DE60025661D1 - Weitwinkeliges katoptrisches System - Google Patents

Weitwinkeliges katoptrisches System

Info

Publication number
DE60025661D1
DE60025661D1 DE60025661T DE60025661T DE60025661D1 DE 60025661 D1 DE60025661 D1 DE 60025661D1 DE 60025661 T DE60025661 T DE 60025661T DE 60025661 T DE60025661 T DE 60025661T DE 60025661 D1 DE60025661 D1 DE 60025661D1
Authority
DE
Germany
Prior art keywords
wide
catoptric system
angle catoptric
angle
catoptric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60025661T
Other languages
English (en)
Other versions
DE60025661T2 (de
Inventor
Takayuki Nakano
Yasuhisa Tamagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Application granted granted Critical
Publication of DE60025661D1 publication Critical patent/DE60025661D1/de
Publication of DE60025661T2 publication Critical patent/DE60025661T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0626—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using three curved mirrors
    • G02B17/0642—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using three curved mirrors off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Stereoscopic And Panoramic Photography (AREA)
DE60025661T 1999-06-10 2000-06-06 Weitwinkeliges katoptrisches System Expired - Lifetime DE60025661T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP16381399A JP4212721B2 (ja) 1999-06-10 1999-06-10 広角反射光学系
JP16381399 1999-06-10

Publications (2)

Publication Number Publication Date
DE60025661D1 true DE60025661D1 (de) 2006-04-13
DE60025661T2 DE60025661T2 (de) 2006-11-23

Family

ID=15781214

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60025661T Expired - Lifetime DE60025661T2 (de) 1999-06-10 2000-06-06 Weitwinkeliges katoptrisches System

Country Status (4)

Country Link
US (1) US6850361B1 (de)
EP (1) EP1061397B1 (de)
JP (1) JP4212721B2 (de)
DE (1) DE60025661T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6648483B1 (en) * 2000-07-07 2003-11-18 Umax Data Systems, Inc. Concave mirror optical system for scanner
WO2002093231A1 (en) * 2001-05-15 2002-11-21 Industrial Research Limited Optical imaging system with aberration correcting means
JP2006138882A (ja) * 2004-11-10 2006-06-01 Konica Minolta Opto Inc 斜め投影光学系
JP2006178406A (ja) * 2004-11-25 2006-07-06 Konica Minolta Opto Inc 投影光学系
EP1924888B1 (de) * 2005-09-13 2013-07-24 Carl Zeiss SMT GmbH Optisches projektionssystem für mikrolithopgraphie, verfahren zur herstellung eines geräts und verfahren für den entwurf einer optischen oberfläche
DE102006014380A1 (de) * 2006-03-27 2007-10-11 Carl Zeiss Smt Ag Projektionsobjektiv und Projektionsbelichtungsanlage mit negativer Schnittweite der Eintrittspupille
CN101416117B (zh) 2006-04-07 2014-11-05 卡尔蔡司Smt有限责任公司 微光刻投影光学系统、工具及其制造方法
WO2012128656A1 (ru) * 2011-03-22 2012-09-27 Gan Mikhail Abramovich Устройство отображения визуальной информации на лобовом стекле транспортного средства
CN103809278B (zh) * 2012-11-06 2016-09-14 清华大学 离轴三反镜
CN104898262B (zh) * 2014-03-05 2017-05-17 清华大学 自由曲面离轴三反光学系统
CN114035309B (zh) * 2021-11-30 2022-07-05 东北大学 一种基于自由曲面的宽视场长波段离轴三反光学系统

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3811749A (en) * 1972-10-12 1974-05-21 Honeywell Inc Wide field reflective optical apparatus
US4130757A (en) * 1977-06-28 1978-12-19 University Of Southern California Apparatus for microscopically viewing a specimen while detecting radiation particles therefrom
US4135787A (en) * 1977-07-27 1979-01-23 United Technologies Corporation Unstable ring resonator with cylindrical mirrors
US4101195A (en) * 1977-07-29 1978-07-18 Nasa Anastigmatic three-mirror telescope
US4598981A (en) * 1985-02-05 1986-07-08 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Wide-angle flat field telescope
US4804258A (en) * 1986-05-05 1989-02-14 Hughes Aircraft Company Four mirror afocal wide field of view optical system
US4964706A (en) * 1988-10-17 1990-10-23 Hughes Aircraft Company Multi-focal length, multi-field of view three mirror anastrigmat
US5063586A (en) * 1989-10-13 1991-11-05 At&T Bell Laboratories Apparatus for semiconductor lithography
US5414555A (en) * 1992-01-13 1995-05-09 Aerojet-General Corporation Method for the manufacture of a three-mirror optical system and the optical system resulting therefrom
US5331470A (en) * 1992-12-11 1994-07-19 Hughes Aircraft Company Fast folded wide angle large reflective unobscured system
JPH075363A (ja) 1993-06-16 1995-01-10 Tech Res & Dev Inst Of Japan Def Agency 非同軸共焦点多面反射光学系
JPH10111458A (ja) 1996-10-03 1998-04-28 Nissho Giken Kk 反射型結像光学系
US5847879A (en) * 1997-02-26 1998-12-08 Raytheon Company Dual wavelength wide angle large reflective unobscured system

Also Published As

Publication number Publication date
EP1061397A2 (de) 2000-12-20
EP1061397A3 (de) 2001-08-08
DE60025661T2 (de) 2006-11-23
JP4212721B2 (ja) 2009-01-21
EP1061397B1 (de) 2006-01-25
US6850361B1 (en) 2005-02-01
JP2000352668A (ja) 2000-12-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)