DE3890362T1 - MASK REPAIR USING AN OPTIMIZED FOCUSED ION RAY SYSTEM - Google Patents
MASK REPAIR USING AN OPTIMIZED FOCUSED ION RAY SYSTEMInfo
- Publication number
- DE3890362T1 DE3890362T1 DE19883890362 DE3890362T DE3890362T1 DE 3890362 T1 DE3890362 T1 DE 3890362T1 DE 19883890362 DE19883890362 DE 19883890362 DE 3890362 T DE3890362 T DE 3890362T DE 3890362 T1 DE3890362 T1 DE 3890362T1
- Authority
- DE
- Germany
- Prior art keywords
- focused ion
- ray system
- mask repair
- ion ray
- optimized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US4973787A | 1987-05-11 | 1987-05-11 | |
PCT/US1988/001469 WO1988009049A1 (en) | 1987-05-11 | 1988-05-10 | Mask repair using an optimized focused ion beam system |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3890362T1 true DE3890362T1 (en) | 1989-10-19 |
Family
ID=26727482
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19883890362 Withdrawn DE3890362T1 (en) | 1987-05-11 | 1988-05-10 | MASK REPAIR USING AN OPTIMIZED FOCUSED ION RAY SYSTEM |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE3890362T1 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10208043A1 (en) * | 2002-02-25 | 2003-09-11 | Leo Elektronenmikroskopie Gmbh | Material processing system, material processing method and gas supply therefor |
US7435973B2 (en) | 2002-02-25 | 2008-10-14 | Carl Zeiss Nts Gmbh | Material processing system and method |
DE202010009379U1 (en) | 2010-06-22 | 2010-09-02 | Dreebit Gmbh | Device for structuring solid surfaces with ion beams from an ion beam spectrum |
DE102010030372A1 (en) | 2010-06-22 | 2011-12-22 | Dreebit Gmbh | Device for structuring solid surfaces with ion beams from an ion beam spectrum |
-
1988
- 1988-05-10 DE DE19883890362 patent/DE3890362T1/en not_active Withdrawn
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10208043A1 (en) * | 2002-02-25 | 2003-09-11 | Leo Elektronenmikroskopie Gmbh | Material processing system, material processing method and gas supply therefor |
US7435973B2 (en) | 2002-02-25 | 2008-10-14 | Carl Zeiss Nts Gmbh | Material processing system and method |
US7868290B2 (en) | 2002-02-25 | 2011-01-11 | Carl Zeiss Nts Gmbh | Material processing system and method |
DE10208043B4 (en) * | 2002-02-25 | 2011-01-13 | Carl Zeiss Nts Gmbh | Material processing system and material processing methods |
DE202010009379U1 (en) | 2010-06-22 | 2010-09-02 | Dreebit Gmbh | Device for structuring solid surfaces with ion beams from an ion beam spectrum |
DE102010030372A1 (en) | 2010-06-22 | 2011-12-22 | Dreebit Gmbh | Device for structuring solid surfaces with ion beams from an ion beam spectrum |
WO2011160990A1 (en) | 2010-06-22 | 2011-12-29 | Dreebit Gmbh | Apparatus for structuring solid surfaces using ion beams from an ion beam spectrum |
DE102010030372B4 (en) * | 2010-06-22 | 2012-02-16 | Dreebit Gmbh | Device for structuring solid surfaces with ion beams from an ion beam spectrum |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8139 | Disposal/non-payment of the annual fee |