DE4319036A1 - Stokes analyser - Google Patents

Stokes analyser

Info

Publication number
DE4319036A1
DE4319036A1 DE19934319036 DE4319036A DE4319036A1 DE 4319036 A1 DE4319036 A1 DE 4319036A1 DE 19934319036 DE19934319036 DE 19934319036 DE 4319036 A DE4319036 A DE 4319036A DE 4319036 A1 DE4319036 A1 DE 4319036A1
Authority
DE
Germany
Prior art keywords
stokes
beam splitter
analyser
prism
hypotenuse surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19934319036
Other languages
German (de)
Inventor
Horst Dr Schwiecker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DUENNSCHICHT TECHNIK PROF DR H
Original Assignee
DUENNSCHICHT TECHNIK PROF DR H
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DUENNSCHICHT TECHNIK PROF DR H filed Critical DUENNSCHICHT TECHNIK PROF DR H
Priority to DE19934319036 priority Critical patent/DE4319036A1/en
Publication of DE4319036A1 publication Critical patent/DE4319036A1/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

A Stokes analyser is described, which consists of two beam splitter cubes arranged one after another in the beam path, a deflection prism and two further beam splitter cubes. The beam is deflected by means of total reflection at the hypotenuse surface of the prism.

Description

Es ist bekannt, den Stokesvektor mit Ellipsometeranordnungen zu bestimmen. Dabei wird der einfallende Strahl durch Strahlteiler in vier Teilstrahlen zerlegt und die Intensität der Teilstrahlen mit geeigneten Empfängern bestimmt. Nach dem Eichvorgang mit einem konventionellen Ellipsometer lassen sich aus den gemessenen Inten­ sitäten die Komponenten des Stokesvektors ermitteln.It is known to use the Stokes vector with ellipsometer arrangements determine. The incident beam is blocked by a beam splitter divided into four partial beams and the intensity of the partial beams suitable recipients. After the calibration process with a conventional ellipsometers can be measured from the measured the components of the Stokes vector.

Die Strahlteilung erfolgt z. B. mit beschichteten Plangläsern, die hintereinander angeordnet sind. Im United States Patent 4,681,450 werden dazu die Eintrittsfenster der Empfänger (Fotodioden) ver­ wendet.The beam splitting takes place e.g. B. with coated plane glasses, the are arranged one behind the other. In United States Patent 4,681,450 the entrance windows of the receivers (photodiodes) are ver turns.

Das erfordert allerdings einen hohen Justageaufwand. Außerdem ist die Genauigkeit unzureichend.However, this requires a lot of adjustment work. Besides, is the accuracy is insufficient.

Der in Anspruch 1 angegebenen Erfindung liegt das Problem zu­ grunde, den justageaufwand zu verringern, die Anordnung kompakter zu gestalten und die Genauigkeit zu erhöhen.The invention specified in claim 1 addresses the problem reasons to reduce the adjustment effort, the arrangement more compact shape and increase accuracy.

Der mit der Erfindung erzielten Vorteile bestehen insbesondere darin, daß ein kleiner und kompakter Aufbau erreichbar ist, der sich leicht justieren läßt.The advantages achieved with the invention are in particular in that a small and compact structure can be achieved, the can be easily adjusted.

Eine vorteilhafte Ausgestaltung der Erfindung ist in Anspruch 2 angegeben. Die Weiterbildung nach Anspruch 2 ermöglicht es, eine Phasenänderung von 90° zu erreichen. Die optischen Eigenschaften dieser Strahlteileranordnung sind daher nahe den Werten der idealen Anordnung.An advantageous embodiment of the invention is in claim 2 specified. The training according to claim 2 makes it possible Achieve phase change of 90 °. The optical properties this beam splitter arrangement are therefore close to the values of ideal arrangement.

Ein Ausführungsbeispiel ist in der Zeichnung dargestellt und wird im folgenden näher beschrieben.An embodiment is shown in the drawing and will described in more detail below.

In der Figur ist die Anordnung der Strahlteilerwürfel und des Umlenkprismas im Stokesanalysator dargestellt.In the figure is the arrangement of the beam splitter cubes and Deflection prism shown in the Stokes analyzer.

Die Strahlteilerwürfel (z. B. SF 4, n = 1,70) bestehen aus zwei verkitteten Prismen. Die Hypotenusenflächen (1) sind beschichtet, um eine Reflexion von 0,33 bei den ersten drei und 0,48 bei dem vierten zu erreichen. Der optische Kitt hat eine Brechzahl von 1,57 und eine Dicke von ca. 8 µm.The beam splitter cubes (e.g. SF 4, n = 1.70) consist of two cemented prisms. The hypotenuse surfaces ( 1 ) are coated to achieve a reflection of 0.33 for the first three and 0.48 for the fourth. The optical putty has a refractive index of 1.57 and a thickness of approx. 8 µm.

Die Hypotenusenfläche des Umlenkprismas ist so beschichtet, daß eine Phasenänderung von 90° bei Totalreflexion erzielt wird. Um störende Reflexionen zu vermeiden, sind die Strahlein- und Aus­ trittsflächen der Strahlteilerwürfel und des Umlenkprismas ent­ spiegelt.The hypotenuse surface of the deflecting prism is coated in such a way that a phase change of 90 ° is achieved with total reflection. In order to avoid disturbing reflections, the beams are on and off treads of the beam splitter cubes and the deflection prism reflects.

Claims (2)

1. Stokesanalysator zur Bestimmung der vier Komponenten des Stokesvektors insbesondere für Ellipsometeranordnungen, dadurch gekennzeichnet, daß im Strahlengang zwei Strahlteilerwürfeln (1), ein Umlenk­ prisma (2), wobei der Strahl an der Hypotenusenfläche durch Totalreflexion umgelenkt wird und zwei weitere Strahlteiler­ würfel (1) hintereinander angeordnet sind.1. Stokes analyzer for determining the four components of the Stokes vector, in particular for ellipsometer arrangements, characterized in that two beam splitter cubes ( 1 ), one deflection prism ( 2 ) in the beam path, the beam being deflected on the hypotenuse surface by total reflection and two further beam splitters ( 1 ) are arranged one behind the other. 2. Stokesanalysator nach Anspruch 1, dadurch gekennzeichnet, daß die Hypotenusenfläche des Umlenkprismas (2) mit einer transparenten dielektrischen Schicht oder einem entsprechenden Schichtsystem bedampft ist, um eine Phasenverschiebung von 90° zu erreichen.2. Stokes analyzer according to claim 1, characterized in that the hypotenuse surface of the deflecting prism ( 2 ) is vapor-coated with a transparent dielectric layer or a corresponding layer system in order to achieve a phase shift of 90 °.
DE19934319036 1993-05-29 1993-05-29 Stokes analyser Withdrawn DE4319036A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19934319036 DE4319036A1 (en) 1993-05-29 1993-05-29 Stokes analyser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19934319036 DE4319036A1 (en) 1993-05-29 1993-05-29 Stokes analyser

Publications (1)

Publication Number Publication Date
DE4319036A1 true DE4319036A1 (en) 1994-12-01

Family

ID=6489916

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19934319036 Withdrawn DE4319036A1 (en) 1993-05-29 1993-05-29 Stokes analyser

Country Status (1)

Country Link
DE (1) DE4319036A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19712768A1 (en) * 1996-03-29 1997-11-06 Advantest Corp Polarisation mode dispersion measuring unit with variable light source wavelength
WO1999040399A1 (en) * 1998-02-09 1999-08-12 Centre National De La Recherche Scientifique Polarimeter and corresponding measuring method
EP1004862A2 (en) * 1998-11-27 2000-05-31 Jds Fitel Inc. Polarimeter
DE10315688A1 (en) * 2003-04-07 2004-11-04 Carl Zeiss Jena Gmbh Polarization beam splitter e.g. for liquid crystal display etc. comprises alternating layers of quartz and titanium oxide with given thicknesses, between glass prisms

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19712768A1 (en) * 1996-03-29 1997-11-06 Advantest Corp Polarisation mode dispersion measuring unit with variable light source wavelength
WO1999040399A1 (en) * 1998-02-09 1999-08-12 Centre National De La Recherche Scientifique Polarimeter and corresponding measuring method
FR2774766A1 (en) * 1998-02-09 1999-08-13 Centre Nat Rech Scient POLARIMETER AND CORRESPONDING MEASUREMENT METHOD
EP1004862A2 (en) * 1998-11-27 2000-05-31 Jds Fitel Inc. Polarimeter
EP1004862A3 (en) * 1998-11-27 2002-06-19 Jds Fitel Inc. Polarimeter
DE10315688A1 (en) * 2003-04-07 2004-11-04 Carl Zeiss Jena Gmbh Polarization beam splitter e.g. for liquid crystal display etc. comprises alternating layers of quartz and titanium oxide with given thicknesses, between glass prisms
DE10315688B4 (en) * 2003-04-07 2006-05-18 Carl Zeiss Jena Gmbh Thin-polarization beam splitter

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Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee