DE3940855A1 - Prozessintegriertes abluftreinigungssystem fuer vakuumpumpen - Google Patents

Prozessintegriertes abluftreinigungssystem fuer vakuumpumpen

Info

Publication number
DE3940855A1
DE3940855A1 DE19893940855 DE3940855A DE3940855A1 DE 3940855 A1 DE3940855 A1 DE 3940855A1 DE 19893940855 DE19893940855 DE 19893940855 DE 3940855 A DE3940855 A DE 3940855A DE 3940855 A1 DE3940855 A1 DE 3940855A1
Authority
DE
Germany
Prior art keywords
vacuum
plant according
cleaning
vacuum pump
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19893940855
Other languages
German (de)
English (en)
Other versions
DE3940855C2 (enExample
Inventor
Gerhard Dr Ing Hauk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to DE19893940855 priority Critical patent/DE3940855A1/de
Publication of DE3940855A1 publication Critical patent/DE3940855A1/de
Application granted granted Critical
Publication of DE3940855C2 publication Critical patent/DE3940855C2/de
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
DE19893940855 1989-12-11 1989-12-11 Prozessintegriertes abluftreinigungssystem fuer vakuumpumpen Granted DE3940855A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19893940855 DE3940855A1 (de) 1989-12-11 1989-12-11 Prozessintegriertes abluftreinigungssystem fuer vakuumpumpen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19893940855 DE3940855A1 (de) 1989-12-11 1989-12-11 Prozessintegriertes abluftreinigungssystem fuer vakuumpumpen

Publications (2)

Publication Number Publication Date
DE3940855A1 true DE3940855A1 (de) 1991-06-13
DE3940855C2 DE3940855C2 (enExample) 1991-11-14

Family

ID=6395223

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19893940855 Granted DE3940855A1 (de) 1989-12-11 1989-12-11 Prozessintegriertes abluftreinigungssystem fuer vakuumpumpen

Country Status (1)

Country Link
DE (1) DE3940855A1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993022031A1 (de) * 1992-04-27 1993-11-11 Gkss-Forschungszentrum Geesthacht Gmbh Verfahren und vorrichtung zur trennung von über flüssigkeiten entstehenden gasgemischen
RU2180871C1 (ru) * 2001-06-08 2002-03-27 Архаров Иван Алексеевич Устройство для мембранного многостадийного разделения неоногелиевой смеси
RU2198018C1 (ru) * 2001-09-24 2003-02-10 Федеральное государственное унитарное предприятие "Исследовательский центр им. М.В.Келдыша" Мембранная установка
RU2486948C1 (ru) * 2012-02-16 2013-07-10 Виталий Леонидович Бондаренко Установка для концентрирования неоногелиевой смеси

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3806107A1 (de) * 1988-02-26 1989-08-31 Geesthacht Gkss Forschung Verfahren zum austrag organischer verbindungen aus luft/permanentgasgemischen

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3806107A1 (de) * 1988-02-26 1989-08-31 Geesthacht Gkss Forschung Verfahren zum austrag organischer verbindungen aus luft/permanentgasgemischen

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Wasser, Luft und Betrieb, 5/88, S. 39-45 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993022031A1 (de) * 1992-04-27 1993-11-11 Gkss-Forschungszentrum Geesthacht Gmbh Verfahren und vorrichtung zur trennung von über flüssigkeiten entstehenden gasgemischen
RU2180871C1 (ru) * 2001-06-08 2002-03-27 Архаров Иван Алексеевич Устройство для мембранного многостадийного разделения неоногелиевой смеси
RU2198018C1 (ru) * 2001-09-24 2003-02-10 Федеральное государственное унитарное предприятие "Исследовательский центр им. М.В.Келдыша" Мембранная установка
RU2486948C1 (ru) * 2012-02-16 2013-07-10 Виталий Леонидович Бондаренко Установка для концентрирования неоногелиевой смеси

Also Published As

Publication number Publication date
DE3940855C2 (enExample) 1991-11-14

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition