DE4319036A1 - Stokes analyser - Google Patents
Stokes analyserInfo
- Publication number
- DE4319036A1 DE4319036A1 DE19934319036 DE4319036A DE4319036A1 DE 4319036 A1 DE4319036 A1 DE 4319036A1 DE 19934319036 DE19934319036 DE 19934319036 DE 4319036 A DE4319036 A DE 4319036A DE 4319036 A1 DE4319036 A1 DE 4319036A1
- Authority
- DE
- Germany
- Prior art keywords
- stokes
- beam splitter
- analyser
- prism
- hypotenuse surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000010363 phase shift Effects 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
Description
Es ist bekannt, den Stokesvektor mit Ellipsometeranordnungen zu bestimmen. Dabei wird der einfallende Strahl durch Strahlteiler in vier Teilstrahlen zerlegt und die Intensität der Teilstrahlen mit geeigneten Empfängern bestimmt. Nach dem Eichvorgang mit einem konventionellen Ellipsometer lassen sich aus den gemessenen Inten sitäten die Komponenten des Stokesvektors ermitteln.It is known to use the Stokes vector with ellipsometer arrangements determine. The incident beam is blocked by a beam splitter divided into four partial beams and the intensity of the partial beams suitable recipients. After the calibration process with a conventional ellipsometers can be measured from the measured the components of the Stokes vector.
Die Strahlteilung erfolgt z. B. mit beschichteten Plangläsern, die hintereinander angeordnet sind. Im United States Patent 4,681,450 werden dazu die Eintrittsfenster der Empfänger (Fotodioden) ver wendet.The beam splitting takes place e.g. B. with coated plane glasses, the are arranged one behind the other. In United States Patent 4,681,450 the entrance windows of the receivers (photodiodes) are ver turns.
Das erfordert allerdings einen hohen Justageaufwand. Außerdem ist die Genauigkeit unzureichend.However, this requires a lot of adjustment work. Besides, is the accuracy is insufficient.
Der in Anspruch 1 angegebenen Erfindung liegt das Problem zu grunde, den justageaufwand zu verringern, die Anordnung kompakter zu gestalten und die Genauigkeit zu erhöhen.The invention specified in claim 1 addresses the problem reasons to reduce the adjustment effort, the arrangement more compact shape and increase accuracy.
Der mit der Erfindung erzielten Vorteile bestehen insbesondere darin, daß ein kleiner und kompakter Aufbau erreichbar ist, der sich leicht justieren läßt.The advantages achieved with the invention are in particular in that a small and compact structure can be achieved, the can be easily adjusted.
Eine vorteilhafte Ausgestaltung der Erfindung ist in Anspruch 2 angegeben. Die Weiterbildung nach Anspruch 2 ermöglicht es, eine Phasenänderung von 90° zu erreichen. Die optischen Eigenschaften dieser Strahlteileranordnung sind daher nahe den Werten der idealen Anordnung.An advantageous embodiment of the invention is in claim 2 specified. The training according to claim 2 makes it possible Achieve phase change of 90 °. The optical properties this beam splitter arrangement are therefore close to the values of ideal arrangement.
Ein Ausführungsbeispiel ist in der Zeichnung dargestellt und wird im folgenden näher beschrieben.An embodiment is shown in the drawing and will described in more detail below.
In der Figur ist die Anordnung der Strahlteilerwürfel und des Umlenkprismas im Stokesanalysator dargestellt.In the figure is the arrangement of the beam splitter cubes and Deflection prism shown in the Stokes analyzer.
Die Strahlteilerwürfel (z. B. SF 4, n = 1,70) bestehen aus zwei verkitteten Prismen. Die Hypotenusenflächen (1) sind beschichtet, um eine Reflexion von 0,33 bei den ersten drei und 0,48 bei dem vierten zu erreichen. Der optische Kitt hat eine Brechzahl von 1,57 und eine Dicke von ca. 8 µm.The beam splitter cubes (e.g. SF 4, n = 1.70) consist of two cemented prisms. The hypotenuse surfaces ( 1 ) are coated to achieve a reflection of 0.33 for the first three and 0.48 for the fourth. The optical putty has a refractive index of 1.57 and a thickness of approx. 8 µm.
Die Hypotenusenfläche des Umlenkprismas ist so beschichtet, daß eine Phasenänderung von 90° bei Totalreflexion erzielt wird. Um störende Reflexionen zu vermeiden, sind die Strahlein- und Aus trittsflächen der Strahlteilerwürfel und des Umlenkprismas ent spiegelt.The hypotenuse surface of the deflecting prism is coated in such a way that a phase change of 90 ° is achieved with total reflection. In order to avoid disturbing reflections, the beams are on and off treads of the beam splitter cubes and the deflection prism reflects.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19934319036 DE4319036A1 (en) | 1993-05-29 | 1993-05-29 | Stokes analyser |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19934319036 DE4319036A1 (en) | 1993-05-29 | 1993-05-29 | Stokes analyser |
Publications (1)
Publication Number | Publication Date |
---|---|
DE4319036A1 true DE4319036A1 (en) | 1994-12-01 |
Family
ID=6489916
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19934319036 Withdrawn DE4319036A1 (en) | 1993-05-29 | 1993-05-29 | Stokes analyser |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE4319036A1 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19712768A1 (en) * | 1996-03-29 | 1997-11-06 | Advantest Corp | Polarisation mode dispersion measuring unit with variable light source wavelength |
WO1999040399A1 (en) * | 1998-02-09 | 1999-08-12 | Centre National De La Recherche Scientifique | Polarimeter and corresponding measuring method |
EP1004862A2 (en) * | 1998-11-27 | 2000-05-31 | Jds Fitel Inc. | Polarimeter |
DE10315688A1 (en) * | 2003-04-07 | 2004-11-04 | Carl Zeiss Jena Gmbh | Polarization beam splitter e.g. for liquid crystal display etc. comprises alternating layers of quartz and titanium oxide with given thicknesses, between glass prisms |
-
1993
- 1993-05-29 DE DE19934319036 patent/DE4319036A1/en not_active Withdrawn
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19712768A1 (en) * | 1996-03-29 | 1997-11-06 | Advantest Corp | Polarisation mode dispersion measuring unit with variable light source wavelength |
WO1999040399A1 (en) * | 1998-02-09 | 1999-08-12 | Centre National De La Recherche Scientifique | Polarimeter and corresponding measuring method |
FR2774766A1 (en) * | 1998-02-09 | 1999-08-13 | Centre Nat Rech Scient | POLARIMETER AND CORRESPONDING MEASUREMENT METHOD |
EP1004862A2 (en) * | 1998-11-27 | 2000-05-31 | Jds Fitel Inc. | Polarimeter |
EP1004862A3 (en) * | 1998-11-27 | 2002-06-19 | Jds Fitel Inc. | Polarimeter |
DE10315688A1 (en) * | 2003-04-07 | 2004-11-04 | Carl Zeiss Jena Gmbh | Polarization beam splitter e.g. for liquid crystal display etc. comprises alternating layers of quartz and titanium oxide with given thicknesses, between glass prisms |
DE10315688B4 (en) * | 2003-04-07 | 2006-05-18 | Carl Zeiss Jena Gmbh | Thin-polarization beam splitter |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8139 | Disposal/non-payment of the annual fee |