DE602005016346D1 - Screeningsystem mittels eines zwischen einem Transmissions- und Reflektionsmodus konvertierbaren Röntgendiffraktometer - Google Patents

Screeningsystem mittels eines zwischen einem Transmissions- und Reflektionsmodus konvertierbaren Röntgendiffraktometer

Info

Publication number
DE602005016346D1
DE602005016346D1 DE602005016346T DE602005016346T DE602005016346D1 DE 602005016346 D1 DE602005016346 D1 DE 602005016346D1 DE 602005016346 T DE602005016346 T DE 602005016346T DE 602005016346 T DE602005016346 T DE 602005016346T DE 602005016346 D1 DE602005016346 D1 DE 602005016346D1
Authority
DE
Germany
Prior art keywords
convertible
transmission
ray diffractometer
screening system
reflection mode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005016346T
Other languages
English (en)
Inventor
Bob Boaping He
Ryan C Bollig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bruker AXS Inc
Original Assignee
Bruker AXS Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bruker AXS Inc filed Critical Bruker AXS Inc
Publication of DE602005016346D1 publication Critical patent/DE602005016346D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
    • G01N23/20016—Goniometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE602005016346T 2004-07-29 2005-07-26 Screeningsystem mittels eines zwischen einem Transmissions- und Reflektionsmodus konvertierbaren Röntgendiffraktometer Active DE602005016346D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US59203704P 2004-07-29 2004-07-29

Publications (1)

Publication Number Publication Date
DE602005016346D1 true DE602005016346D1 (de) 2009-10-15

Family

ID=35033313

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005016346T Active DE602005016346D1 (de) 2004-07-29 2005-07-26 Screeningsystem mittels eines zwischen einem Transmissions- und Reflektionsmodus konvertierbaren Röntgendiffraktometer

Country Status (3)

Country Link
US (1) US7242745B2 (de)
EP (1) EP1621873B1 (de)
DE (1) DE602005016346D1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7120228B2 (en) * 2004-09-21 2006-10-10 Jordan Valley Applied Radiation Ltd. Combined X-ray reflectometer and diffractometer
US8243878B2 (en) * 2010-01-07 2012-08-14 Jordan Valley Semiconductors Ltd. High-resolution X-ray diffraction measurement with enhanced sensitivity
US8687766B2 (en) 2010-07-13 2014-04-01 Jordan Valley Semiconductors Ltd. Enhancing accuracy of fast high-resolution X-ray diffractometry
US8437450B2 (en) 2010-12-02 2013-05-07 Jordan Valley Semiconductors Ltd. Fast measurement of X-ray diffraction from tilted layers
US8903044B2 (en) * 2011-01-31 2014-12-02 Rigaku Corporation X-ray diffraction apparatus
US8781070B2 (en) 2011-08-11 2014-07-15 Jordan Valley Semiconductors Ltd. Detection of wafer-edge defects
US9976971B2 (en) * 2014-03-06 2018-05-22 United Technologies Corporation Systems and methods for X-ray diffraction
US9726624B2 (en) 2014-06-18 2017-08-08 Bruker Jv Israel Ltd. Using multiple sources/detectors for high-throughput X-ray topography measurement
US10161887B2 (en) * 2015-01-20 2018-12-25 United Technologies Corporation Systems and methods for materials analysis
US9835571B2 (en) * 2015-10-06 2017-12-05 Shimadzu Corporation X-ray analyzer
JP6999268B2 (ja) 2016-01-11 2022-01-18 ブルカー テクノロジーズ リミテッド Ｘ線スキャタロメトリーのための方法および装置
FR3054394B1 (fr) * 2016-07-19 2019-08-23 Airbus Operations (S.A.S.) Dispositif pour transferer des informations d'un systeme avionique d'un aeronef vers un calculateur independant
DE102016224940B3 (de) * 2016-12-14 2017-08-24 Bruker Axs Gmbh Röntgenvorrichtung mit motorischer Drehmomentkompensation am Detektorkreis des Goniometers und Verfahren zum Betrieb einer Röntgenvorrichtung
US10816487B2 (en) 2018-04-12 2020-10-27 Bruker Technologies Ltd. Image contrast in X-ray topography imaging for defect inspection
JP2019191168A (ja) 2018-04-23 2019-10-31 ブルカー ジェイヴィ イスラエル リミテッドＢｒｕｋｅｒ Ｊｖ Ｉｓｒａｅｌ Ｌｔｄ． 小角ｘ線散乱測定用のｘ線源光学系
US11181490B2 (en) 2018-07-05 2021-11-23 Bruker Technologies Ltd. Small-angle x-ray scatterometry
CN112986292B (zh) * 2021-02-08 2023-06-09 中国科学院上海应用物理研究所 一种温度-应力耦合的x射线原位测量装置
US11781999B2 (en) 2021-09-05 2023-10-10 Bruker Technologies Ltd. Spot-size control in reflection-based and scatterometry-based X-ray metrology systems

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19839472C1 (de) * 1998-08-29 2000-11-02 Bruker Axs Analytical X Ray Sy Automatischer Probenwechsler für Röntgen-Diffraktometer
US6782076B2 (en) * 2001-12-07 2004-08-24 Bede Scientific Instruments Limited X-ray topographic system
EP1490671B1 (de) 2002-03-21 2012-05-09 Bruker AXS, Inc. Screening mittels eines Röntgendiffraktometers in Transmissionsgeometrie
DE10317678A1 (de) * 2003-04-17 2004-11-18 Bruker Axs Gmbh Röntgen-optisches System zum kombinatorischen Screening einer Probenbibliothek

Also Published As

Publication number Publication date
EP1621873A1 (de) 2006-02-01
US7242745B2 (en) 2007-07-10
EP1621873B1 (de) 2009-09-02
US20060023838A1 (en) 2006-02-02

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