DE602006021613D1 - Entwicklerlösung und verwendungsprozess - Google Patents
Entwicklerlösung und verwendungsprozessInfo
- Publication number
- DE602006021613D1 DE602006021613D1 DE602006021613T DE602006021613T DE602006021613D1 DE 602006021613 D1 DE602006021613 D1 DE 602006021613D1 DE 602006021613 T DE602006021613 T DE 602006021613T DE 602006021613 T DE602006021613 T DE 602006021613T DE 602006021613 D1 DE602006021613 D1 DE 602006021613D1
- Authority
- DE
- Germany
- Prior art keywords
- use process
- developer solution
- developer
- solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/32—Liquid compositions therefor, e.g. developers
- G03F7/322—Aqueous alkaline compositions
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/290,118 US7094523B1 (en) | 2005-11-30 | 2005-11-30 | Developer solution and process for use |
PCT/US2006/033417 WO2007064377A1 (en) | 2005-11-30 | 2006-08-28 | Developer solution and process for use |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602006021613D1 true DE602006021613D1 (de) | 2011-06-09 |
Family
ID=36821675
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602006021613T Active DE602006021613D1 (de) | 2005-11-30 | 2006-08-28 | Entwicklerlösung und verwendungsprozess |
Country Status (8)
Country | Link |
---|---|
US (1) | US7094523B1 (de) |
EP (1) | EP1958028B1 (de) |
JP (1) | JP2009517718A (de) |
CN (1) | CN101313252B (de) |
DE (1) | DE602006021613D1 (de) |
ES (1) | ES2364578T3 (de) |
TW (1) | TW200720859A (de) |
WO (1) | WO2007064377A1 (de) |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4528023A (en) * | 1983-07-25 | 1985-07-09 | Stauffer Chemical Company | Enhancement of herbicidal activity of tetraaluminum salts of N-phosphonomethylglycine |
DE3738864A1 (de) * | 1987-11-16 | 1989-05-24 | Hoechst Ag | Polymerisierbare verbindungen und diese enthaltendes durch strahlung polymerisierbares gemisch |
US5998102A (en) * | 1997-10-06 | 1999-12-07 | Agfa Corporation | Etch inhibitors in developer for lithographic printing plates |
US6063550A (en) | 1998-04-29 | 2000-05-16 | Morton International, Inc. | Aqueous developing solutions for reduced developer residue |
US5922522A (en) | 1998-04-29 | 1999-07-13 | Morton International, Inc. | Aqueous developing solutions for reduced developer residue |
US6296694B1 (en) * | 1998-06-25 | 2001-10-02 | Roger Machson | Transparent anti-fog anti-splash coating compositions |
US6248506B1 (en) | 1998-12-04 | 2001-06-19 | Nichigo-Morton | Aqueous developing solutions for reduced developer residue |
AU2495400A (en) * | 1999-01-11 | 2000-08-01 | Huntsman Petrochemical Corporation | Surfactant compositions containing alkoxylated amines |
US7517636B2 (en) * | 2000-05-29 | 2009-04-14 | Hitachi Chemical Co., Ltd. | Photosensitive resin composition, photosensitive element, production method of resist pattern and production method for printed circuit board |
JP2003195518A (ja) * | 2001-12-14 | 2003-07-09 | Shipley Co Llc | フォトレジスト用現像液 |
US6900003B2 (en) | 2002-04-12 | 2005-05-31 | Shipley Company, L.L.C. | Photoresist processing aid and method |
-
2005
- 2005-11-30 US US11/290,118 patent/US7094523B1/en active Active
-
2006
- 2006-08-28 CN CN2006800439667A patent/CN101313252B/zh not_active Expired - Fee Related
- 2006-08-28 WO PCT/US2006/033417 patent/WO2007064377A1/en active Application Filing
- 2006-08-28 ES ES06790025T patent/ES2364578T3/es active Active
- 2006-08-28 EP EP06790025A patent/EP1958028B1/de not_active Expired - Fee Related
- 2006-08-28 JP JP2008543269A patent/JP2009517718A/ja active Pending
- 2006-08-28 DE DE602006021613T patent/DE602006021613D1/de active Active
- 2006-09-21 TW TW095134892A patent/TW200720859A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
EP1958028A1 (de) | 2008-08-20 |
EP1958028B1 (de) | 2011-04-27 |
TW200720859A (en) | 2007-06-01 |
US7094523B1 (en) | 2006-08-22 |
CN101313252B (zh) | 2011-07-20 |
CN101313252A (zh) | 2008-11-26 |
EP1958028A4 (de) | 2009-04-08 |
JP2009517718A (ja) | 2009-04-30 |
ES2364578T3 (es) | 2011-09-07 |
WO2007064377A1 (en) | 2007-06-07 |
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