DE60129650D1 - Apparatus for dressing a polishing pad and method of making the polishing pad - Google Patents

Apparatus for dressing a polishing pad and method of making the polishing pad

Info

Publication number
DE60129650D1
DE60129650D1 DE60129650T DE60129650T DE60129650D1 DE 60129650 D1 DE60129650 D1 DE 60129650D1 DE 60129650 T DE60129650 T DE 60129650T DE 60129650 T DE60129650 T DE 60129650T DE 60129650 D1 DE60129650 D1 DE 60129650D1
Authority
DE
Germany
Prior art keywords
polishing pad
dressing
making
polishing
pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60129650T
Other languages
German (de)
Other versions
DE60129650T2 (en
Inventor
Kenichii Kimura
Moriyasu Kaenanri
Hidemi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Read Co Ltd
Original Assignee
Read Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Read Co Ltd filed Critical Read Co Ltd
Publication of DE60129650D1 publication Critical patent/DE60129650D1/en
Application granted granted Critical
Publication of DE60129650T2 publication Critical patent/DE60129650T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12—Dressing tools; Holders therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
DE2001629650 2000-10-26 2001-06-15 Apparatus for dressing a polishing pad and method of making the polishing pad Expired - Fee Related DE60129650T2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000327146 2000-10-26
JP2000327146A JP3759399B2 (en) 2000-10-26 2000-10-26 Dresser for polishing cloth and method for producing the same

Publications (2)

Publication Number Publication Date
DE60129650D1 true DE60129650D1 (en) 2007-09-13
DE60129650T2 DE60129650T2 (en) 2008-05-21

Family

ID=18804227

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2001629650 Expired - Fee Related DE60129650T2 (en) 2000-10-26 2001-06-15 Apparatus for dressing a polishing pad and method of making the polishing pad

Country Status (3)

Country Link
EP (1) EP1201367B1 (en)
JP (1) JP3759399B2 (en)
DE (1) DE60129650T2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10156661A1 (en) * 2001-11-17 2003-06-05 Saint Gobain Winter Diamantwer Diamond dressing roll and manufacturing method
JP4234991B2 (en) 2002-12-26 2009-03-04 Ｈｏｙａ株式会社 Manufacturing method of glass substrate for information recording medium and glass substrate for information recording medium manufactured by the manufacturing method
TWI286963B (en) * 2004-03-10 2007-09-21 Read Co Ltd Dresser for polishing cloth and method for manufacturing thereof
JP2005288685A (en) * 2004-03-10 2005-10-20 Read Co Ltd Dresser for polishing cloth, and manufacturing method thereof
US7258708B2 (en) * 2004-12-30 2007-08-21 Chien-Min Sung Chemical mechanical polishing pad dresser
KR102012786B1 (en) * 2017-05-17 2019-08-21 모던세라믹스(주) positioner with replaceable dressing block, and manufacturing method thereof
US20200324386A1 (en) * 2019-04-09 2020-10-15 Entegris, Inc. Segment designs for discs

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2044146B (en) * 1978-05-30 1982-10-13 Henderson Diamond Tool Co Ltd Manufacture of diamond and like tools
AT386558B (en) * 1984-03-30 1988-09-12 De Beers Ind Diamond USE OF A GRINDING TOOL
US5380390B1 (en) * 1991-06-10 1996-10-01 Ultimate Abras Systems Inc Patterned abrasive material and method
JP3368312B2 (en) * 1996-06-26 2003-01-20 新日本製鐵株式会社 Dresser for polishing cloth for semiconductor substrate and method of manufacturing the same
EP1017540B1 (en) * 1997-08-15 2002-06-12 Struers A/S An abrasive means and a grinding process
JP3057250U (en) * 1998-09-03 1999-04-09 株式会社東京ダイヤモンド工具製作所 Electroplated dresser for CMP
JP2000141204A (en) * 1998-09-08 2000-05-23 Sumitomo Metal Ind Ltd Dressing device, and polishing device and cmp device using the same

Also Published As

Publication number Publication date
JP2002127017A (en) 2002-05-08
JP3759399B2 (en) 2006-03-22
EP1201367B1 (en) 2007-08-01
EP1201367A1 (en) 2002-05-02
DE60129650T2 (en) 2008-05-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee