DE602005015245D1 - Temperatursteuersystem und -verfahren - Google Patents

Temperatursteuersystem und -verfahren

Info

Publication number
DE602005015245D1
DE602005015245D1 DE602005015245T DE602005015245T DE602005015245D1 DE 602005015245 D1 DE602005015245 D1 DE 602005015245D1 DE 602005015245 T DE602005015245 T DE 602005015245T DE 602005015245 T DE602005015245 T DE 602005015245T DE 602005015245 D1 DE602005015245 D1 DE 602005015245D1
Authority
DE
Germany
Prior art keywords
control system
temperature control
face
tec
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE602005015245T
Other languages
English (en)
Inventor
Theo A M Ruijl
Ralph T H Maessen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of DE602005015245D1 publication Critical patent/DE602005015245D1/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F13/00Arrangements for modifying heat-transfer, e.g. increasing, decreasing
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00Control of temperature
    • G05D23/19Control of temperature characterised by the use of electric means
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00Control of temperature
    • G05D23/19Control of temperature characterised by the use of electric means
    • G05D23/1919Control of temperature characterised by the use of electric means characterised by the type of controller
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B21/00Machines, plants or systems, using electric or magnetic effects
    • F25B21/02Machines, plants or systems, using electric or magnetic effects using Peltier effect; using Nernst-Ettinghausen effect
DE602005015245T 2004-11-02 2005-10-28 Temperatursteuersystem und -verfahren Expired - Fee Related DE602005015245D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US62423604P 2004-11-02 2004-11-02
PCT/IB2005/053535 WO2006048808A1 (en) 2004-11-02 2005-10-28 Temperature control system and method

Publications (1)

Publication Number Publication Date
DE602005015245D1 true DE602005015245D1 (de) 2009-08-13

Family

ID=35788702

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005015245T Expired - Fee Related DE602005015245D1 (de) 2004-11-02 2005-10-28 Temperatursteuersystem und -verfahren

Country Status (8)

Country Link
US (1) US20090056914A1 (de)
EP (1) EP1810107B1 (de)
JP (1) JP2008519429A (de)
KR (1) KR20070073842A (de)
CN (1) CN101052931A (de)
AT (1) ATE435449T1 (de)
DE (1) DE602005015245D1 (de)
WO (1) WO2006048808A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101470449B (zh) * 2007-12-28 2010-09-29 和椿科技股份有限公司 散热控制系统及其散热控制方法
NL2003223A (en) * 2008-09-30 2010-03-31 Asml Netherlands Bv Projection system, lithographic apparatus, method of postitioning an optical element and method of projecting a beam of radiation onto a substrate.
US8128188B2 (en) * 2009-04-30 2012-03-06 Hewlett-Packard Development Company, L.P. Monitoring ink flow
JP5146417B2 (ja) * 2009-07-10 2013-02-20 トヨタ自動車株式会社 露光装置
GB2494880B (en) * 2011-09-21 2018-04-11 Bae Systems Plc Layer assembly for heat exchanger
US9059130B2 (en) 2012-12-31 2015-06-16 International Business Machines Corporation Phase changing on-chip thermal heat sink
CN105892517A (zh) * 2015-01-26 2016-08-24 中国科学院宁波材料技术与工程研究所 温度控制系统
EA036930B1 (ru) 2015-07-23 2021-01-15 Сифиид Устройство термоуправления и способы применения
US20160327347A1 (en) * 2016-07-21 2016-11-10 Eric D. Stanley Synergistic pairing convective and conductive cooling system and process
CN107454813B (zh) * 2017-09-30 2023-05-23 中国工程物理研究院应用电子学研究所 一种热电制冷复合相变蓄冷的控温冷却装置及其控温方法
CH718844A1 (de) 2021-07-20 2023-01-31 Ziemba Georg System zur Erzeugung von hohen Temperaturen in einem Reaktor.

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100236506B1 (ko) * 1990-11-29 2000-01-15 퍼킨-엘머시터스인스트루먼츠 폴리머라제 연쇄 반응 수행 장치
US5564471A (en) * 1995-01-23 1996-10-15 Dover Corporation Fuel hose breakaway unit
US5695221A (en) * 1995-10-02 1997-12-09 Dover Corporation Fuel hose breakaway units
US5887435A (en) * 1995-12-08 1999-03-30 Litton Systems, Inc. Environmentally protected module
US5918469A (en) 1996-01-11 1999-07-06 Silicon Thermal, Inc. Cooling system and method of cooling electronic devices
MY126371A (en) * 1996-11-08 2006-09-29 Panasonic Corp Thermoelectric refrigeration system.
JP3952325B2 (ja) * 1997-06-10 2007-08-01 Smc株式会社 高速薄板冷却装置
GB2331838A (en) * 1997-11-24 1999-06-02 Coolbox Portable,thermoelectric,temperature controlled receptacles.
US5931000A (en) * 1998-04-23 1999-08-03 Turner; William Evans Cooled electrical system for use downhole
US20030205363A1 (en) 2001-11-09 2003-11-06 International Business Machines Corporation Enhanced air cooling of electronic devices using fluid phase change heat transfer
US6532746B1 (en) * 2002-01-24 2003-03-18 Tyco Telecommunications (Us) Inc. Method and apparatus for securing an electronic component
US20040002655A1 (en) 2002-06-27 2004-01-01 Acuson, A Siemens Company System and method for improved transducer thermal design using thermo-electric cooling
JP4403073B2 (ja) 2002-07-11 2010-01-20 テンプトロニック コーポレイション 熱電気モジュールのための隙間を作る層間スペーサを有する熱制御アセンブリを備えるワークピースチャック
US6997197B2 (en) * 2002-12-13 2006-02-14 International Business Machines Corporation Apparatus and method for rapid thermal control of a workpiece in liquid or dense phase fluid
US6809417B1 (en) * 2003-04-07 2004-10-26 Fairchild Semiconductor Corporation Power circuitry with a thermionic cooling system

Also Published As

Publication number Publication date
CN101052931A (zh) 2007-10-10
ATE435449T1 (de) 2009-07-15
EP1810107A1 (de) 2007-07-25
JP2008519429A (ja) 2008-06-05
WO2006048808A1 (en) 2006-05-11
US20090056914A1 (en) 2009-03-05
KR20070073842A (ko) 2007-07-10
EP1810107B1 (de) 2009-07-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee