical Spansion LLC
Application granted granted Critical
Publication of DE60235721D1 publication Critical patent/DE60235721D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
    • H01L21/76232—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls
    • H01L21/76235—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls trench shape altered by a local oxidation of silicon process step, e.g. trench corner rounding by LOCOS

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
DE60235721T 2001-12-27 2002-12-11 METHOD FOR FORMING A FLAT DIGIT STRUCTURE WITH IMPROVED ROOTING OF THE GRAY CEILINGS Expired - Lifetime DE60235721D1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US3263101A 2001-12-27 2001-12-27
US10/277,395 US7439141B2 (en) 2001-12-27 2002-10-22 Shallow trench isolation approach for improved STI corner rounding
PCT/US2002/039739 WO2003058709A2 (en) 2001-12-27 2002-12-11 Method for forming a shallow trench isolation structure with improved corner rounding

Publications (1)

Publication Number Publication Date
DE60235721D1 true DE60235721D1 (en) 2010-04-29

Family

ID=28038612

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60235721T Expired - Lifetime DE60235721D1 (en) 2001-12-27 2002-12-11 METHOD FOR FORMING A FLAT DIGIT STRUCTURE WITH IMPROVED ROOTING OF THE GRAY CEILINGS

Country Status (1)

Country Link
DE (1) DE60235721D1 (en)

Similar Documents

Publication Publication Date Title
DE60143634D1 (en) Input coordinate determination device with determination of the installation position of a light receiving device for coordinate determination
ATE309292T1 (en) METHOD FOR COATING A SURFACE
DE19983165T1 (en) Building construction method
DE60125384D1 (en) METHOD FOR THE PRODUCTION OF PLASTERBOARDS WITH INCREASED BROKEN STRENGTH
DE60237159D1 (en) METHOD FOR FORMING A LIGHT ABSORBING LAYER
DE60039744D1 (en) Process for the preparation of a silicon layer
DE10293625D2 (en) Clutch slip control method
DE50114827D1 (en) Method of making a bore
DE69909727D1 (en) Process for producing structures with a coplanar surface
DE60239075D1 (en) METHOD FOR PRODUCING A STEEL PLATE
DE502004008037D1 (en) CONNECTION FOR THE FORMATION OF A SELF-ORGANIZING MONOLAGE, LAYER STRUCTURE, SEMICONDUCTOR COMPONENT WITH A LAYER STRUCTURE, AND METHOD FOR PRODUCING A LAYER STRUCTURE
DE60238438D1 (en) POSITIVE RESISTANCE COMPOSITION AND METHOD FOR FORMING A RESISTANCE STRUCTURE
DE60335624D1 (en) METHOD FOR PRODUCING A COLD-ROLLED STEEL PLATE WITH SUPERHIGH STRENGTH
DE60201771D1 (en) Method of making a gas-liquid contact plate
DE60130688D1 (en) METHOD FOR THE PRODUCTION OF SIC FIBER REINFORCED SIC COMPOUND MATERIAL USING A HOT PRESSURE
DE60212702D1 (en) Process for coating with fluorohydrocarbon resin
DE60221433D1 (en) ELECTROPROCESSING COMPOSITION, ELECTROPROOF COATING AND METHOD FOR FORMING AN ELECTROPROCESS COATING
ATE370922T1 (en) METHOD FOR REDUCING THE WEIGHT OF GYPSUM BUILDING BOARDS
DE60336300D1 (en) METHOD FOR PRODUCING A COATED STEEL PLATE
DE60300839D1 (en) Method for producing a rifle
DE60021928D1 (en) Process for the production of a honeycomb Cordieriet ceramic
DE60105101D1 (en) Process for the production of a polyurethane sealant
DE60206227D1 (en) Process for establishing a secure data connection
DE50212601D1 (en) METHOD FOR PRODUCING A BURNER SYSTEM
DE60235583D1 (en) PROCESS FOR PREPARING A CHROMIUM SURFACE FOR THE COATING

Legal Events

Date Code Title Description
8364 No opposition during term of opposition