DE3611204C2 - - Google Patents

Info

Publication number
DE3611204C2
DE3611204C2 DE3611204A DE3611204A DE3611204C2 DE 3611204 C2 DE3611204 C2 DE 3611204C2 DE 3611204 A DE3611204 A DE 3611204A DE 3611204 A DE3611204 A DE 3611204A DE 3611204 C2 DE3611204 C2 DE 3611204C2
Authority
DE
Germany
Prior art keywords
reference mark
scanning
mark
marks
resulting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3611204A
Other languages
German (de)
English (en)
Other versions
DE3611204A1 (de
Inventor
Guenther Dr.-Ing. 8221 Bergen De Nelle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Priority to DE19863611204 priority Critical patent/DE3611204A1/de
Priority to DE8787102276T priority patent/DE3775249D1/de
Priority to AT87102276T priority patent/ATE70628T1/de
Priority to ES198787102276T priority patent/ES2027974T3/es
Priority to EP87102276A priority patent/EP0239768B1/de
Publication of DE3611204A1 publication Critical patent/DE3611204A1/de
Application granted granted Critical
Publication of DE3611204C2 publication Critical patent/DE3611204C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/366—Particular pulse shapes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Radar Systems Or Details Thereof (AREA)
  • Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
  • Paper (AREA)
  • Measurement Of Radiation (AREA)
DE19863611204 1986-04-04 1986-04-04 Messeinrichtung Granted DE3611204A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE19863611204 DE3611204A1 (de) 1986-04-04 1986-04-04 Messeinrichtung
DE8787102276T DE3775249D1 (de) 1986-04-04 1987-02-18 Messeinrichtung.
AT87102276T ATE70628T1 (de) 1986-04-04 1987-02-18 Messeinrichtung.
ES198787102276T ES2027974T3 (es) 1986-04-04 1987-02-18 Instalacion de medicion.
EP87102276A EP0239768B1 (de) 1986-04-04 1987-02-18 Messeinrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19863611204 DE3611204A1 (de) 1986-04-04 1986-04-04 Messeinrichtung

Publications (2)

Publication Number Publication Date
DE3611204A1 DE3611204A1 (de) 1987-10-15
DE3611204C2 true DE3611204C2 (US07922777-20110412-C00004.png) 1989-08-03

Family

ID=6297853

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19863611204 Granted DE3611204A1 (de) 1986-04-04 1986-04-04 Messeinrichtung
DE8787102276T Expired - Fee Related DE3775249D1 (de) 1986-04-04 1987-02-18 Messeinrichtung.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE8787102276T Expired - Fee Related DE3775249D1 (de) 1986-04-04 1987-02-18 Messeinrichtung.

Country Status (4)

Country Link
EP (1) EP0239768B1 (US07922777-20110412-C00004.png)
AT (1) ATE70628T1 (US07922777-20110412-C00004.png)
DE (2) DE3611204A1 (US07922777-20110412-C00004.png)
ES (1) ES2027974T3 (US07922777-20110412-C00004.png)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT394781B (de) * 1989-02-03 1992-06-25 Rsf Elektronik Gmbh Inkrementales messsystem
AT395071B (de) * 1989-02-09 1992-09-10 Rieder & Schwaiger Sentop Inkrementales messsystem
DE4037545C2 (de) * 1990-11-26 1994-03-17 Heidenhain Gmbh Dr Johannes Meßeinrichtung
AT410485B (de) * 1997-07-30 2003-05-26 Rsf Elektronik Gmbh Positionsmesseinrichtung
EP1003012B3 (de) 1998-11-19 2011-04-20 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung
WO2015078860A1 (en) * 2013-11-26 2015-06-04 Renishaw Plc Metrological scale

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH553960A (de) * 1973-05-14 1974-09-13 Contraves Ag Laengen oder winkel-messeinrichtung.
DE2540412B2 (de) * 1975-09-11 1979-08-02 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Inkrementales Meßsystem
DE3104972C2 (de) * 1981-02-12 1985-06-20 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Lichtelektrische inkrementale Positioniereinrichtung
DE3245914C1 (de) * 1982-12-11 1984-03-29 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Messeinrichtung
DE8307146U1 (de) * 1983-03-12 1985-10-17 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Meßeinrichtung
EP0165392B1 (de) * 1984-04-21 1988-05-25 Dr. Johannes Heidenhain GmbH Positionsmesseinrichtung

Also Published As

Publication number Publication date
EP0239768A2 (de) 1987-10-07
EP0239768A3 (en) 1989-07-19
ATE70628T1 (de) 1992-01-15
ES2027974T3 (es) 1992-07-01
DE3775249D1 (de) 1992-01-30
EP0239768B1 (de) 1991-12-18
DE3611204A1 (de) 1987-10-15

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee