DE59700270D1 - ION SOURCE FOR AN ION BLASTING SYSTEM - Google Patents
ION SOURCE FOR AN ION BLASTING SYSTEMInfo
- Publication number
- DE59700270D1 DE59700270D1 DE59700270T DE59700270T DE59700270D1 DE 59700270 D1 DE59700270 D1 DE 59700270D1 DE 59700270 T DE59700270 T DE 59700270T DE 59700270 T DE59700270 T DE 59700270T DE 59700270 D1 DE59700270 D1 DE 59700270D1
- Authority
- DE
- Germany
- Prior art keywords
- ion
- blasting system
- source
- ion source
- blasting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19602283 | 1996-01-23 | ||
DE19618733 | 1996-05-09 | ||
DE19618734A DE19618734C2 (en) | 1996-01-23 | 1996-05-09 | Ion source for an ion beam system |
DE19700856A DE19700856C2 (en) | 1996-01-23 | 1997-01-13 | Ion source for an ion beam system |
PCT/EP1997/000319 WO1997027613A1 (en) | 1996-01-23 | 1997-01-23 | Ion source for an ion beam arrangement |
Publications (1)
Publication Number | Publication Date |
---|---|
DE59700270D1 true DE59700270D1 (en) | 1999-08-26 |
Family
ID=27512491
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE59700270T Expired - Lifetime DE59700270D1 (en) | 1996-01-23 | 1997-01-23 | ION SOURCE FOR AN ION BLASTING SYSTEM |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE59700270D1 (en) |
-
1997
- 1997-01-23 DE DE59700270T patent/DE59700270D1/en not_active Expired - Lifetime
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |