DE602006021613D1 - Entwicklerlösung und verwendungsprozess - Google Patents

Entwicklerlösung und verwendungsprozess

Info

Publication number
DE602006021613D1
DE602006021613D1 DE602006021613T DE602006021613T DE602006021613D1 DE 602006021613 D1 DE602006021613 D1 DE 602006021613D1 DE 602006021613 T DE602006021613 T DE 602006021613T DE 602006021613 T DE602006021613 T DE 602006021613T DE 602006021613 D1 DE602006021613 D1 DE 602006021613D1
Authority
DE
Germany
Prior art keywords
use process
developer solution
developer
solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006021613T
Other languages
English (en)
Inventor
Kesheng Feng
Daniel J Hart
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MacDermid Inc
Original Assignee
MacDermid Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MacDermid Inc filed Critical MacDermid Inc
Publication of DE602006021613D1 publication Critical patent/DE602006021613D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/30Imagewise removal using liquid means
    • G03F7/32Liquid compositions therefor, e.g. developers
    • G03F7/322Aqueous alkaline compositions

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
DE602006021613T 2005-11-30 2006-08-28 Entwicklerlösung und verwendungsprozess Active DE602006021613D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/290,118 US7094523B1 (en) 2005-11-30 2005-11-30 Developer solution and process for use
PCT/US2006/033417 WO2007064377A1 (en) 2005-11-30 2006-08-28 Developer solution and process for use

Publications (1)

Publication Number Publication Date
DE602006021613D1 true DE602006021613D1 (de) 2011-06-09

Family

ID=36821675

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006021613T Active DE602006021613D1 (de) 2005-11-30 2006-08-28 Entwicklerlösung und verwendungsprozess

Country Status (8)

Country Link
US (1) US7094523B1 (de)
EP (1) EP1958028B1 (de)
JP (1) JP2009517718A (de)
CN (1) CN101313252B (de)
DE (1) DE602006021613D1 (de)
ES (1) ES2364578T3 (de)
TW (1) TW200720859A (de)
WO (1) WO2007064377A1 (de)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4528023A (en) * 1983-07-25 1985-07-09 Stauffer Chemical Company Enhancement of herbicidal activity of tetraaluminum salts of N-phosphonomethylglycine
DE3738864A1 (de) * 1987-11-16 1989-05-24 Hoechst Ag Polymerisierbare verbindungen und diese enthaltendes durch strahlung polymerisierbares gemisch
US5998102A (en) * 1997-10-06 1999-12-07 Agfa Corporation Etch inhibitors in developer for lithographic printing plates
US6063550A (en) 1998-04-29 2000-05-16 Morton International, Inc. Aqueous developing solutions for reduced developer residue
US5922522A (en) 1998-04-29 1999-07-13 Morton International, Inc. Aqueous developing solutions for reduced developer residue
US6296694B1 (en) * 1998-06-25 2001-10-02 Roger Machson Transparent anti-fog anti-splash coating compositions
US6248506B1 (en) 1998-12-04 2001-06-19 Nichigo-Morton Aqueous developing solutions for reduced developer residue
AU2495400A (en) * 1999-01-11 2000-08-01 Huntsman Petrochemical Corporation Surfactant compositions containing alkoxylated amines
US7517636B2 (en) * 2000-05-29 2009-04-14 Hitachi Chemical Co., Ltd. Photosensitive resin composition, photosensitive element, production method of resist pattern and production method for printed circuit board
JP2003195518A (ja) * 2001-12-14 2003-07-09 Shipley Co Llc フォトレジスト用現像液
US6900003B2 (en) 2002-04-12 2005-05-31 Shipley Company, L.L.C. Photoresist processing aid and method

Also Published As

Publication number Publication date
EP1958028A1 (de) 2008-08-20
EP1958028B1 (de) 2011-04-27
TW200720859A (en) 2007-06-01
US7094523B1 (en) 2006-08-22
CN101313252B (zh) 2011-07-20
CN101313252A (zh) 2008-11-26
EP1958028A4 (de) 2009-04-08
JP2009517718A (ja) 2009-04-30
ES2364578T3 (es) 2011-09-07
WO2007064377A1 (en) 2007-06-07

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