DE59604463D1 - METHOD FOR IMPROVING CONTRAST IN STRUCTURING 3-DIMENSIONAL SURFACES - Google Patents

METHOD FOR IMPROVING CONTRAST IN STRUCTURING 3-DIMENSIONAL SURFACES

Info

Publication number
DE59604463D1
DE59604463D1 DE59604463T DE59604463T DE59604463D1 DE 59604463 D1 DE59604463 D1 DE 59604463D1 DE 59604463 T DE59604463 T DE 59604463T DE 59604463 T DE59604463 T DE 59604463T DE 59604463 D1 DE59604463 D1 DE 59604463D1
Authority
DE
Germany
Prior art keywords
structuring
dimensional surfaces
improving contrast
contrast
improving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59604463T
Other languages
German (de)
Inventor
Wilfried Koops
Sergey Babine
Gerold Dahm
Alexey Holopkin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nawotec GmbH
Original Assignee
Deutsche Telekom AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Deutsche Telekom AG filed Critical Deutsche Telekom AG
Priority claimed from PCT/DE1996/001580 external-priority patent/WO1997010088A2/en
Application granted granted Critical
Publication of DE59604463D1 publication Critical patent/DE59604463D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/36—Imagewise removal not covered by groups G03F7/30 - G03F7/34, e.g. using gas streams, using plasma

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
DE59604463T 1995-08-30 1996-08-24 METHOD FOR IMPROVING CONTRAST IN STRUCTURING 3-DIMENSIONAL SURFACES Expired - Lifetime DE59604463D1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19531859 1995-08-30
DE19628353A DE19628353A1 (en) 1995-08-30 1996-07-13 Process to improve the contrast when structuring 3-dimensional surfaces
PCT/DE1996/001580 WO1997010088A2 (en) 1995-08-30 1996-08-24 Process for improving the contrast in the structuring of 3-dimensional surfaces

Publications (1)

Publication Number Publication Date
DE59604463D1 true DE59604463D1 (en) 2000-03-23

Family

ID=7770732

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19628353A Withdrawn DE19628353A1 (en) 1995-08-30 1996-07-13 Process to improve the contrast when structuring 3-dimensional surfaces
DE59604463T Expired - Lifetime DE59604463D1 (en) 1995-08-30 1996-08-24 METHOD FOR IMPROVING CONTRAST IN STRUCTURING 3-DIMENSIONAL SURFACES

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19628353A Withdrawn DE19628353A1 (en) 1995-08-30 1996-07-13 Process to improve the contrast when structuring 3-dimensional surfaces

Country Status (1)

Country Link
DE (2) DE19628353A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0847545B1 (en) 1995-08-30 2000-02-16 Deutsche Telekom AG Process for improving the contrast in the structuring of 3-dimensional surfaces
DE19630705A1 (en) 1995-08-30 1997-03-20 Deutsche Telekom Ag Process for the production of 3-dimensional structured polymer layers for integrated optics

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4202651A1 (en) * 1992-01-30 1993-08-05 Fraunhofer Ges Forschung METHOD FOR DRY DEVELOPMENT OF A SILICON-CONTAINING ULTRAVIOLET AND / OR ELECTRON BEAM-SENSITIVE PAINT LAYER

Also Published As

Publication number Publication date
DE19628353A1 (en) 1997-03-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: NAWOTEC GMBH, 64380 ROSSDORF, DE