DE4001554A1 - Power semiconductor module with plastics casing - has deposition struts for ceramic substrate at points away from edge - Google Patents

Power semiconductor module with plastics casing - has deposition struts for ceramic substrate at points away from edge

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Publication number
DE4001554A1
DE4001554A1 DE19904001554 DE4001554A DE4001554A1 DE 4001554 A1 DE4001554 A1 DE 4001554A1 DE 19904001554 DE19904001554 DE 19904001554 DE 4001554 A DE4001554 A DE 4001554A DE 4001554 A1 DE4001554 A1 DE 4001554A1
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Germany
Prior art keywords
substrate
power semiconductor
semiconductor module
ceramic substrate
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19904001554
Other languages
German (de)
Inventor
Arno Dipl Phys Dr Neidig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IXYS Semiconductor GmbH
Original Assignee
ABB IXYS Semiconductor GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ABB IXYS Semiconductor GmbH filed Critical ABB IXYS Semiconductor GmbH
Priority to DE19904001554 priority Critical patent/DE4001554A1/en
Priority to DE9007621U priority patent/DE9007621U1/en
Publication of DE4001554A1 publication Critical patent/DE4001554A1/en
Ceased legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/02Bonding areas ; Manufacturing methods related thereto
    • H01L24/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/06Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
    • HELECTRICITY
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    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/40Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
    • H01L23/4006Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
    • HELECTRICITY
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    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49541Geometry of the lead-frame
    • H01L23/49562Geometry of the lead-frame for devices being provided for in H01L29/00
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    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
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    • H01L23/40Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
    • H01L23/4006Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
    • H01L2023/4018Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws characterised by the type of device to be heated or cooled
    • H01L2023/4031Packaged discrete devices, e.g. to-3 housings, diodes
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    • H01L23/40Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
    • H01L23/4006Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
    • H01L2023/4037Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws characterised by thermal path or place of attachment of heatsink
    • H01L2023/405Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws characterised by thermal path or place of attachment of heatsink heatsink to package
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    • H01L23/40Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
    • H01L23/4006Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
    • H01L2023/4075Mechanical elements
    • H01L2023/4087Mounting accessories, interposers, clamping or screwing parts
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    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554External layer
    • H01L2224/0555Shape
    • H01L2224/05552Shape in top view
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    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/06Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
    • H01L2224/0601Structure
    • H01L2224/0603Bonding areas having different sizes, e.g. different heights or widths
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    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
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    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
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    • H01L2224/491Disposition
    • H01L2224/4911Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
    • H01L2224/49111Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain the connectors connecting two common bonding areas, e.g. Litz or braid wires
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    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • H01L2224/49171Fan-out arrangements
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    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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    • H01L2924/01Chemical elements
    • H01L2924/01029Copper [Cu]
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    • H01L2924/11Device type
    • H01L2924/13Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304Transistor
    • H01L2924/1305Bipolar Junction Transistor [BJT]
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    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/156Material
    • H01L2924/15786Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
    • H01L2924/15787Ceramics, e.g. crystalline carbides, nitrides or oxides

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

The plastic casing has in its bottom plane an aperture and a peripheral depression, into which is inserted the ceramic substrate with a metal layer as the module bottom. The metal layer, facing the casing in side, is fractured and fitted with components. On the plastics casing (1) are formed deposition struts (6) for the ceramic substrate (10) at support points spaced from the substrate edge. The support manner is such that between the top side of the ceramic substrate and the depression (9) of the plastics casing remains a gap (13) several tenths mm wide, which is filled with adhesive (12) for securing and sealing of the substrate. ADVANTAGE - Improved design without danger of the plastics casing damage.

Description

Die Erfindung bezieht sich auf ein Leistungshalbleiter­ modul nach dem Oberbegriff des Anspruchs 1.The invention relates to a power semiconductor Module according to the preamble of claim 1.

Ein solches Leistungshalbleitermodul ist aus der DE 31 27 457 C2 bekannt.Such a power semiconductor module is from the DE 31 27 457 C2 known.

Beim bekannten Leistungshalbleitermodul ist in eine Öff­ nung am Boden eines Kunststoffgehäuses ein mit Metall beschichtetes Keramiksubstrat eingesetzt, wobei das Sub­ strat in einer umlaufenden Vertiefung am Boden aufliegt und dort mit einem elastischen Klebstoff auf Silikonba­ sis verklebt ist. Ein ähnliches Modul ist auch aus der DE 28 40 514 C2 bekannt.In the known power semiconductor module is in an opening at the bottom of a plastic case with metal coated ceramic substrate used, the sub strat lies in a circumferential depression on the floor and there with an elastic adhesive on silicon ba sis is glued. A similar module is also from the DE 28 40 514 C2 known.

Ein generelles Problem solcher Module besteht in der Gefahr, daß das Kunststoffgehäuse während des Aufschrau­ bens des Moduls auf einen Kühlkörper Risse erhalten oder das Substrat brechen kann. Beispielsweise darf beim bekannten Modul bei Verwendung von M-5-Schrauben das Drehmoment beim Aufschrauben nicht über 3,5 Nm liegen. Ein sicherer Andruck des Moduls am Kühlkörper wird zwar bereits mit einem Drehmoment von 2,5 Nm erreicht, so daß das Problem grundsätzlich beherrschbar ist. Trotzdem besteht der Wunsch, das Modul weniger empfindlich auszu­ führen, da Anwender, die unterschiedliche Module montie­ ren, mitunter versehentlich mit zu hohem Drehmoment für die Befestigungsschrauben arbeiten, insbesondere, wenn sie auch solche Module montieren, die ein höheres Dreh­ moment erfordern.A general problem with such modules is that Danger that the plastic housing during unscrewing after receiving the module on a heat sink cracks or can break the substrate. For example, at  known module when using M-5 screws The torque when screwing on should not exceed 3.5 Nm. A secure pressure of the module on the heat sink is indeed already achieved with a torque of 2.5 Nm, so that the problem is basically manageable. Nevertheless there is a desire to make the module less sensitive because users who assemble different modules ren, sometimes accidentally with excessive torque for the mounting screws work, especially if they also assemble modules that have a higher twist require moment.

Der Erfindung liegt daher die Aufgabe zugrunde, ein ver­ bessertes Leistungshalbleitermodul der gattungsgemäßen Art anzugeben.The invention is therefore based on the object, a ver improved power semiconductor module of the generic type Specify type.

Diese Aufgabe wird durch ein Leistungshalbleitermodul mit einem Kunststoffgehäuse gelöst, das in seiner Boden­ ebene eine Öffnung und eine umlaufende Vertiefung auf­ weist, in welche ein beidseitig mit einer Metallschicht versehenes Keramiksubstrat als Modulboden eingesetzt ist, wobei die dem Gehäuseinneren zugewandte Metall­ schicht des Substrats strukturiert und mit Bauelementen bestückt ist, und wobei am Kunststoffgehäuse Auflage­ stützen angeformt sind, welche das Keramiksubstrat an vom Substratrand entfernten Auflagestellen in solcher Weise abstützen, daß zwischen der Oberseite des Keramik­ substrats und der Vertiefung des Kunststoffgehäuses ein einige Zehntelmillimeter breiter Spalt verbleibt, wel­ cher zur Befestigung und Abdichtung des Substrats mit einem Klebstoff ausgefüllt ist. This task is accomplished through a power semiconductor module solved with a plastic case that is in its bottom level an opening and a circumferential depression points, in which a on both sides with a metal layer Ceramic substrate provided as a module floor is, the metal facing the housing interior layer of the substrate structured and with components is equipped, and being on the plastic housing pad support are formed, which the ceramic substrate in such Support that way between the top of the ceramic substrate and the recess of the plastic housing a few tenths of a millimeter wide gap remains, wel cher for fastening and sealing the substrate with is filled with an adhesive.  

Das erfindungsgemäße Leistungshalbleitermodul hat den Vorteil, daß durch Verlegung der Auflagefläche des Sub­ strats vom Rand weg weiter nach innen höhere Drehmomente für die Befestigungsschrauben zugelassen werden können, ohne eine Schädigung des Moduls befürchten zu müssen. Weiterhin hat die erfindungsgemäße Modulausführung den Vorteil, daß besondere Stützen im Modul, wie z. B. in der DE 35 21 572 A zur Verhinderung einer Wölbung des Sub­ strats vorgeschlagen, entfallen können.The power semiconductor module according to the invention has the Advantage that by laying the contact surface of the sub Strats higher torques inwards from the edge can be approved for the fastening screws, without fear of damage to the module. Furthermore, the module design according to the invention has the Advantage that special supports in the module, such as. B. in the DE 35 21 572 A for preventing curvature of the sub strats proposed, can be omitted.

Auch Schlitze in der Wandung des Kunststoffgehäuses, wie in der EP 01 18 022 B1 zum Schutz des Keramiksubstrates vorgeschlagen wurde, können bei der erfindungsgemäßen Ausführung entfallen.Also slots in the wall of the plastic housing, like in EP 01 18 022 B1 for protecting the ceramic substrate has been proposed can in the invention Execution omitted.

Beim bekannten Modul wird während der Herstellung beim Einsetzen des Substrats in das Kunststoffgehäuse ein Teil der zwischengefügten Klebstoffmasse herausgepreßt und muß vor dem Aushärten sorgfältig abgewischt werden, damit keine Klebstoffüberstände entstehen, welche eine gute Auflage des Moduls auf einem Kühlkörper und damit einen guten Wärmeübergang behindern könnten. Dieser Rei­ nigungsvorgang ist ein zusätzlicher und lästiger Ar­ beitsschritt, welcher beim erfindungsgemäßen Modul nicht erforderlich ist. Dort entsteht nämlich im Randbereich des Substrats kein Auflagedruck und es ist ausreichend Raum zur Aufnahme des Klebstoffs vorhanden, so daß der Klebstoff nicht herausgepreßt wird.In the known module is during the manufacture of Insert the substrate into the plastic housing Part of the interposed adhesive is pressed out and must be carefully wiped off before curing so that there is no excess adhesive, which is a good support of the module on a heat sink and thus could hinder good heat transfer. That Rei cleaning process is an additional and annoying task step, which is not in the module according to the invention is required. This is because the edge area is created there of the substrate no contact pressure and it is sufficient Space to hold the adhesive so that the Adhesive is not squeezed out.

Nach einer vorteilhaften Ausgestaltung wird vorgeschla­ gen, die einstückig angeformten Auflagestützen an sol­ chen Stellen im Modul vorzusehen, an welchen sie auf eine metallisierte Fläche der strukturierten Oberseite des Substrats drücken. Solche beidseitig metallisierten Bereiche des Substrats stehen unter Druckspannung und sind daher weniger bruchempfindlich.According to an advantageous embodiment, it is proposed gene, the integrally molded support supports on sol The points in the module where they are to be placed a metallized surface of the textured top  press the substrate. Such metallized on both sides Areas of the substrate are under compressive stress and are therefore less sensitive to breakage.

Für Leistungshalbleitermodule werden häufig Kunststoff­ gehäuse verwendet, welche innen durch Rippen unterteilt oder verstärkt sind. Solche Rippen sind oftmals erfor­ derlich zur Erhöhung der Kriechspannungsfestigkeit. An derartige Rippen können mit geringem Aufwand vorteilhaft die gemäß der Erfindung erforderlichen Auflagestützen angeformt werden.Plastic is often used for power semiconductor modules used housing, which is divided on the inside by ribs or reinforced. Such ribs are often required necessary to increase the creep resistance. At such ribs can be advantageous with little effort the support supports required according to the invention be molded on.

Nach einer weiteren vorteilhaften Ausgestaltung werden in die Montagelöcher am Kunststoffgehäuse Metallniete, sogenannte Hohlniete, eingesetzt, welche den Kunststoff beim Aufschrauben vor einer möglichen Rißbildung schüt­ zen. Alternativ dazu kann auch gegen lokale Druckbela­ stungen besonders unempfindlicher Kunststoff gewählt werden. Geeignet sind z. B. glasfasesverstärkte Duropla­ ste oder moderne Hochleistungskunststoffe.According to a further advantageous embodiment into the mounting holes on the plastic housing metal rivets, so-called hollow rivets, which the plastic protect from possible cracking when screwing on Zen. Alternatively, you can also use local pressure particularly insensitive plastic selected will. Are suitable for. B. glass fiber reinforced Duropla or modern high-performance plastics.

Eine genauere Beschreibung der Erfindung folgt nachste­ hend anhand eines in der Zeichnung dargestellten Ausfüh­ rungsbeispiels. Es zeigen:A more detailed description of the invention follows below Based on an embodiment shown in the drawing example. Show it:

Fig. 1 einen Schnitt durch ein Kunststoffgehäuse mit eingesetztem Substrat, Fig. 1 shows a section through a plastic housing with an inserted substrate,

Fig. 2 Ansicht des Kunststoffgehäuses von unten, Fig. 2 view of the plastic housing from below,

Fig. 3 Ansicht eines teilweise bestückten Substrats von oben, Fig. 3 view of a partially mounted substrate from above,

Fig. 4 Ansicht eines fertiggestellten Leistungshalb­ leitermoduls. Fig. 4 view of a completed power semiconductor module.

Fig. 1 zeigt einen Schnitt durch eine in Fig. 2 einge­ tragene Ebene A-A eines Kunststoffgehäuses 1. Es handelt sich um ein rahmenförmiges, also oben offenes Gehäuse. Ebenso wäre jedoch auch ein haubenförmiges, also oben geschlossenes Gehäuse verwendbar. Am Gehäuse 1 sind Be­ festigungslaschen 2 mit Befestigungslöchern 3 angeformt. Die Befestigungslaschen 2 sind durch metallische Hohl­ niete 4 verstärkt, welche in die Befestigungslöcher 3 eingesetzt sind. Weiterhin ist das Gehäuse 1 im Inneren mit Rippen 5 versehen, an welche Auflagestützen 6 ange­ formt sind. Schließlich hat das Kunststoffgehäuse 1 in seiner Bodenebene 7 eine große Öffnung 8 mit einer um­ laufenden Vertiefung 9. Darin ist als Modulboden ein Keramiksubstrat 10 eingesetzt, welches auf der Ober- und Unterseite mit einer Metallschicht 11 versehen ist; vor­ zugsweise mit einer einige Zehntelmillimeter dicken Kup­ ferschicht, welche nach einem Direktverbindungsverfahren aufgebracht ist. Fig. 1 shows a section through a turned in Fig. 2 transmitted plane AA of a plastic housing 1. It is a frame-shaped housing, which is open at the top. However, a hood-shaped housing, that is to say closed at the top, could also be used. On the housing 1 Be fastening tabs 2 are formed with mounting holes 3 . The mounting tabs 2 are reinforced by hollow metal rivets 4 , which are inserted into the mounting holes 3 . Furthermore, the housing 1 is provided on the inside with ribs 5 , to which support supports 6 are formed. Finally, the plastic housing 1 has a large opening 8 in its bottom plane 7 with a recess 9 running around it. A ceramic substrate 10 , which is provided on the top and bottom with a metal layer 11 , is used as the module base; preferably with a few tenths of a millimeter thick copper layer which is applied by a direct connection method.

Das Substrat 10 ist zur Vereinfachung ohne seine auf der Oberseite vorhandene Bestückung mit Bauelementen und Anschlußelementen dargestellt. Der obere Rand des Sub­ strats 10 ist mit Hilfe eines Klebstoffs 12 auf Silikon­ basis mit dem Kunststoffgehäuse 1 im Bereich seiner Ver­ tiefung 9 verbunden. Die Länge der Auflagestützen 6, die Vertiefung 9 und die Dicke des Keramiksubstrats 10 sowie die Dicke der Metallschichten 11 sind so aufeinander ab­ gestimmt, daß einerseits das Keramiksubstrat 10 mit sei­ ner unteren Metallschicht 11 geringfügig über die Boden­ ebene 7 hinausragt, um günstige Andruckverhältnisse an einem Kühlkörper zu erzielen, und andererseits zwischen der Oberseite des Keramiksubstrats 10 und der Vertiefung 9 ein Spalt 13 von einigen Zehntelmillimeter Breite ent­ steht. Das Substrat 10 liegt somit nur an den Auflage­ stützen 6 und nicht an seinem Rand auf. For simplification, the substrate 10 is shown without its components and connecting elements on the top side. The upper edge of the sub strate 10 is connected with the aid of an adhesive 12 based on silicone to the plastic housing 1 in the region of its recess 9 . The length of the support supports 6 , the recess 9 and the thickness of the ceramic substrate 10 and the thickness of the metal layers 11 are so matched to one another that on the one hand the ceramic substrate 10 with its lower metal layer 11 protrudes slightly above the floor level 7 to provide favorable pressure conditions to achieve a heat sink, and on the other hand, a gap 13 of a few tenths of a millimeter width is formed between the top of the ceramic substrate 10 and the recess 9 . The substrate 10 is thus only on the support 6 and not on its edge.

Die Auflagestützen 6 sind vorzugsweise an solchen Stel­ len angeordnet, an denen eine obere Metallschicht 11 auf dem Substrat 10 vorhanden ist, und außerdem vorzugsweise an Stellen in der Nähe von wärmeerzeugenden Bauelemen­ ten, um besonders dort einen guten Wärmekontakt zu einem Kühlkörper, auf welchen ein solches Modul geschraubt wird, herzustellen.The support brackets 6 are preferably arranged at such Stel len, where an upper metal layer 11 is present on the substrate 10 , and also preferably at locations in the vicinity of heat-generating components, in particular there good thermal contact to a heat sink, on which a such module is screwed to manufacture.

Fig. 2 zeigt einen Blick auf die Unterseite des Kunst­ stoffgehäuses 1, in welches noch kein Substrat einge­ setzt ist. Die Bezugszeichen haben bei allen Figuren übereinstimmende Bedeutung. Fig. 2 shows a view of the underside of the plastic housing 1 , in which no substrate is set. The reference symbols have the same meaning in all the figures.

Fig. 3 zeigt einen Blick auf die Oberseite eines Keramik­ substrats 10, dessen Metallschicht 11 auf der Oberseite strukturiert ist. Auf der Metallschicht 11 ist ein Lei­ stungshalbleiterbauelement 14, hier ein IGBT-Chip aufge­ lötet und durch Verbindungsdrähte 15 mit Anschlußflächen für den Emitter und das Gate des IGBT (Insulated-Gate- Bipolar-Transistors) kontaktiert. Auf der Metallschicht 11 sind mit punktierten Linien Anschlußflächen 16.1 bis 16.3 für aufzulötende Anschlußlaschen für den Kollektor (16.1), dem Emitter (16.2) und das Gate (16.3) darge­ stellt und außerdem Auflageflächen 17, mit denen das Substrat 10 bzw. seine obere Metallschicht 11 auf den Auflagestützen 6 im Gehäuse 1 aufliegt. Fig. 3 shows a view of the top of a ceramic substrate 10 , the metal layer 11 is structured on the top. On the metal layer 11 , a power semiconductor component 14 , here an IGBT chip, is soldered up and contacted by connecting wires 15 with connection areas for the emitter and the gate of the IGBT (insulated gate bipolar transistor). On the metal layer 11 are dotted lines pads 16.1 to 16.3 for soldering lugs for the collector ( 16.1 ), the emitter ( 16.2 ) and the gate ( 16.3 ) Darge and also bearing surfaces 17 with which the substrate 10 or its upper metal layer 11 rests on the support supports 6 in the housing 1 .

Fig. 4 zeigt ein fertiggestelltes Leistungshalbleitermo­ dul, wobei außer dem Gehäuse 1 mit seinen Befestigungs­ laschen 2 oben herausgeführte Anschlußlaschen 18 und eine Hartvergußmasse 19, mit welcher ein oberer Teil des Modulinneren ausgegossen ist, zu sehen sind. Fig. 4 shows a completed power semiconductor module, with the exception of the housing 1 with its fastening tabs 2 connection tabs 18 and a hard sealing compound 19 with which an upper part of the module interior is poured out.

Bei der Herstellung des Leistungshalbleitermoduls geht man von einem mit Hohlnieten 4 versehenen Kunststoffge­ häuse 1 und von dem Keramiksubstrat 10 aus, welches nach einem Direktverbindungsverfahren auf der Ober- und Un­ terseite mit je einer z. B. 0,4 mm dicken Metallschicht 11 aus Kupfer versehen wird. Die obere Metallschicht 11 wird durch Ätzen in einzelne Flächen unterteilt. Auf die strukturierte Metallschicht 11 werden Bauelemente 14 und Anschlußlaschen lS mittels Weichlot in einem Durchlaufo­ fen aufgelötet. Das Substrat 10 hat auf der oberen Seite einen von der Metallschicht 11 befreiten Randstreifen. Dieser Randstreifen wird mit einer etwa 1 mm dicken Schnur aus Silikonklebstoff mit thixotropen Eigenschaf­ ten beschichtet. Alternativ kann der Klebstoff 12 auch auf das Kunststoffgehäuse 1 statt auf das Substrat 10 aufgebracht werden.In the manufacture of the power semiconductor module, one starts with a rivet 4 provided with plastic housing 1 and from the ceramic substrate 10 , which, according to a direct connection method on the top and bottom, each with a z. B. 0.4 mm thick metal layer 11 is provided from copper. The upper metal layer 11 is divided into individual areas by etching. Components 14 and connecting lugs IS are soldered onto the structured metal layer 11 by means of soft solder in a continuous run. The substrate 10 has an edge strip freed from the metal layer 11 on the upper side. This edge strip is coated with an approximately 1 mm thick cord made of silicone adhesive with thixotropic properties. Alternatively, the adhesive 12 can also be applied to the plastic housing 1 instead of to the substrate 10 .

Zur Herstellung der Verbindung zwischen Kunststoffgehäu­ se 1 und Substrat 10 legt man das Gehäuse 1 auf den Kopf, so daß das vorbereitete Substrat 10 in den Aus­ schnitt in der Bodenebene 7 eingelegt werden kann. Das Substrat 10 liegt dann mit seinen Auflageflächen 17 auf den Auflagestützen 6 auf. Nach dem anschließenden Aus­ härten des Klebstoffs 12 entsteht eine feste und dichte Verbindung zwischen dem Substrat 10 und dem Gehäuse 1. Das Leistungshalbleitermodul wird nun umgedreht und von seiner Oberseite her zuerst mit einer weichen Silikon­ vergußmasse und dann mit einem Epoxidharz als Hartverguß gefüllt und ausgehärtet.To establish the connection between Kunststoffgehäu se 1 and substrate 10 , the housing 1 is placed on the head, so that the prepared substrate 10 can be inserted into the cut from the bottom plane 7 . The substrate 10 then lies with its support surfaces 17 on the support supports 6 . After the subsequent hardening of the adhesive 12 , a firm and tight connection is formed between the substrate 10 and the housing 1 . The power semiconductor module is now turned over and filled from the top first with a soft silicone casting compound and then with an epoxy resin as a hard casting compound and cured.

Bezüglich der Bestückung des Substrats mit Bauelementen und mit Anschlußlaschen sind selbstverständlich zahlrei­ che Ausführungsvarianten möglich. Beispielsweise können die elektrischen Anschlüsse auch durch im Gehäuse vorbe­ stückte Anschlußlaschen entsprechend der Lehre der DE 37 17 489 A hergestellt werden, welche erst nach dem Einkleben des Substrats in das Gehäuse mit dem Substrat verlötet werden. Es ist ebenfalls möglich, die Stützen 6 direkt auf den Chip aufliegen zu lassen, wenn die Chips anstellle mit Bonddrähten mit Kontaktronden (z. B. aus Mo) kontaktiert werden.Regarding the equipping of the substrate with components and with connecting lugs, numerous variants are of course possible. For example, the electrical connections can also be made by connecting tabs pre-assembled in the housing in accordance with the teaching of DE 37 17 489 A, which are only soldered to the substrate after the substrate has been glued into the housing. It is also possible to have the supports 6 rest directly on the chip if the chips are contacted instead of with bond wires with contact probes (eg made of Mo).

Zur Anwendung des Leistungshalbleitermoduls wird dieses auf einen Kühlkörper aufgeschraubt, auf welchen zuvor eine Wärmeleitpaste aufgetragen wird. Auch hohe An­ schraubmomente von z. B. 5 Nm bei M-5-Schrauben führen nicht zu einer Schädigung des Moduls. This becomes the application of the power semiconductor module screwed onto a heat sink, on which previously a thermal paste is applied. Also high to torque of z. B. 5 Nm for M-5 screws does not damage the module.  

BezugszeichenlisteReference symbol list

 1 Kunststoffgehäuse
 2 Befestigungslasche
 3 Befestigungsloch
 4 Hohlniet
 5 Rippe
 6 Auflagestütze
 7 Bodenebene
 8 Öffnung
 9 Vertiefung
10 Keramiksubstrat
11 Metallschicht
12 Klebstoff
13 Spalt
14 Leistungshalbleiterbauelement
15 Verbindungsdraht
16.1 bis 16.3 Anschlußfläche
17 Auflagefläche
18 Anschlußlasche
19 Hartvergußmasse
1 plastic housing
2 fastening tabs
3 mounting hole
4 hollow rivet
5 rib
6 support bracket
7 floor level
8 opening
9 deepening
10 ceramic substrate
11 metal layer
12 adhesive
13 gap
14 power semiconductor component
15 connecting wire
16.1 to 16.3 pad
17 contact surface
18 connecting strap
19 hard casting compound

Claims (5)

1. Leistungshalbleitermodul mit einem Kunststoffge­ häuse, das in seiner Bodenebene eine Öffnung und eine umlaufende Vertiefung aufweist, in welche ein beidseitig mit einer Metallschicht versehenes Keramiksubstrat als Modulboden eingesetzt ist, wobei die dem Gehäuseinneren zugewandte Metallschicht des Substrats strukturiert und mit Bauelementen bestückt ist, dadurch gekennzeichnet, daß am Kunststoffgehäuse (1) Auflagestützen (6) ange­ formt sind, welche das Keramiksubstrat (10) an vom Sub­ stratrand entfernten Auflagestellen in solcher Weise abstützen, daß zwischen der Oberseite des Keramiksub­ strats (10) und der Vertiefung (9) am Kunststoffgehäuse (1) ein einige Zehntelmillimeter breiter Spalt (13) ver­ bleibt, welcher zur Befestigung und Abdichtung des Sub­ strats (10) mit einem Klebstoff (12) ausgefüllt ist.1. Power semiconductor module with a plastic housing that has an opening and a circumferential recess in its bottom level, into which a ceramic substrate provided on both sides with a metal substrate is used as the module base, the metal layer of the substrate facing the housing being structured and equipped with components, thereby characterized in that on the plastic housing ( 1 ) support supports ( 6 ) are formed, which support the ceramic substrate ( 10 ) on the sub-edge of the support in such a way that between the top of the ceramic substrate ( 10 ) and the recess ( 9 ) on Plastic housing ( 1 ) remains a few tenths of a millimeter wide gap ( 13 ), which for fastening and sealing the sub strate ( 10 ) is filled with an adhesive ( 12 ). 2. Leistungshalbleitermodul nach Anspruch 1, da­ durch gekennzeichnet, daß die Auflagestützen (6) an sol­ chen Stellen das Substrat (10) abstützen, an denen das Substrat (10) auch auf der Oberseite eine Metallschicht (11) aufweist.2. Power semiconductor module according to claim 1, characterized in that the support supports ( 6 ) support the substrate ( 10 ) at such surfaces, on which the substrate ( 10 ) also has a metal layer ( 11 ) on the top. 3. Leistungshalbleitermodul nach einem der vorste­ henden Ansprüche, dadurch gekennzeichnet, daß die Aufla­ gestützen (6) an Rippen (5) im Kunststoffgehäuse (1) angeformt sind. 3. Power semiconductor module according to one of the vorste existing claims, characterized in that the Aufla support ( 6 ) on ribs ( 5 ) in the plastic housing ( 1 ) are integrally formed. 4. Leistungshalbleitermodul nach einem der vorste­ henden Ansprüche, dadurch gekennzeichnet, daß an dem Kunststoffgehäuse (1) Befestigungslaschen (2) mit Befe­ stigungslöchern (3) angeformt, wobei in die Befesti­ gungslöcher (3) metallische Hohlnieten (4) eingesetzt sind.4. Power semiconductor module according to one of the vorste existing claims, characterized in that on the plastic housing ( 1 ) mounting tabs ( 2 ) with BEFE stigungslötern ( 3 ) formed, supply holes in the fastening ( 3 ) metallic hollow rivets ( 4 ) are used. 5. Leistungshalbleitermodul nach einem der Ansprü­ che 1 bis 3, dadurch gekennzeichnet, daß das Kunststoff­ gehäuse (1) aus einem gegen lokale Druckbelastungen un­ empfindlichen Kunststoff, wie z. B. einem glasfaserver­ stärkten Duroplast besteht.5. Power semiconductor module according to one of Ansprü che 1 to 3, characterized in that the plastic housing ( 1 ) from a non-sensitive to local pressure loads plastic, such as. B. a glasfaserver reinforced thermoset.
DE19904001554 1990-01-20 1990-01-20 Power semiconductor module with plastics casing - has deposition struts for ceramic substrate at points away from edge Ceased DE4001554A1 (en)

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DE9007621U DE9007621U1 (en) 1990-01-20 1990-01-20 Power semiconductor module

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0508179A2 (en) * 1991-04-08 1992-10-14 EXPORT-CONTOR Aussenhandelsgesellschaft mbH Circuit device
DE4446527A1 (en) * 1994-12-24 1996-06-27 Ixys Semiconductor Gmbh Power semiconductor module
EP0906008A2 (en) * 1997-09-26 1999-03-31 TEMIC TELEFUNKEN microelectronic GmbH Plastic housing for an electric board
US7034395B2 (en) 2001-10-10 2006-04-25 Eupec Europaische Gesellschaft Fur Leistungshalbleiter Gmbh Power semiconductor module with cooling element and pressing apparatus
DE102007005233A1 (en) 2007-01-30 2008-08-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Power module for use in e.g. frequency converter, has heat conducting, electrically isolating and outward sealing material formed around chip with substrate such that flat structure is coupleable with cooling medium
EP2365522A1 (en) * 2001-05-04 2011-09-14 Ixys Corporation Electrically isolated power device package
US8319335B2 (en) 2009-04-03 2012-11-27 Infineon Technologies Ag Power semiconductor module, power semiconductor module assembly and method for fabricating a power semiconductor module assembly

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Publication number Priority date Publication date Assignee Title
DE3323246A1 (en) * 1983-06-28 1985-01-10 Brown, Boveri & Cie Ag, 6800 Mannheim Power semiconductor module
DE3127457C2 (en) * 1981-07-11 1985-09-12 Brown, Boveri & Cie Ag, 6800 Mannheim Converter module
DE3505086A1 (en) * 1985-02-14 1986-08-28 Brown, Boveri & Cie Ag, 6800 Mannheim Power semiconductor module with a plastic casing
DE3508456C2 (en) * 1985-03-09 1987-01-08 Brown, Boveri & Cie Ag, 6800 Mannheim Power semiconductor module and method for producing such a module
DE3604882A1 (en) * 1986-02-15 1987-08-20 Bbc Brown Boveri & Cie PERFORMANCE SEMICONDUCTOR MODULE AND METHOD FOR PRODUCING THE MODULE

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Publication number Priority date Publication date Assignee Title
DE3127457C2 (en) * 1981-07-11 1985-09-12 Brown, Boveri & Cie Ag, 6800 Mannheim Converter module
DE3323246A1 (en) * 1983-06-28 1985-01-10 Brown, Boveri & Cie Ag, 6800 Mannheim Power semiconductor module
DE3505086A1 (en) * 1985-02-14 1986-08-28 Brown, Boveri & Cie Ag, 6800 Mannheim Power semiconductor module with a plastic casing
DE3508456C2 (en) * 1985-03-09 1987-01-08 Brown, Boveri & Cie Ag, 6800 Mannheim Power semiconductor module and method for producing such a module
DE3604882A1 (en) * 1986-02-15 1987-08-20 Bbc Brown Boveri & Cie PERFORMANCE SEMICONDUCTOR MODULE AND METHOD FOR PRODUCING THE MODULE

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0508179A2 (en) * 1991-04-08 1992-10-14 EXPORT-CONTOR Aussenhandelsgesellschaft mbH Circuit device
EP0508179A3 (en) * 1991-04-08 1992-12-30 Export-Contor Aussenhandelsgesellschaft Mbh Circuit device
DE4446527A1 (en) * 1994-12-24 1996-06-27 Ixys Semiconductor Gmbh Power semiconductor module
US5699232A (en) * 1994-12-24 1997-12-16 Ixys Semiconductor Gmbh Power semiconductor module having a plastic housing a metal/ceramic multilayer substrate and terminals in a soft encapsulation
EP0906008A2 (en) * 1997-09-26 1999-03-31 TEMIC TELEFUNKEN microelectronic GmbH Plastic housing for an electric board
EP0906008A3 (en) * 1997-09-26 2000-03-08 TEMIC TELEFUNKEN microelectronic GmbH Plastic housing for an electric board
EP2365522A1 (en) * 2001-05-04 2011-09-14 Ixys Corporation Electrically isolated power device package
US7034395B2 (en) 2001-10-10 2006-04-25 Eupec Europaische Gesellschaft Fur Leistungshalbleiter Gmbh Power semiconductor module with cooling element and pressing apparatus
DE102007005233A1 (en) 2007-01-30 2008-08-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Power module for use in e.g. frequency converter, has heat conducting, electrically isolating and outward sealing material formed around chip with substrate such that flat structure is coupleable with cooling medium
DE102007005233B4 (en) 2007-01-30 2021-09-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Power module
US8319335B2 (en) 2009-04-03 2012-11-27 Infineon Technologies Ag Power semiconductor module, power semiconductor module assembly and method for fabricating a power semiconductor module assembly

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