DE60235721D1 - METHOD FOR FORMING A FLAT DIGIT STRUCTURE WITH IMPROVED ROOTING OF THE GRAY CEILINGS - Google Patents
METHOD FOR FORMING A FLAT DIGIT STRUCTURE WITH IMPROVED ROOTING OF THE GRAY CEILINGSInfo
- Publication number
- DE60235721D1 DE60235721D1 DE60235721T DE60235721T DE60235721D1 DE 60235721 D1 DE60235721 D1 DE 60235721D1 DE 60235721 T DE60235721 T DE 60235721T DE 60235721 T DE60235721 T DE 60235721T DE 60235721 D1 DE60235721 D1 DE 60235721D1
- Authority
- DE
- Germany
- Prior art keywords
- ceilings
- gray
- flat
- forming
- digit structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
- H01L21/76232—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls
- H01L21/76235—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls trench shape altered by a local oxidation of silicon process step, e.g. trench corner rounding by LOCOS
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US3263101A | 2001-12-27 | 2001-12-27 | |
US10/277,395 US7439141B2 (en) | 2001-12-27 | 2002-10-22 | Shallow trench isolation approach for improved STI corner rounding |
PCT/US2002/039739 WO2003058709A2 (en) | 2001-12-27 | 2002-12-11 | Method for forming a shallow trench isolation structure with improved corner rounding |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60235721D1 true DE60235721D1 (en) | 2010-04-29 |
Family
ID=28038612
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60235721T Expired - Lifetime DE60235721D1 (en) | 2001-12-27 | 2002-12-11 | METHOD FOR FORMING A FLAT DIGIT STRUCTURE WITH IMPROVED ROOTING OF THE GRAY CEILINGS |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE60235721D1 (en) |
-
2002
- 2002-12-11 DE DE60235721T patent/DE60235721D1/en not_active Expired - Lifetime
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE60143634D1 (en) | Input coordinate determination device with determination of the installation position of a light receiving device for coordinate determination | |
ATE309292T1 (en) | METHOD FOR COATING A SURFACE | |
DE19983165T1 (en) | Building construction method | |
DE60125384D1 (en) | METHOD FOR THE PRODUCTION OF PLASTERBOARDS WITH INCREASED BROKEN STRENGTH | |
DE60237159D1 (en) | METHOD FOR FORMING A LIGHT ABSORBING LAYER | |
DE60039744D1 (en) | Process for the preparation of a silicon layer | |
DE10293625D2 (en) | Clutch slip control method | |
DE50114827D1 (en) | Method of making a bore | |
DE69909727D1 (en) | Process for producing structures with a coplanar surface | |
DE60239075D1 (en) | METHOD FOR PRODUCING A STEEL PLATE | |
DE502004008037D1 (en) | CONNECTION FOR THE FORMATION OF A SELF-ORGANIZING MONOLAGE, LAYER STRUCTURE, SEMICONDUCTOR COMPONENT WITH A LAYER STRUCTURE, AND METHOD FOR PRODUCING A LAYER STRUCTURE | |
DE60238438D1 (en) | POSITIVE RESISTANCE COMPOSITION AND METHOD FOR FORMING A RESISTANCE STRUCTURE | |
DE60335624D1 (en) | METHOD FOR PRODUCING A COLD-ROLLED STEEL PLATE WITH SUPERHIGH STRENGTH | |
DE60201771D1 (en) | Method of making a gas-liquid contact plate | |
DE60130688D1 (en) | METHOD FOR THE PRODUCTION OF SIC FIBER REINFORCED SIC COMPOUND MATERIAL USING A HOT PRESSURE | |
DE60212702D1 (en) | Process for coating with fluorohydrocarbon resin | |
DE60221433D1 (en) | ELECTROPROCESSING COMPOSITION, ELECTROPROOF COATING AND METHOD FOR FORMING AN ELECTROPROCESS COATING | |
ATE370922T1 (en) | METHOD FOR REDUCING THE WEIGHT OF GYPSUM BUILDING BOARDS | |
DE60336300D1 (en) | METHOD FOR PRODUCING A COATED STEEL PLATE | |
DE60300839D1 (en) | Method for producing a rifle | |
DE60021928D1 (en) | Process for the production of a honeycomb Cordieriet ceramic | |
DE60105101D1 (en) | Process for the production of a polyurethane sealant | |
DE60206227D1 (en) | Process for establishing a secure data connection | |
DE50212601D1 (en) | METHOD FOR PRODUCING A BURNER SYSTEM | |
DE60235583D1 (en) | PROCESS FOR PREPARING A CHROMIUM SURFACE FOR THE COATING |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |