DE3817035C1 - Micromechanical switch for optical fibres - Google Patents
Micromechanical switch for optical fibresInfo
- Publication number
- DE3817035C1 DE3817035C1 DE19883817035 DE3817035A DE3817035C1 DE 3817035 C1 DE3817035 C1 DE 3817035C1 DE 19883817035 DE19883817035 DE 19883817035 DE 3817035 A DE3817035 A DE 3817035A DE 3817035 C1 DE3817035 C1 DE 3817035C1
- Authority
- DE
- Germany
- Prior art keywords
- rocker
- switch according
- optical
- substrate
- switch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
- G02B6/3504—Rotating, tilting or pivoting the waveguides, or with the waveguides describing a curved path
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12145—Switch
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/1215—Splitter
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
- G02B6/3552—1x1 switch, e.g. on/off switch
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
Description
Die Erfindung betrifft einen mikromechanischen Schalter für Lichtwellenleiter.The invention relates to a micromechanical switch for Optical fiber.
Es sind optische Schalter bekannt, welche elektrisch steuerbare Teile aufweisen entweder mit einem Schaltmittelteil, wie Wippe oder daß der Lichtwellenleiter beweglich gelagert ist (vgl. US-PS 46 26 066, DE-OS 33 38 051, EP 02 56 348 A1).Optical switches are known which have electrically controllable parts have either a switching middle part, such as a rocker or that Optical fiber is movably mounted (see. US-PS 46 26 066, DE-OS 33 38 051, EP 02 56 348 A1).
Die bekannten optischen Schalter haben eine solche Baugröße, daß sie für integrierte Bauelemente, insbesondere in der "single chip"-Technologie nicht geeignet sind.The known optical switches have a size that they for integrated components, especially in "single chip" technology are not suitable.
In der Optik gibt es verschiedene Möglichkeiten, Lichtwellenleiter auf Halbleitersubstraten zu integrieren. So können z. B. Wellenleiter ein diffundiert werden (LiNb3) oder aus aufgebondeten Glasschichten her ausgeätzt werden. Auf diese Weise können einfache Verzweiger oder Kopp ler gebaut werden. Ein Problem stellt allerdings die Herstellung von elektrisch steuerbaren Schaltelementen für Lichtwellenleiter in minia turisierter Form dar.In optics, there are various options for integrating optical fibers on semiconductor substrates. So z. B. waveguides can be diffused (LiNb 3 ) or etched out of bonded glass layers. In this way simple branching devices or couplers can be built. One problem, however, is the production of electrically controllable switching elements for optical fibers in miniaturized form.
Aufgabe der Erfindung ist ein mikromechanisch herstellbares Schaltele ment für integrierbare Lichtwellenleiter zu schaffen, das einfach im Aufbau und zugleich effektiv ist.The object of the invention is a micro-mechanically producible Schaltele to create for integrable fiber optic cables that is easy in the Structure and effective at the same time.
Gelöst wird diese Aufgabe gemäß dem Hauptanspruch. Aus- und Weiterbil dungen der Erfindung sind weiteren Ansprüchen zu entnehmen.This task is solved according to the main claim. Training and further education Further claims can be found in the invention.
Ausführungsbeispiele der Erfindung sind in den Zeichnungen rein schematisch dargestellt und werden anschließend erläutert, ohne daß die Erfindung hierauf beschränkt wäre. Es zeigtEmbodiments of the invention are in the drawings shown purely schematically and are subsequently explained without the invention would be limited to this. It shows
Fig. 1 einen Querschnitt durch einen optischen Schalter im EIN-Zustand; Fig. 1 is a cross-sectional view of an optical switch in the ON state;
Fig. 2 eine Draufsicht auf Fig. 1; Fig. 2 is a plan view of Fig. 1;
Fig. 3 einen Querschnitt ähnlich Fig. 1 im AUS-Zustand; Fig. 3 is a cross-section similar to Figure 1 in the OFF state.
Fig. 4 eine Anwendung als optischer Multiplexer (Array). Fig. 4 shows an application as an optical multiplexer (array).
Ein Ausführungsbeispiel des vorgeschlagenen Schaltelements ist in Fig. 1 und 2 dargestellt. Kernstück des Bauelementes ist eine aus einem Sub strat 1 freigeätzte Wippe 2, die an Torsionsbalken 3 gelagert ist. Diese Wippe trägt einen Lichtwellenleiter 4, der entweder aus einer aufge brachten Glasfaser oder aus einem anodisch aufgebondeten und freige ätzten Stück Glas besteht. In der Grundstellung des Schalters EIN fluch tet dieser Wellenleiter mit zwei weiteren Wellenleitern 5, die auf dem Substrat aufgebracht sind. Wippe, Torsionsbalken und Substrat werden aus einem einkristallinen, elektrisch leitenden Material hergestellt. Im besonderen kommt hierfür Silizium in Frage. Die oben geschilderte Ein heit wird mit einer Grundplatte 6 verbunden, in der sich eine Vertiefung 7 befindet. Diese Grundplatte kann z. B. aus Glas bestehen, das dann mittels anodischer Verbindungstechnik mit Silizium verbunden werden kann. Auf der Grundplatte befinden sich zwei einzeln ansteuerbare Elek troden 8, 9, die zur elektrostatischen Auslenkung der Wippen 2 dienen in die Stellung AUS gemäß Fig. 3 und vice versa. Eine Elektrode 8 befin det sich in der Vertiefung der Grundplatte, die andere 9 unteralb des anderen Endes der Wippe 2. Die mikromechanischen Herstellungstechnolo gien sind an sich bekannt. Bevorzugt werden einkristalline Substrate, inbesondere Silizium-Substrate, aus denen monolithisch herausgearbeitet wird.An embodiment of the proposed switching element is shown in FIGS. 1 and 2. Is the core of the device one of a sub strate 1 etched free rocker 2 which is mounted on torsion bars. 3 This rocker carries an optical waveguide 4 , which consists either of a glass fiber brought up or from an anodically bonded and clear etched piece of glass. In the basic position of the switch ON, this waveguide is aligned with two further waveguides 5 which are applied to the substrate. The rocker, torsion bar and substrate are made from a single-crystalline, electrically conductive material. Silicon is particularly suitable for this. The unit described above is connected to a base plate 6 , in which there is a recess 7 . This base plate can, for. B. consist of glass, which can then be connected by means of anodic connection technology with silicon. On the base plate are two individually controllable elec trodes 8, 9 , which serve for the electrostatic deflection of the rockers 2 in the OFF position according to FIG. 3 and vice versa. One electrode 8 is located in the depression of the base plate, the other 9 below the other end of the rocker 2 . The micromechanical manufacturing technologies are known per se. Single-crystalline substrates, in particular silicon substrates, are preferred, from which the work is carried out monolithically.
Das hier vorgeschlagene Schaltelement kann sehr klein aufgebaut werden und ist auch in einem komplexen Mikrosystem integrierbar. Ferner können mehrere solcher Schaltelemente auf einem Substrat (als single chip) mit einander integriert werden. Auf diese Weise können z. B. auch optische Arrays/Multiplexelemente realisiert werden, siehe Fig. 4, ohne auf diese Anwendung beschränkt zu sein. The switching element proposed here can be made very small and can also be integrated in a complex microsystem. Furthermore, several such switching elements can be integrated with one another on a substrate (as a single chip). In this way, e.g. For example, optical arrays / multiplex elements can also be implemented, see FIG. 4, without being restricted to this application.
Abwandlungen der beschriebenen und dargestellten Ausführungsbeispiele können selbstverständlich vom Fachmann vorgenommen werden, ohne den Rah men der Erfindung, insbesondere wie in den Ansprüchen gekennzeichnet, zu verlassen.Modifications to the described and illustrated exemplary embodiments can of course be done by a specialist without the frame men of the invention, in particular as characterized in the claims leave.
Die Abwandlungsmöglichkeiten beziehen sich auch auf die Materialien, die bearbeitet werden und deren Bearbeitungsverfahren, soweit für die Zwecke/Ziele der Erfindung geeignet.The possible modifications also refer to the materials that are processed and their processing methods, as far as for the Purposes / purposes of the invention suitable.
Die elektrischen, magnetischen oder mechanischen Ansteuermöglichkeiten sollten auf das schnelle Erreichen definierter Endstellungen (z. B. EIN/AUS) beschränkt bleiben. Dabei können auch Umschalter (zwischen mehreren Stellungen) zur Anwendung kommen und die Art und Weise der Bewegung (Richtung) der Wippe kann rechts oder links durch Anstoßen (Druck) oder Zug (Hub) erfolgen. Die Lichtwellenleiter müssen (in Stel lung EIN) möglichst exakt fluchten und die Verluste beim Einkoppeln müs sen so klein wie möglich gehalten werden.The electrical, magnetic or mechanical control options should quickly reach defined end positions (e.g. ON / OFF) remain limited. Switchers (between multiple positions) and the manner of Movement (direction) of the rocker can be bumped to the right or left (Push) or pull (stroke). The optical fibers must (in Stel ON) must be aligned as precisely as possible and the losses during coupling must must be kept as small as possible.
Claims (8)
- - die Wippe (2) mittels Torsiosbalken (3) an einem Substrat (1) gela gert ist, wobei die Wippe (2) und die Torsionsbalken (3) monolitisch aus dem Substrat (1) herausgearbeitet sind,
- - und daß die Wippe (2) ein ihrer Länge angepaßtes Lichtwellenleiter stück (4) trägt, das den Lichtweg zwischen zwei an den gegenüberlie genden Seiten der Wippe angrenzenden Lichtwellenleiters (5) schaltet.
- - The rocker ( 2 ) by means of torsion bars ( 3 ) on a substrate ( 1 ) is gela, the rocker ( 2 ) and the torsion bars ( 3 ) are worked out monolithically from the substrate ( 1 ),
- - And that the rocker ( 2 ) has a length adapted to the optical waveguide piece ( 4 ), which switches the light path between two adjacent to the opposite sides of the rocker optical waveguide ( 5 ).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19883817035 DE3817035C1 (en) | 1988-05-19 | 1988-05-19 | Micromechanical switch for optical fibres |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19883817035 DE3817035C1 (en) | 1988-05-19 | 1988-05-19 | Micromechanical switch for optical fibres |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3817035C1 true DE3817035C1 (en) | 1989-08-17 |
Family
ID=6354681
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19883817035 Expired DE3817035C1 (en) | 1988-05-19 | 1988-05-19 | Micromechanical switch for optical fibres |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE3817035C1 (en) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0510628A1 (en) * | 1991-04-26 | 1992-10-28 | Texas Instruments Incorporated | Optical crossbar switch |
EP0510629A1 (en) * | 1991-04-26 | 1992-10-28 | Texas Instruments Incorporated | Deformable mirror shutter device |
EP1023765A1 (en) * | 1997-10-15 | 2000-08-02 | Reliance Electric Industrial Company | Method and apparatus for reducing power loss in power conversion circuitry |
EP1033601A1 (en) * | 1999-03-04 | 2000-09-06 | Japan Aviation Electronics Industry, Limited | Optical switch and method of making the same |
WO2002025350A2 (en) * | 2000-09-19 | 2002-03-28 | Newport Opticom, Inc. | Method and apparatus for switching optical signals using rotatable optically transmissive microstructure |
WO2002025351A2 (en) * | 2000-09-19 | 2002-03-28 | Newport Opticom, Inc. | An optical switching system that uses movable microstructures to switch optical signals in three dimensions |
WO2002025352A2 (en) * | 2000-09-19 | 2002-03-28 | Newport Opticom, Inc. | Optical switching element having movable optically transmissive microstructure |
WO2003067303A2 (en) * | 2002-02-08 | 2003-08-14 | Newport Opticom, Inc. | Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials |
US6990264B2 (en) | 2000-09-19 | 2006-01-24 | Telkamp Arthur R | 1×N or N×1 optical switch having a plurality of movable light guiding microstructures |
US7003188B2 (en) | 2001-04-17 | 2006-02-21 | Ying Wen Hsu | Low loss optical switching system |
US7062130B2 (en) | 2003-05-01 | 2006-06-13 | Arthur Telkamp | Low-loss optical waveguide crossovers using an out-of-plane waveguide |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3338051A1 (en) * | 1983-10-20 | 1985-05-02 | Standard Elektrik Lorenz Ag, 7000 Stuttgart | Electrically controlled optical switch |
US4626066A (en) * | 1983-12-30 | 1986-12-02 | At&T Bell Laboratories | Optical coupling device utilizing a mirror and cantilevered arm |
EP0256348A1 (en) * | 1986-07-24 | 1988-02-24 | Alcatel Cit | Mechanical switch for optical fibers |
-
1988
- 1988-05-19 DE DE19883817035 patent/DE3817035C1/en not_active Expired
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3338051A1 (en) * | 1983-10-20 | 1985-05-02 | Standard Elektrik Lorenz Ag, 7000 Stuttgart | Electrically controlled optical switch |
US4626066A (en) * | 1983-12-30 | 1986-12-02 | At&T Bell Laboratories | Optical coupling device utilizing a mirror and cantilevered arm |
EP0256348A1 (en) * | 1986-07-24 | 1988-02-24 | Alcatel Cit | Mechanical switch for optical fibers |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0510628A1 (en) * | 1991-04-26 | 1992-10-28 | Texas Instruments Incorporated | Optical crossbar switch |
EP0510629A1 (en) * | 1991-04-26 | 1992-10-28 | Texas Instruments Incorporated | Deformable mirror shutter device |
US5226099A (en) * | 1991-04-26 | 1993-07-06 | Texas Instruments Incorporated | Digital micromirror shutter device |
EP1023765A1 (en) * | 1997-10-15 | 2000-08-02 | Reliance Electric Industrial Company | Method and apparatus for reducing power loss in power conversion circuitry |
EP1023765A4 (en) * | 1997-10-15 | 2001-07-18 | Reliance Electric Ind Co | Method and apparatus for reducing power loss in power conversion circuitry |
EP1033601A1 (en) * | 1999-03-04 | 2000-09-06 | Japan Aviation Electronics Industry, Limited | Optical switch and method of making the same |
WO2002025352A2 (en) * | 2000-09-19 | 2002-03-28 | Newport Opticom, Inc. | Optical switching element having movable optically transmissive microstructure |
WO2002025351A2 (en) * | 2000-09-19 | 2002-03-28 | Newport Opticom, Inc. | An optical switching system that uses movable microstructures to switch optical signals in three dimensions |
WO2002025350A2 (en) * | 2000-09-19 | 2002-03-28 | Newport Opticom, Inc. | Method and apparatus for switching optical signals using rotatable optically transmissive microstructure |
WO2002025351A3 (en) * | 2000-09-19 | 2003-07-10 | Newport Opticom Inc | An optical switching system that uses movable microstructures to switch optical signals in three dimensions |
WO2002025352A3 (en) * | 2000-09-19 | 2003-08-28 | Newport Opticom Inc | Optical switching element having movable optically transmissive microstructure |
WO2002025350A3 (en) * | 2000-09-19 | 2003-09-25 | Newport Opticom Inc | Method and apparatus for switching optical signals using rotatable optically transmissive microstructure |
US6807331B2 (en) | 2000-09-19 | 2004-10-19 | Newport Opticom, Inc. | Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials |
US6990264B2 (en) | 2000-09-19 | 2006-01-24 | Telkamp Arthur R | 1×N or N×1 optical switch having a plurality of movable light guiding microstructures |
US7003188B2 (en) | 2001-04-17 | 2006-02-21 | Ying Wen Hsu | Low loss optical switching system |
WO2003067303A2 (en) * | 2002-02-08 | 2003-08-14 | Newport Opticom, Inc. | Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials |
WO2003067303A3 (en) * | 2002-02-08 | 2004-01-22 | Newport Opticom Inc | Structures that correct for thermal distortion in an optical device formed of thermally dissimilar materials |
US7062130B2 (en) | 2003-05-01 | 2006-06-13 | Arthur Telkamp | Low-loss optical waveguide crossovers using an out-of-plane waveguide |
US7215854B2 (en) | 2003-05-01 | 2007-05-08 | Gemfire Corporation | Low-loss optical waveguide crossovers using an out-of-plane waveguide |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8100 | Publication of the examined application without publication of unexamined application | ||
D1 | Grant (no unexamined application published) patent law 81 | ||
8363 | Opposition against the patent | ||
8365 | Fully valid after opposition proceedings | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: DEUTSCHE AEROSPACE AG, 8000 MUENCHEN, DE |
|
8327 | Change in the person/name/address of the patent owner |
Owner name: DAIMLER-BENZ AEROSPACE AKTIENGESELLSCHAFT, 80804 M |
|
8339 | Ceased/non-payment of the annual fee |