DE602004015521D1 - Verriegelbarer optischer Mems Schalter - Google Patents

Verriegelbarer optischer Mems Schalter

Info

Publication number
DE602004015521D1
DE602004015521D1 DE200460015521 DE602004015521T DE602004015521D1 DE 602004015521 D1 DE602004015521 D1 DE 602004015521D1 DE 200460015521 DE200460015521 DE 200460015521 DE 602004015521 T DE602004015521 T DE 602004015521T DE 602004015521 D1 DE602004015521 D1 DE 602004015521D1
Authority
DE
Germany
Prior art keywords
mems switch
optical mems
lockable
lockable optical
switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE200460015521
Other languages
English (en)
Inventor
Joel A Kubby
Kathleen A Feinberg
Kristine A German
Peter M Gulvin
Jun Ma
Pinyen Lin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/712,203 external-priority patent/US6947624B2/en
Application filed by Xerox Corp filed Critical Xerox Corp
Publication of DE602004015521D1 publication Critical patent/DE602004015521D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
    • G02B6/3508—Lateral or transverse displacement of the whole waveguides, e.g. by varying the distance between opposed waveguide ends, or by mutual lateral displacement of opposed waveguide ends
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12145—Switch
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/356—Switching arrangements, i.e. number of input/output ports and interconnection types in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
DE200460015521 2003-03-19 2004-03-19 Verriegelbarer optischer Mems Schalter Expired - Lifetime DE602004015521D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US45606303P 2003-03-19 2003-03-19
US45608603P 2003-03-19 2003-03-19
US10/712,203 US6947624B2 (en) 2003-03-19 2003-11-12 MEMS optical latching switch

Publications (1)

Publication Number Publication Date
DE602004015521D1 true DE602004015521D1 (de) 2008-09-18

Family

ID=32830887

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200460015521 Expired - Lifetime DE602004015521D1 (de) 2003-03-19 2004-03-19 Verriegelbarer optischer Mems Schalter

Country Status (4)

Country Link
EP (1) EP1460462B1 (de)
JP (1) JP4476649B2 (de)
CA (1) CA2460765C (de)
DE (1) DE602004015521D1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7162112B2 (en) * 2004-11-23 2007-01-09 Xerox Corporation Microfabrication process for control of waveguide gap size
US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
EP2808864A3 (de) * 2005-02-23 2014-12-24 Pixtronix, Inc. Verfahren und Vorrichtung zur Betätigung von Anzeigen
US9087486B2 (en) 2005-02-23 2015-07-21 Pixtronix, Inc. Circuits for controlling display apparatus
US7999994B2 (en) 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
US9082353B2 (en) 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
US8169679B2 (en) 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6549107B2 (en) * 2001-02-26 2003-04-15 Opticnet, Inc. Latching mechanism for MEMS actuator and method of fabrication
AU2002308572A1 (en) * 2001-05-04 2002-11-18 L3 Optics, Inc. Method for separating silica waveguides

Also Published As

Publication number Publication date
CA2460765C (en) 2010-07-06
CA2460765A1 (en) 2004-09-19
EP1460462B1 (de) 2008-08-06
JP2004287431A (ja) 2004-10-14
JP4476649B2 (ja) 2010-06-09
EP1460462A1 (de) 2004-09-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition