DE3680046D1 - Druckwandler mit biegbarer membran. - Google Patents

Druckwandler mit biegbarer membran.

Info

Publication number
DE3680046D1
DE3680046D1 DE8686306258T DE3680046T DE3680046D1 DE 3680046 D1 DE3680046 D1 DE 3680046D1 DE 8686306258 T DE8686306258 T DE 8686306258T DE 3680046 T DE3680046 T DE 3680046T DE 3680046 D1 DE3680046 D1 DE 3680046D1
Authority
DE
Germany
Prior art keywords
pressure converter
bendable membrane
bendable
membrane
converter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686306258T
Other languages
English (en)
Inventor
David A Broden
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rosemount Inc
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Application granted granted Critical
Publication of DE3680046D1 publication Critical patent/DE3680046D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0046—Fluidic connecting means using isolation membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0618—Overload protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0048—Details about the mounting of the diaphragm to its support or about the diaphragm edges, e.g. notches, round shapes for stress relief

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
DE8686306258T 1985-08-15 1986-08-13 Druckwandler mit biegbarer membran. Expired - Lifetime DE3680046D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/766,123 US4612812A (en) 1985-08-15 1985-08-15 Stress reducing stop for unstretched pressure sensing diaphragm

Publications (1)

Publication Number Publication Date
DE3680046D1 true DE3680046D1 (de) 1991-08-08

Family

ID=25075476

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686306258T Expired - Lifetime DE3680046D1 (de) 1985-08-15 1986-08-13 Druckwandler mit biegbarer membran.

Country Status (6)

Country Link
US (1) US4612812A (de)
EP (1) EP0212942B1 (de)
JP (1) JPH06105107B2 (de)
CA (1) CA1275823C (de)
DE (1) DE3680046D1 (de)
MY (1) MY100367A (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2614986B1 (fr) * 1987-05-07 1989-08-18 Otic Fischer & Porter Structure de cellule capacitive pour la mesure des pressions differentielles
US4905575A (en) * 1988-10-20 1990-03-06 Rosemount Inc. Solid state differential pressure sensor with overpressure stop and free edge construction
DE8815425U1 (de) * 1988-12-12 1990-04-12 Fibronix Sensoren GmbH, 2300 Kiel Überlastfester kapazitiver Drucksensor
US5157973A (en) * 1989-03-16 1992-10-27 Process Automation Business, Inc. Pressure sensor with integral overpressure protection
US4972717A (en) * 1989-09-18 1990-11-27 Texas Instruments Incorporated Pressure transducer apparatus and method for making same
US5034848A (en) * 1989-12-19 1991-07-23 Texas Instruments Incorporated Low pressure sensor
DE4206675C2 (de) * 1992-02-28 1995-04-27 Siemens Ag Verfahren zum Herstellen von Druckdifferenz-Sensoren
US5545594A (en) * 1993-10-26 1996-08-13 Yazaki Meter Co., Ltd. Semiconductor sensor anodic-bonding process, wherein bonding of corrugation is prevented
DE19608321C2 (de) * 1996-02-22 2002-01-24 Abb Patent Gmbh Differenzdruckmeßumformereinheit mit einem Überlastschutzsystem
US5760311A (en) * 1996-11-25 1998-06-02 Cal Corporation Capacitive pressure transducer with reference capacitor
DE10234754A1 (de) * 2002-07-30 2004-02-19 Endress + Hauser Gmbh + Co. Kg Differenzdrucksensor mit symmetrischem Trennkörperfehler
US7624642B2 (en) * 2007-09-20 2009-12-01 Rosemount Inc. Differential pressure sensor isolation in a process fluid pressure transmitter
US7568394B1 (en) * 2008-04-24 2009-08-04 Cardiometrix, Inc. Enhanced diaphragm for pressure sensing system and method
US8371175B2 (en) * 2009-10-01 2013-02-12 Rosemount Inc. Pressure transmitter with pressure sensor mount
US8384915B2 (en) * 2010-10-01 2013-02-26 Rosemount Inc. Test block for use in a welding process
DE102013113594A1 (de) 2013-12-06 2015-06-11 Endress + Hauser Gmbh + Co. Kg Differenzdrucksensor
US9857259B2 (en) 2014-09-30 2018-01-02 Rosemount Inc. Differential pressure sensor with high pressure capabilities
EP3356777B1 (de) 2015-09-30 2023-03-01 Rosemount Inc. Druckaufnehmer mit überdruckschutz
US10627302B2 (en) 2017-06-16 2020-04-21 Rosemount Inc. Pressure sensor module for high working pressure applications
US11371899B2 (en) 2018-05-17 2022-06-28 Rosemount Inc. Measuring element with an extended permeation resistant layer
US11041773B2 (en) * 2019-03-28 2021-06-22 Rosemount Inc. Sensor body cell of a pressure sensor
US11226253B2 (en) * 2019-12-23 2022-01-18 Rosemount Inc. High range differential pressure sensor
EP4257825A1 (de) * 2022-04-06 2023-10-11 Goodrich Corporation Membran

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3319468A (en) * 1965-02-24 1967-05-16 Hans D Baumann Differential pressure transmitter
US3793885A (en) * 1972-09-05 1974-02-26 Rosemount Inc Diaphrgam construction for differential pressure transducer
US4370890A (en) * 1980-10-06 1983-02-01 Rosemount Inc. Capacitive pressure transducer with isolated sensing diaphragm
JPS60122343A (ja) * 1983-12-06 1985-06-29 Nissan Motor Co Ltd 液圧検出器

Also Published As

Publication number Publication date
JPS6280367A (ja) 1987-04-13
CA1275823C (en) 1990-11-06
EP0212942B1 (de) 1991-07-03
EP0212942A3 (en) 1989-07-26
EP0212942A2 (de) 1987-03-04
JPH06105107B2 (ja) 1994-12-21
US4612812A (en) 1986-09-23
MY100367A (en) 1990-08-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition