DE3775466D1 - Anwendung von mehrschicht-duennfilmwiderstaenden mit modulierten zusammensetzungen. - Google Patents

Anwendung von mehrschicht-duennfilmwiderstaenden mit modulierten zusammensetzungen.

Info

Publication number
DE3775466D1
DE3775466D1 DE8787200945T DE3775466T DE3775466D1 DE 3775466 D1 DE3775466 D1 DE 3775466D1 DE 8787200945 T DE8787200945 T DE 8787200945T DE 3775466 T DE3775466 T DE 3775466T DE 3775466 D1 DE3775466 D1 DE 3775466D1
Authority
DE
Germany
Prior art keywords
application
thin film
multilayer thin
film resistors
modulated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787200945T
Other languages
English (en)
Inventor
Argenis Ramon Prieto
David Peyton Clark
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips North America LLC
Original Assignee
US Philips Corp
North American Philips Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by US Philips Corp, North American Philips Corp filed Critical US Philips Corp
Application granted granted Critical
Publication of DE3775466D1 publication Critical patent/DE3775466D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C10/00—Adjustable resistors
    • H01C10/16—Adjustable resistors including plural resistive elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/06—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material including means to minimise changes in resistance with changes in temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/232—Adjusting the temperature coefficient; Adjusting value of resistance by adjusting temperature coefficient of resistance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/008—Thermistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/18—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material comprising a plurality of layers stacked between terminals

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Non-Adjustable Resistors (AREA)
  • Physical Vapour Deposition (AREA)
  • Thermistors And Varistors (AREA)
DE8787200945T 1986-05-29 1987-05-20 Anwendung von mehrschicht-duennfilmwiderstaenden mit modulierten zusammensetzungen. Expired - Lifetime DE3775466D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/868,843 US4766411A (en) 1986-05-29 1986-05-29 Use of compositionally modulated multilayer thin films as resistive material

Publications (1)

Publication Number Publication Date
DE3775466D1 true DE3775466D1 (de) 1992-02-06

Family

ID=25352426

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787200945T Expired - Lifetime DE3775466D1 (de) 1986-05-29 1987-05-20 Anwendung von mehrschicht-duennfilmwiderstaenden mit modulierten zusammensetzungen.

Country Status (5)

Country Link
US (1) US4766411A (de)
EP (1) EP0247685B1 (de)
JP (1) JPS6325901A (de)
KR (1) KR870011635A (de)
DE (1) DE3775466D1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4920329A (en) * 1989-09-13 1990-04-24 Motorola, Inc. Impedance-compensated thick-film resistor
DE4026061C1 (de) * 1990-08-17 1992-02-13 Heraeus Sensor Gmbh, 6450 Hanau, De
US5494845A (en) * 1993-08-17 1996-02-27 Raytheon Company Method of fabrication of bilayer thin film resistor
US5585776A (en) * 1993-11-09 1996-12-17 Research Foundation Of The State University Of Ny Thin film resistors comprising ruthenium oxide
EP0720216B1 (de) * 1994-12-29 2001-10-17 AT&T Corp. Linienbreitenmessung an integrierten Schaltungsstrukturen
US5889459A (en) * 1995-03-28 1999-03-30 Matsushita Electric Industrial Co., Ltd. Metal oxide film resistor
KR100398019B1 (ko) * 2001-08-30 2003-09-19 정영찬 저함량 알루미나계 절연기재가 대체 사용된 고용량, 고특성 산화금속 피막 저항기의 피막 제조방법
KR100407520B1 (ko) * 2001-09-04 2003-11-28 필코전자주식회사 고 전압 써지 저항기 및 그 제조방법
US6873028B2 (en) * 2001-11-15 2005-03-29 Vishay Intertechnology, Inc. Surge current chip resistor
US7217981B2 (en) 2005-01-06 2007-05-15 International Business Machines Corporation Tunable temperature coefficient of resistance resistors and method of fabricating same
US7898365B2 (en) * 2006-09-06 2011-03-01 Raytheon Company Integrated saw device heater
JP5210559B2 (ja) * 2007-07-13 2013-06-12 株式会社日立製作所 半導体装置およびその製造方法
US8242876B2 (en) 2008-09-17 2012-08-14 Stmicroelectronics, Inc. Dual thin film precision resistance trimming
US8659085B2 (en) 2010-08-24 2014-02-25 Stmicroelectronics Pte Ltd. Lateral connection for a via-less thin film resistor
US8436426B2 (en) * 2010-08-24 2013-05-07 Stmicroelectronics Pte Ltd. Multi-layer via-less thin film resistor
US8400257B2 (en) 2010-08-24 2013-03-19 Stmicroelectronics Pte Ltd Via-less thin film resistor with a dielectric cap
US8927909B2 (en) 2010-10-11 2015-01-06 Stmicroelectronics, Inc. Closed loop temperature controlled circuit to improve device stability
US8809861B2 (en) 2010-12-29 2014-08-19 Stmicroelectronics Pte Ltd. Thin film metal-dielectric-metal transistor
US9159413B2 (en) 2010-12-29 2015-10-13 Stmicroelectronics Pte Ltd. Thermo programmable resistor based ROM
US9232315B2 (en) 2011-03-16 2016-01-05 Phonon Corporation Monolithically applied heating elements on saw substrate
US8981527B2 (en) * 2011-08-23 2015-03-17 United Microelectronics Corp. Resistor and manufacturing method thereof
US8526214B2 (en) 2011-11-15 2013-09-03 Stmicroelectronics Pte Ltd. Resistor thin film MTP memory

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5515692B2 (de) * 1973-07-06 1980-04-25
JPS5112656A (ja) * 1974-07-22 1976-01-31 Iwatsu Electric Co Ltd Hakumakuteikotai
GB1586857A (en) * 1977-08-30 1981-03-25 Emi Ltd Resistive films
US4454495A (en) * 1982-08-31 1984-06-12 The United States Of America As Represented By The United States Department Of Energy Layered ultra-thin coherent structures used as electrical resistors having low temperature coefficient of resistivity
DD223002A1 (de) * 1983-12-14 1985-05-29 Adw Ddr Verfahren zur herstellung von duennschichtwiderstaenden hoher praezision
US4746896A (en) * 1986-05-08 1988-05-24 North American Philips Corp. Layered film resistor with high resistance and high stability

Also Published As

Publication number Publication date
KR870011635A (ko) 1987-12-24
EP0247685A2 (de) 1987-12-02
EP0247685B1 (de) 1991-12-27
US4766411A (en) 1988-08-23
JPS6325901A (ja) 1988-02-03
EP0247685A3 (en) 1989-05-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PHILIPS ELECTRONICS NORTH AMERICA CORP., NEW YORK,

8328 Change in the person/name/address of the agent

Free format text: PEUCKERT, H., DIPL.-ING., PAT.-ASS., 20097 HAMBURG

8339 Ceased/non-payment of the annual fee