DE3783606D1 - Verfahren und vorrichtung zum ermitteln des schwerpunktes eines ionenstrahls. - Google Patents

Verfahren und vorrichtung zum ermitteln des schwerpunktes eines ionenstrahls.

Info

Publication number
DE3783606D1
DE3783606D1 DE8787908068T DE3783606T DE3783606D1 DE 3783606 D1 DE3783606 D1 DE 3783606D1 DE 8787908068 T DE8787908068 T DE 8787908068T DE 3783606 T DE3783606 T DE 3783606T DE 3783606 D1 DE3783606 D1 DE 3783606D1
Authority
DE
Germany
Prior art keywords
focus
determining
ion ray
ray
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787908068T
Other languages
English (en)
Inventor
Reuel Liebert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Application granted granted Critical
Publication of DE3783606D1 publication Critical patent/DE3783606D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
DE8787908068T 1986-11-24 1987-11-18 Verfahren und vorrichtung zum ermitteln des schwerpunktes eines ionenstrahls. Expired - Lifetime DE3783606D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/934,011 US4724324A (en) 1986-11-24 1986-11-24 Method and apparatus for ion beam centroid location
PCT/US1987/003005 WO1988004103A1 (en) 1986-11-24 1987-11-18 Method and apparatus for ion beam centroid location

Publications (1)

Publication Number Publication Date
DE3783606D1 true DE3783606D1 (de) 1993-02-25

Family

ID=25464802

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787908068T Expired - Lifetime DE3783606D1 (de) 1986-11-24 1987-11-18 Verfahren und vorrichtung zum ermitteln des schwerpunktes eines ionenstrahls.

Country Status (6)

Country Link
US (1) US4724324A (de)
EP (1) EP0290575B1 (de)
JP (1) JPH01501508A (de)
KR (1) KR890700261A (de)
DE (1) DE3783606D1 (de)
WO (1) WO1988004103A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01242984A (ja) * 1988-03-24 1989-09-27 Mitsubishi Electric Corp ビームプロフアイルモニタ
US4992742A (en) * 1988-12-22 1991-02-12 Mitsubishi Denki Kabushiki Kaisha Charged-particle distribution measuring apparatus
JPH0770296B2 (ja) * 1989-05-15 1995-07-31 日新電機株式会社 イオン注入装置
JP2969788B2 (ja) * 1990-05-17 1999-11-02 日新電機株式会社 イオンビームの平行度測定方法、走査波形整形方法およびイオン注入装置
US5198676A (en) * 1991-09-27 1993-03-30 Eaton Corporation Ion beam profiling method and apparatus
US5714875A (en) * 1995-02-23 1998-02-03 Atomic Energy Of Canada Limited Electron beam stop analyzer
AU2677295A (en) * 1995-06-07 1996-12-30 Applied Materials, Inc. Beam stop apparatus for an ion implanter
CA2329180A1 (en) 1998-10-06 2000-04-13 University Of Washington Charged particle beam detection system
US6288402B1 (en) * 1998-12-14 2001-09-11 The Regents Of The University Of California High sensitivity charge amplifier for ion beam uniformity monitor
US6507033B1 (en) * 1999-03-29 2003-01-14 The Regents Of The University Of California Versatile, high-sensitivity faraday cup array for ion implanters
GB2355337B (en) 1999-10-12 2004-04-14 Applied Materials Inc Ion implanter and beam stop therefor
US6710359B2 (en) 2001-03-23 2004-03-23 Varian Semiconductor Equipment Associates, Inc. Methods and apparatus for scanned beam uniformity adjustment in ion implanters
US7332729B1 (en) * 2004-06-18 2008-02-19 Novelx, Inc. System and method for multiple electron, ion, and photon beam alignment
US7005656B1 (en) 2005-02-01 2006-02-28 Varian Semiconductor Equipment Associates, Inc. Ion implanter with vacuum-maintaining circuit board providing connections to internal faraday cups
KR100956440B1 (ko) * 2008-04-16 2010-05-06 포항공과대학교 산학협력단 광자빔 위치 모니터 장치
CN103094036B (zh) * 2011-11-07 2016-05-18 北京中科信电子装备有限公司 一种宽带束束流检测的方法与装置
CN110085500B (zh) * 2019-05-15 2021-03-30 中国电子科技集团公司第二十四研究所 一种提高离子注入剂量控制精度的方法和系统
JP7332437B2 (ja) * 2019-11-01 2023-08-23 住友重機械イオンテクノロジー株式会社 イオン注入装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3612858A (en) * 1970-02-10 1971-10-12 Atomic Energy Commission Device for measuring the position, size and intensity of high-energy particles
US3749963A (en) * 1970-05-19 1973-07-31 Us Air Force Device to aid in centering of high energy electric particle beams in an evacuated drift tube
GB1416401A (en) * 1973-03-06 1975-12-03 Rolls Royce Control systems
FR2274122A1 (fr) * 1974-06-07 1976-01-02 Cgr Mev Procede de centrage d'un faisceau de balayage a rayonnement ionisant et dispositif permettant la mise en oeuvre de ce procede
FR2441182A1 (fr) * 1978-11-07 1980-06-06 Thomson Csf Dispositif de visualisation de la repartition de la densite du courant au sein d'un faisceau de particules chargees
JPS5679275A (en) * 1979-12-03 1981-06-29 Fujitsu Ltd Measuring method for electron beam diameter
US4608493A (en) * 1983-05-09 1986-08-26 Sony Corporation Faraday cup

Also Published As

Publication number Publication date
EP0290575A4 (de) 1989-06-26
KR890700261A (ko) 1989-03-10
WO1988004103A1 (en) 1988-06-02
JPH01501508A (ja) 1989-05-25
US4724324A (en) 1988-02-09
EP0290575B1 (de) 1993-01-13
EP0290575A1 (de) 1988-11-17

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Legal Events

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8332 No legal effect for de