DE60020282D1 - Lighting device for an optical measuring instrument - Google Patents

Lighting device for an optical measuring instrument

Info

Publication number
DE60020282D1
DE60020282D1 DE60020282T DE60020282T DE60020282D1 DE 60020282 D1 DE60020282 D1 DE 60020282D1 DE 60020282 T DE60020282 T DE 60020282T DE 60020282 T DE60020282 T DE 60020282T DE 60020282 D1 DE60020282 D1 DE 60020282D1
Authority
DE
Germany
Prior art keywords
lighting device
measuring instrument
optical measuring
optical
instrument
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60020282T
Other languages
German (de)
Other versions
DE60020282T2 (en
Inventor
Seiji Shimokawa
Shunsaku Tachibana
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Publication of DE60020282D1 publication Critical patent/DE60020282D1/en
Application granted granted Critical
Publication of DE60020282T2 publication Critical patent/DE60020282T2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/082—Condensers for incident illumination only
    • G02B21/084—Condensers for incident illumination only having annular illumination around the objective
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V17/00—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages
    • F21V17/02—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages with provision for adjustment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
    • F21Y2115/00—Light-generating elements of semiconductor light sources
    • F21Y2115/10—Light-emitting diodes [LED]
DE60020282T 1999-03-01 2000-02-29 ILLUMINATOR FOR AN OPTICAL MEASUREMENT INSTRUMENT Expired - Fee Related DE60020282T2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP5264999 1999-03-01
JP11052649A JP2000250100A (en) 1999-03-01 1999-03-01 Illuminating device for optical measuring instrument

Publications (2)

Publication Number Publication Date
DE60020282D1 true DE60020282D1 (en) 2005-06-30
DE60020282T2 DE60020282T2 (en) 2005-11-10

Family

ID=12920709

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60020282T Expired - Fee Related DE60020282T2 (en) 1999-03-01 2000-02-29 ILLUMINATOR FOR AN OPTICAL MEASUREMENT INSTRUMENT

Country Status (5)

Country Link
US (1) US6461030B1 (en)
EP (1) EP1035427B1 (en)
JP (1) JP2000250100A (en)
DE (1) DE60020282T2 (en)
TW (1) TW425488B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10357496A1 (en) * 2002-12-09 2004-07-01 Carl Zeiss Surgical operation microscope for use in operating theatre has binocular optical system with single large objective lens, peripheral lighting system and radio transmission of data
US7001055B1 (en) * 2004-01-30 2006-02-21 Kla-Tencor Technologies Corporation Uniform pupil illumination for optical inspection systems
JP2008203093A (en) * 2007-02-20 2008-09-04 Mitsutoyo Corp Illumination device and image measurement apparatus
AT506565B1 (en) * 2008-04-09 2010-03-15 Photonic Optische Geraete Gmbh MICROSCOPE STAND
DE102014101219A1 (en) * 2014-01-31 2015-08-06 Carl Zeiss Ag Illuminating device for Fourier ptychography
CN105607240B (en) * 2016-01-21 2017-12-15 核工业理化工程研究院 Microscope base
CN108737702A (en) * 2018-05-23 2018-11-02 四川松瑞科技有限公司 A kind of photographic device and its application method with cognitive disorders object

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE375731C (en) 1923-05-17 Siemens Schuckertwerke G M B H Arrangement for fastening the fusible conductors to the end contacts of electrical fusible links
GB375731A (en) * 1931-06-20 1932-06-30 Leitz Ernst Gmbh Improvements in or relating to microscopes
US2004806A (en) 1933-02-02 1935-06-11 Bausch & Lomb Microscope illuminator
DE2331750C3 (en) 1973-06-22 1978-04-20 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Incident light illumination device for either bright or dark field illumination
US3999855A (en) 1974-10-24 1976-12-28 Block Engineering, Inc. Illumination system
JPS5641088A (en) * 1979-09-12 1981-04-17 Hitachi Ltd Monitoring device for laser light axis
US5052338A (en) * 1990-01-31 1991-10-01 Asymptotic Technologies, Inc. Apparatus for dispensing viscous materials a constant height above a workpiece surface
DE4016264A1 (en) 1990-05-19 1991-11-21 Faseroptik Henning Gmbh & Co FIBER OPTIC RING LIGHT
US5268749A (en) 1991-07-26 1993-12-07 Kollmorgen Corporation Apparatus and method for providing uniform illumination of a sample plane
FR2683296B1 (en) * 1991-11-06 1994-01-28 Angenieux Ets Pierre VARIABLE ILLUMINATED FIELD LIGHTING SYSTEM.
JPH0695038A (en) * 1992-03-19 1994-04-08 Matsushita Electric Ind Co Ltd Ultra resolution scanning optical device, and light source device for ultra resolution of optical device and filter for ultra resolution of optical device
US5424838A (en) * 1993-03-01 1995-06-13 Siu; Bernard Microelectronics inspection system
JP3359071B2 (en) 1992-12-11 2002-12-24 オリンパス光学工業株式会社 Epidark objective lens
JPH06235821A (en) 1993-02-09 1994-08-23 Ina Koki Seisakusho:Kk Optical fiber ring illuminator
US5283802A (en) * 1993-06-04 1994-02-01 Bear Hsiung Adjustable laser module mounting device
JPH0723208A (en) 1993-06-21 1995-01-24 Ricoh Co Ltd Image forming device
US5430620A (en) * 1993-10-08 1995-07-04 Cogent Light Technologies, Inc. Compact surgical illumination system capable of dynamically adjusting the resulting field of illumination
KR950034479A (en) 1994-05-24 1995-12-28 오노 시게오 Illumination optical system
US5580163A (en) 1994-07-20 1996-12-03 August Technology Corporation Focusing light source with flexible mount for multiple light-emitting elements
JPH08166514A (en) 1994-12-14 1996-06-25 Nikon Corp Obliquely illuminating device
KR0155830B1 (en) * 1995-06-19 1998-11-16 김광호 Advanced exposure apparatus and exposure method using the same
US5883704A (en) * 1995-08-07 1999-03-16 Nikon Corporation Projection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical system
JPH0980330A (en) * 1995-09-07 1997-03-28 Minolta Co Ltd Multibeam scanning optical system
US5644400A (en) * 1996-03-29 1997-07-01 Lam Research Corporation Method and apparatus for determining the center and orientation of a wafer-like object
JP3722547B2 (en) * 1996-04-08 2005-11-30 オリンパス株式会社 Illumination optics
JP3315358B2 (en) * 1997-12-02 2002-08-19 株式会社ミツトヨ Lighting equipment for image processing and measuring machines
US5920380A (en) * 1997-12-19 1999-07-06 Sandia Corporation Apparatus and method for generating partially coherent illumination for photolithography

Also Published As

Publication number Publication date
EP1035427A3 (en) 2002-03-13
EP1035427A2 (en) 2000-09-13
US6461030B1 (en) 2002-10-08
DE60020282T2 (en) 2005-11-10
TW425488B (en) 2001-03-11
EP1035427B1 (en) 2005-05-25
JP2000250100A (en) 2000-09-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee