DE602004007573D1 - A method of preventing deposits of contaminant particles on the surface of a microcomponent, microcompartment storage device, and thin film deposition apparatus - Google Patents

A method of preventing deposits of contaminant particles on the surface of a microcomponent, microcompartment storage device, and thin film deposition apparatus

Info

Publication number
DE602004007573D1
DE602004007573D1 DE602004007573T DE602004007573T DE602004007573D1 DE 602004007573 D1 DE602004007573 D1 DE 602004007573D1 DE 602004007573 T DE602004007573 T DE 602004007573T DE 602004007573 T DE602004007573 T DE 602004007573T DE 602004007573 D1 DE602004007573 D1 DE 602004007573D1
Authority
DE
Germany
Prior art keywords
microcomponent
storage device
particles
microcompartment
contaminant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004007573T
Other languages
German (de)
Other versions
DE602004007573T2 (en
Inventor
Etienne Quesnel
Viviane Muffato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE602004007573D1 publication Critical patent/DE602004007573D1/en
Application granted granted Critical
Publication of DE602004007573T2 publication Critical patent/DE602004007573T2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134—Plasma spraying

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

Preventing the deposition of polarized particles (7) from a contaminant source (5) on the surface of a microcomponent in a vacuum chamber (3) comprises spraying a beam (8) of oppositely polarized particles between the contaminant source and the microcomponent to entrain the contaminant particles away from the microcomponent to a collector (10). Independent claims are also included for the following: (1) a storage device comprising a vacuum chamber containing a microcomponent and, for carrying out the above process, a source emitting the beam of oppositely polarized particles parallel to and close to the surface of the microcomponent; and (2) a thin layer coating device comprising a vacuum chamber containing a microcomponent substrate (2) and a device for spraying a stream of material (6) for forming a thin layer on the surface of the microcomponent and, for carrying out the above process, a source emitting the beam of oppositely polarized particles in the direction of the stream of material so as to entrain the contaminant particles in the stream away from the microcomponent.
DE602004007573T 2003-04-28 2004-04-02 A method of preventing deposits of contaminant particles on the surface of a microcomponent, microcompartment storage device, and thin film deposition apparatus Expired - Lifetime DE602004007573T2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0305169A FR2854169B1 (en) 2003-04-28 2003-04-28 PROCESS FOR PREVENTING DEPOSITION OF CONTAMINANT PARTICLES ON THE SURFACE OF A MICRO COMPONENT, DEVICE FOR STORING A MICRO COMPONENT, AND DEVICE FOR DEPOSITING THIN LAYERS
FR0305169 2003-04-28

Publications (2)

Publication Number Publication Date
DE602004007573D1 true DE602004007573D1 (en) 2007-08-30
DE602004007573T2 DE602004007573T2 (en) 2008-04-17

Family

ID=32982313

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004007573T Expired - Lifetime DE602004007573T2 (en) 2003-04-28 2004-04-02 A method of preventing deposits of contaminant particles on the surface of a microcomponent, microcompartment storage device, and thin film deposition apparatus

Country Status (6)

Country Link
US (1) US20050051421A1 (en)
EP (1) EP1473381B1 (en)
JP (1) JP4597565B2 (en)
AT (1) ATE367457T1 (en)
DE (1) DE602004007573T2 (en)
FR (1) FR2854169B1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6972420B2 (en) * 2004-04-28 2005-12-06 Intel Corporation Atomic beam to protect a reticle
CN101681114B (en) 2007-06-12 2013-05-08 皇家飞利浦电子股份有限公司 Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivity
US8084757B2 (en) * 2008-01-17 2011-12-27 Applied Materials, Inc. Contamination prevention in extreme ultraviolet lithography
KR20210091345A (en) 2018-12-10 2021-07-21 어플라이드 머티어리얼스, 인코포레이티드 Removal of adhesion features from photomasks in extreme ultraviolet lithography applications
KR20210118198A (en) * 2019-02-11 2021-09-29 어플라이드 머티어리얼스, 인코포레이티드 Method for Particle Removal from Wafers via Plasma Modification in Pulsed PVD
KR102467650B1 (en) * 2021-11-16 2022-11-21 덕우세미텍 주식회사 Apparatus for blocking particle transfer and lothography using charged beam in vacuum system
KR20230143794A (en) * 2022-04-06 2023-10-13 덕우세미텍 주식회사 Lithography apparatus using charged beam in vacuum system
KR20230143795A (en) * 2022-04-06 2023-10-13 덕우세미텍 주식회사 Apparatus for blocking particle transfer and lithography using charged beam in vacuum system having electrostatic trap
KR20230174666A (en) * 2022-06-21 2023-12-28 덕우세미텍 주식회사 An electric potenrial barrier module and a lithography apparatus including the same
KR20230174667A (en) * 2022-06-21 2023-12-28 덕우세미텍 주식회사 An electric potenrial barrier module with heat transfer prevenstion function and a lithography apparatus including the same

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4392453A (en) * 1981-08-26 1983-07-12 Varian Associates, Inc. Molecular beam converters for vacuum coating systems
US5366559A (en) * 1993-05-27 1994-11-22 Research Triangle Institute Method for protecting a substrate surface from contamination using the photophoretic effect
JPH0729832A (en) * 1993-07-15 1995-01-31 Sony Corp Method and system for depositing film
JPH07291790A (en) * 1994-04-15 1995-11-07 Nippon Steel Corp Molecular beam epitaxy apparatus
JP3503787B2 (en) * 1996-01-22 2004-03-08 貢 英 Thin film formation method
JP3874397B2 (en) * 2000-07-11 2007-01-31 株式会社荏原製作所 Method and apparatus for forming film on substrate
US20040055871A1 (en) * 2002-09-25 2004-03-25 The Regents Of The University Of California Use of ion beams for protecting substrates from particulate defect contamination in ultra-low-defect coating processes

Also Published As

Publication number Publication date
FR2854169B1 (en) 2005-06-10
US20050051421A1 (en) 2005-03-10
EP1473381A1 (en) 2004-11-03
JP2004332115A (en) 2004-11-25
EP1473381B1 (en) 2007-07-18
JP4597565B2 (en) 2010-12-15
DE602004007573T2 (en) 2008-04-17
ATE367457T1 (en) 2007-08-15
FR2854169A1 (en) 2004-10-29

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