DE59600828D1 - Cathode arrangement for a device for atomizing a target - Google Patents

Cathode arrangement for a device for atomizing a target

Info

Publication number
DE59600828D1
DE59600828D1 DE59600828T DE59600828T DE59600828D1 DE 59600828 D1 DE59600828 D1 DE 59600828D1 DE 59600828 T DE59600828 T DE 59600828T DE 59600828 T DE59600828 T DE 59600828T DE 59600828 D1 DE59600828 D1 DE 59600828D1
Authority
DE
Germany
Prior art keywords
atomizing
target
cathode arrangement
cathode
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59600828T
Other languages
German (de)
Inventor
Joachim Dr Szczyrbowski
Dieter Marquardt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Deutschland Holding GmbH
Original Assignee
Leybold AG
Balzers und Leybold Deutschland Holding AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19525007A external-priority patent/DE19525007A1/en
Application filed by Leybold AG, Balzers und Leybold Deutschland Holding AG filed Critical Leybold AG
Application granted granted Critical
Publication of DE59600828D1 publication Critical patent/DE59600828D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)
DE59600828T 1995-07-08 1996-04-18 Cathode arrangement for a device for atomizing a target Expired - Lifetime DE59600828D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19525007A DE19525007A1 (en) 1995-03-09 1995-07-08 Cathode arrangement for a device for atomizing a target

Publications (1)

Publication Number Publication Date
DE59600828D1 true DE59600828D1 (en) 1998-12-24

Family

ID=26016657

Family Applications (1)

Application Number Title Priority Date Filing Date
DE59600828T Expired - Lifetime DE59600828D1 (en) 1995-07-08 1996-04-18 Cathode arrangement for a device for atomizing a target

Country Status (1)

Country Link
DE (1) DE59600828D1 (en)

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: UNAXIS DEUTSCHLAND HOLDING GMBH, 63450 HANAU, DE