DE3641688C2 - - Google Patents
Info
- Publication number
- DE3641688C2 DE3641688C2 DE3641688A DE3641688A DE3641688C2 DE 3641688 C2 DE3641688 C2 DE 3641688C2 DE 3641688 A DE3641688 A DE 3641688A DE 3641688 A DE3641688 A DE 3641688A DE 3641688 C2 DE3641688 C2 DE 3641688C2
- Authority
- DE
- Germany
- Prior art keywords
- ball
- electrode layer
- depth
- copper
- bonding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/40—Investigating hardness or rebound hardness
- G01N3/42—Investigating hardness or rebound hardness by performing impressions under a steady load by indentors, e.g. sphere, pyramid
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- Engineering & Computer Science (AREA)
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- General Health & Medical Sciences (AREA)
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Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60291084A JPS62150730A (ja) | 1985-12-24 | 1985-12-24 | 半導体装置の評価方法 |
JP61017348A JPS62174936A (ja) | 1986-01-28 | 1986-01-28 | 半導体装置の評価方法 |
Publications (2)
Publication Number | Publication Date |
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DE3641688A1 DE3641688A1 (de) | 1987-07-02 |
DE3641688C2 true DE3641688C2 (fr) | 1989-10-12 |
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Application Number | Title | Priority Date | Filing Date |
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DE19863641688 Granted DE3641688A1 (de) | 1985-12-24 | 1986-12-06 | Verfahren zur qualitaetspruefung einer elektrodenschicht eines halbleiterbauelements |
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DE (1) | DE3641688A1 (fr) |
Cited By (1)
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DE102007030951A1 (de) * | 2007-07-04 | 2009-01-08 | Fachhochschule Augsburg | Vorrichtung für die Bestimmung von mechanischen Eigenschaften eines zu untersuchenden Objekts |
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DE102013222439B4 (de) | 2013-11-05 | 2023-10-12 | F&S Bondtec Semiconductor GmbH | Messung der Nachgiebigkeit |
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1986
- 1986-12-06 DE DE19863641688 patent/DE3641688A1/de active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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DE102007030951A1 (de) * | 2007-07-04 | 2009-01-08 | Fachhochschule Augsburg | Vorrichtung für die Bestimmung von mechanischen Eigenschaften eines zu untersuchenden Objekts |
DE102007030951B4 (de) * | 2007-07-04 | 2011-05-12 | Fachhochschule Augsburg | Vorrichtung für die Bestimmung von mechanischen Eigenschaften eines zu untersuchenden Objekts |
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DE3641688A1 (de) | 1987-07-02 |
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