DE60037554D1 - Turbo molecular pump - Google Patents

Turbo molecular pump

Info

Publication number
DE60037554D1
DE60037554D1 DE60037554T DE60037554T DE60037554D1 DE 60037554 D1 DE60037554 D1 DE 60037554D1 DE 60037554 T DE60037554 T DE 60037554T DE 60037554 T DE60037554 T DE 60037554T DE 60037554 D1 DE60037554 D1 DE 60037554D1
Authority
DE
Germany
Prior art keywords
molecular pump
turbo molecular
turbo
pump
molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60037554T
Other languages
German (de)
Other versions
DE60037554T2 (en
Inventor
Atsushi Shiokawa
Hiroshi Sobukawa
Hiroyuki Kawasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of DE60037554D1 publication Critical patent/DE60037554D1/en
Publication of DE60037554T2 publication Critical patent/DE60037554T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE60037554T 1999-06-14 2000-06-14 Turbo molecular pump Expired - Fee Related DE60037554T2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP16663799 1999-06-14
JP16663799 1999-06-14

Publications (2)

Publication Number Publication Date
DE60037554D1 true DE60037554D1 (en) 2008-02-07
DE60037554T2 DE60037554T2 (en) 2009-01-08

Family

ID=15834982

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60037554T Expired - Fee Related DE60037554T2 (en) 1999-06-14 2000-06-14 Turbo molecular pump

Country Status (3)

Country Link
EP (1) EP1061262B1 (en)
KR (1) KR20010007349A (en)
DE (1) DE60037554T2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8147222B2 (en) * 2007-05-15 2012-04-03 Agilent Technologies, Inc. Vacuum divider for differential pumping of a vacuum system
DE102007027354A1 (en) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Turbo molecular pump
JP5412239B2 (en) 2009-02-24 2014-02-12 株式会社島津製作所 Turbo molecular pump and particle trap for turbo molecular pump
CN109185588B (en) * 2018-10-10 2020-05-15 北京遥感设备研究所 Gas circuit rotary joint structure with double-layer stator structure

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62261696A (en) * 1986-05-08 1987-11-13 Mitsubishi Electric Corp Turbo-molecular pumping plant
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
WO1994007033A1 (en) * 1992-09-23 1994-03-31 United States Of America As Represented By The Secretary Of The Air Force Turbo-molecular blower

Also Published As

Publication number Publication date
EP1061262A2 (en) 2000-12-20
EP1061262A3 (en) 2002-03-06
DE60037554T2 (en) 2009-01-08
KR20010007349A (en) 2001-01-26
EP1061262B1 (en) 2007-12-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee