DE59407958D1 - Micro vacuum sensor - Google Patents

Micro vacuum sensor

Info

Publication number
DE59407958D1
DE59407958D1 DE59407958T DE59407958T DE59407958D1 DE 59407958 D1 DE59407958 D1 DE 59407958D1 DE 59407958 T DE59407958 T DE 59407958T DE 59407958 T DE59407958 T DE 59407958T DE 59407958 D1 DE59407958 D1 DE 59407958D1
Authority
DE
Germany
Prior art keywords
vacuum sensor
micro vacuum
micro
sensor
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59407958T
Other languages
German (de)
Inventor
Joerg Dr Schieferdecker
Friedemann Prof Voelklein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Excelitas Technologies GmbH and Co KG
Original Assignee
Heimann Optoelectronics GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heimann Optoelectronics GmbH filed Critical Heimann Optoelectronics GmbH
Application granted granted Critical
Publication of DE59407958D1 publication Critical patent/DE59407958D1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE59407958T 1993-12-23 1994-12-21 Micro vacuum sensor Expired - Fee Related DE59407958D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4344256 1993-12-23
DE4414349A DE4414349A1 (en) 1993-12-23 1994-04-25 Thermoelectric micro vacuum sensor

Publications (1)

Publication Number Publication Date
DE59407958D1 true DE59407958D1 (en) 1999-04-22

Family

ID=6506066

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4414349A Withdrawn DE4414349A1 (en) 1993-12-23 1994-04-25 Thermoelectric micro vacuum sensor
DE59407958T Expired - Fee Related DE59407958D1 (en) 1993-12-23 1994-12-21 Micro vacuum sensor

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE4414349A Withdrawn DE4414349A1 (en) 1993-12-23 1994-04-25 Thermoelectric micro vacuum sensor

Country Status (1)

Country Link
DE (2) DE4414349A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19711874C2 (en) * 1997-03-21 1999-08-12 Max Planck Gesellschaft Foil pressure gauge
DE102004051113B4 (en) * 2004-10-21 2006-11-30 X-Fab Semiconductor Foundries Ag Method and measuring arrangement for the electrical determination of the thickness of semiconductor membranes by energy input
DE102007053944A1 (en) 2007-11-09 2009-05-20 Vacuubrand Gmbh + Co Kg Thermal conductivity Gasdruckmeßanordnung
DE102020119246A1 (en) * 2019-07-23 2021-01-28 Elmos Semiconductor Se Thermopile without metal layers realized as a cantilever arm in a control loop

Also Published As

Publication number Publication date
DE4414349A1 (en) 1995-06-29

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: PERKINELMER OPTOELECTRONICS GMBH, 65199 WIESBADEN,

8339 Ceased/non-payment of the annual fee