DE59307886D1 - Method and device for coating the inner surface of strongly domed, essentially dome-shaped substrates by means of CVD - Google Patents

Method and device for coating the inner surface of strongly domed, essentially dome-shaped substrates by means of CVD

Info

Publication number
DE59307886D1
DE59307886D1 DE59307886T DE59307886T DE59307886D1 DE 59307886 D1 DE59307886 D1 DE 59307886D1 DE 59307886 T DE59307886 T DE 59307886T DE 59307886 T DE59307886 T DE 59307886T DE 59307886 D1 DE59307886 D1 DE 59307886D1
Authority
DE
Germany
Prior art keywords
cvd
coating
shaped substrates
essentially dome
domed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59307886T
Other languages
German (de)
Inventor
Ewald Dr Moersen
Helge Vogt
Johannes Dr Segner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schott AG
Original Assignee
Schott Glaswerke AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schott Glaswerke AG filed Critical Schott Glaswerke AG
Application granted granted Critical
Publication of DE59307886D1 publication Critical patent/DE59307886D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/003—General methods for coating; Devices therefor for hollow ware, e.g. containers
    • C03C17/004—Coating the inside
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
DE59307886T 1992-10-26 1993-10-19 Method and device for coating the inner surface of strongly domed, essentially dome-shaped substrates by means of CVD Expired - Lifetime DE59307886D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4236056 1992-10-26
DE4334572A DE4334572C2 (en) 1992-10-26 1993-10-11 Method and device for coating the inner surface of strongly domed essentially dome-shaped substrates by means of CVD

Publications (1)

Publication Number Publication Date
DE59307886D1 true DE59307886D1 (en) 1998-02-05

Family

ID=6471341

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4334572A Expired - Fee Related DE4334572C2 (en) 1992-10-26 1993-10-11 Method and device for coating the inner surface of strongly domed essentially dome-shaped substrates by means of CVD
DE59307886T Expired - Lifetime DE59307886D1 (en) 1992-10-26 1993-10-19 Method and device for coating the inner surface of strongly domed, essentially dome-shaped substrates by means of CVD

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE4334572A Expired - Fee Related DE4334572C2 (en) 1992-10-26 1993-10-11 Method and device for coating the inner surface of strongly domed essentially dome-shaped substrates by means of CVD

Country Status (1)

Country Link
DE (2) DE4334572C2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19634795C2 (en) * 1996-08-29 1999-11-04 Schott Glas Plasma CVD system with an array of microwave plasma electrodes and plasma CVD processes
AT500509B8 (en) * 2004-03-08 2007-02-15 Moerth Marlene METHOD FOR PVD INTERNAL COATING OF METALLIC WORKPIECES WITH DEEP HOLES AND RUNNING OF FIREARMS
DE102005032001A1 (en) 2005-07-08 2007-02-01 Zf Friedrichshafen Ag Multi-speed transmission

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4008405C1 (en) * 1990-03-16 1991-07-11 Schott Glaswerke, 6500 Mainz, De

Also Published As

Publication number Publication date
DE4334572C2 (en) 1995-12-07
DE4334572A1 (en) 1994-04-28

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: SCHOTT GLAS, 55122 MAINZ, DE

8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: SCHOTT AG, 55122 MAINZ, DE