DE60228931D1 - Method to roughen the surface of a semiconductor - Google Patents

Method to roughen the surface of a semiconductor

Info

Publication number
DE60228931D1
DE60228931D1 DE60228931T DE60228931T DE60228931D1 DE 60228931 D1 DE60228931 D1 DE 60228931D1 DE 60228931 T DE60228931 T DE 60228931T DE 60228931 T DE60228931 T DE 60228931T DE 60228931 D1 DE60228931 D1 DE 60228931D1
Authority
DE
Germany
Prior art keywords
roughen
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60228931T
Other languages
German (de)
Inventor
Shiro Sakai
Yves Lacroix
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitride Semiconductors Co Ltd
Original Assignee
Nitride Semiconductors Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitride Semiconductors Co Ltd filed Critical Nitride Semiconductors Co Ltd
Priority claimed from EP02100242A external-priority patent/EP1345275B1/en
Application granted granted Critical
Publication of DE60228931D1 publication Critical patent/DE60228931D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

DE60228931T 2002-03-13 2002-03-13 Method to roughen the surface of a semiconductor Expired - Lifetime DE60228931D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP02100242A EP1345275B1 (en) 2000-09-22 2002-03-13 Method for roughening semiconductor surface

Publications (1)

Publication Number Publication Date
DE60228931D1 true DE60228931D1 (en) 2008-10-30

Family

ID=39777869

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60228931T Expired - Lifetime DE60228931D1 (en) 2002-03-13 2002-03-13 Method to roughen the surface of a semiconductor

Country Status (1)

Country Link
DE (1) DE60228931D1 (en)

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition