DE60214394D1 - In einem mikroventil zur druckregelung und in einem proportionalmikroventil einsetzbare mikromechanische struktur - Google Patents

In einem mikroventil zur druckregelung und in einem proportionalmikroventil einsetzbare mikromechanische struktur

Info

Publication number
DE60214394D1
DE60214394D1 DE60214394T DE60214394T DE60214394D1 DE 60214394 D1 DE60214394 D1 DE 60214394D1 DE 60214394 T DE60214394 T DE 60214394T DE 60214394 T DE60214394 T DE 60214394T DE 60214394 D1 DE60214394 D1 DE 60214394D1
Authority
DE
Germany
Prior art keywords
face
axial end
plate
slider element
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60214394T
Other languages
English (en)
Other versions
DE60214394T2 (de
Inventor
A Hunnicutt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kelsey Hayes Co
Original Assignee
Kelsey Hayes Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/919,407 external-priority patent/US6694998B1/en
Application filed by Kelsey Hayes Co filed Critical Kelsey Hayes Co
Publication of DE60214394D1 publication Critical patent/DE60214394D1/de
Application granted granted Critical
Publication of DE60214394T2 publication Critical patent/DE60214394T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/0401—Valve members; Fluid interconnections therefor
    • F15B13/0402—Valve members; Fluid interconnections therefor for linearly sliding valves, e.g. spool valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0011—Gate valves or sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0059—Operating means specially adapted for microvalves actuated by fluids actuated by a pilot fluid
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/04—Control of fluid pressure without auxiliary power
    • G05D16/10—Control of fluid pressure without auxiliary power the sensing element being a piston or plunger
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0694—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means or flow sources of very small size, e.g. microfluidics
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0076—Fabrication methods specifically adapted for microvalves using electrical discharge machining [EDM], milling or drilling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Control Of Fluid Pressure (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Fluid-Driven Valves (AREA)
DE60214394T 2001-07-31 2002-07-31 In einem mikroventil zur druckregelung und in einem proportionalmikroventil einsetzbare mikromechanische struktur Expired - Lifetime DE60214394T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/919,407 US6694998B1 (en) 2000-03-22 2001-07-31 Micromachined structure usable in pressure regulating microvalve and proportional microvalve
US919407 2001-07-31
PCT/US2002/024255 WO2003012566A1 (en) 2001-07-31 2002-07-31 Micromachined structure usable in pressure regulating microvalve and proportional microvalve

Publications (2)

Publication Number Publication Date
DE60214394D1 true DE60214394D1 (de) 2006-10-12
DE60214394T2 DE60214394T2 (de) 2007-09-13

Family

ID=25442021

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60214394T Expired - Lifetime DE60214394T2 (de) 2001-07-31 2002-07-31 In einem mikroventil zur druckregelung und in einem proportionalmikroventil einsetzbare mikromechanische struktur

Country Status (4)

Country Link
EP (1) EP1415210B1 (de)
AT (1) ATE338298T1 (de)
DE (1) DE60214394T2 (de)
WO (1) WO2003012566A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007525630A (ja) * 2004-02-27 2007-09-06 アルーマナ、マイクロウ、エルエルシー ハイブリッド・マイクロ／マクロ・プレート弁
WO2006018043A2 (en) * 2004-08-18 2006-02-23 Agilent Technologies, Inc. Valve slider for a microfluidic coupling device
WO2008076388A1 (en) * 2006-12-15 2008-06-26 Microstaq, Inc. Microvalve device
DK179314B1 (en) 2017-02-08 2018-04-30 Steeper Energy Aps Pressurization system for high pressure treatment system

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3917396A1 (de) * 1989-05-29 1990-12-06 Buerkert Gmbh Mikroventil
DE4041579A1 (de) * 1990-12-22 1992-06-25 Bosch Gmbh Robert Mikroventil
US6845962B1 (en) * 2000-03-22 2005-01-25 Kelsey-Hayes Company Thermally actuated microvalve device
US6494804B1 (en) * 2000-06-20 2002-12-17 Kelsey-Hayes Company Microvalve for electronically controlled transmission

Also Published As

Publication number Publication date
ATE338298T1 (de) 2006-09-15
WO2003012566A1 (en) 2003-02-13
EP1415210B1 (de) 2006-08-30
DE60214394T2 (de) 2007-09-13
EP1415210A1 (de) 2004-05-06

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Legal Events

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