DE59700270D1 - ION SOURCE FOR AN ION BLASTING SYSTEM - Google Patents

ION SOURCE FOR AN ION BLASTING SYSTEM

Info

Publication number
DE59700270D1
DE59700270D1 DE59700270T DE59700270T DE59700270D1 DE 59700270 D1 DE59700270 D1 DE 59700270D1 DE 59700270 T DE59700270 T DE 59700270T DE 59700270 T DE59700270 T DE 59700270T DE 59700270 D1 DE59700270 D1 DE 59700270D1
Authority
DE
Germany
Prior art keywords
ion
blasting system
source
ion source
blasting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59700270T
Other languages
German (de)
Inventor
Rainer Schork
Heiner Ryssel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19618734A external-priority patent/DE19618734C2/en
Priority claimed from DE19700856A external-priority patent/DE19700856C2/en
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority claimed from PCT/EP1997/000319 external-priority patent/WO1997027613A1/en
Application granted granted Critical
Publication of DE59700270D1 publication Critical patent/DE59700270D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

DE59700270T 1996-01-23 1997-01-23 ION SOURCE FOR AN ION BLASTING SYSTEM Expired - Lifetime DE59700270D1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE19602283 1996-01-23
DE19618733 1996-05-09
DE19618734A DE19618734C2 (en) 1996-01-23 1996-05-09 Ion source for an ion beam system
DE19700856A DE19700856C2 (en) 1996-01-23 1997-01-13 Ion source for an ion beam system
PCT/EP1997/000319 WO1997027613A1 (en) 1996-01-23 1997-01-23 Ion source for an ion beam arrangement

Publications (1)

Publication Number Publication Date
DE59700270D1 true DE59700270D1 (en) 1999-08-26

Family

ID=27512491

Family Applications (1)

Application Number Title Priority Date Filing Date
DE59700270T Expired - Lifetime DE59700270D1 (en) 1996-01-23 1997-01-23 ION SOURCE FOR AN ION BLASTING SYSTEM

Country Status (1)

Country Link
DE (1) DE59700270D1 (en)

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition