DE3575582D1 - MOLECULAR RAY GENERATOR THROUGH THERMAL DECOMPOSITION FOR SEMICONDUCTOR PRODUCTION THROUGH EPITAXIAL DEPOSITION. - Google Patents

MOLECULAR RAY GENERATOR THROUGH THERMAL DECOMPOSITION FOR SEMICONDUCTOR PRODUCTION THROUGH EPITAXIAL DEPOSITION.

Info

Publication number
DE3575582D1
DE3575582D1 DE8585402240T DE3575582T DE3575582D1 DE 3575582 D1 DE3575582 D1 DE 3575582D1 DE 8585402240 T DE8585402240 T DE 8585402240T DE 3575582 T DE3575582 T DE 3575582T DE 3575582 D1 DE3575582 D1 DE 3575582D1
Authority
DE
Germany
Prior art keywords
thermal decomposition
ray generator
epitaxial deposition
semiconductor production
molecular ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8585402240T
Other languages
German (de)
Inventor
Daniel Huet
Marc Lambert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Compagnie Generale dElectricite SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Compagnie Generale dElectricite SA filed Critical Compagnie Generale dElectricite SA
Priority claimed from EP85402240A external-priority patent/EP0232436B1/en
Application granted granted Critical
Publication of DE3575582D1 publication Critical patent/DE3575582D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

DE8585402240T 1985-11-19 1985-11-19 MOLECULAR RAY GENERATOR THROUGH THERMAL DECOMPOSITION FOR SEMICONDUCTOR PRODUCTION THROUGH EPITAXIAL DEPOSITION. Expired - Lifetime DE3575582D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP85402240A EP0232436B1 (en) 1984-10-24 1985-11-19 Generator of molecular beams by thermal decomposition for the production of semiconductors by epitaxial deposition

Publications (1)

Publication Number Publication Date
DE3575582D1 true DE3575582D1 (en) 1990-03-01

Family

ID=8194552

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585402240T Expired - Lifetime DE3575582D1 (en) 1985-11-19 1985-11-19 MOLECULAR RAY GENERATOR THROUGH THERMAL DECOMPOSITION FOR SEMICONDUCTOR PRODUCTION THROUGH EPITAXIAL DEPOSITION.

Country Status (2)

Country Link
AT (1) ATE49782T1 (en)
DE (1) DE3575582D1 (en)

Also Published As

Publication number Publication date
ATE49782T1 (en) 1990-02-15

Similar Documents

Publication Publication Date Title
DE3682797D1 (en) COOLING STRUCTURE FOR SEMICONDUCTOR MODULE.
DE3685709D1 (en) SUBSTRATE STRUCTURE FOR PRODUCING A SEMICONDUCTOR CONNECTOR ARRANGEMENT.
KR890700269A (en) Semiconductor die attach system
DE3682236D1 (en) DRUM STRUCTURE FOR SEMICONDUCTOR EPITAXIS REACTOR.
DE3582480D1 (en) SEMICONDUCTOR MODULE ASSEMBLY HIGH DENSITY.
DE3684557D1 (en) WAFER-INTEGRATED SEMICONDUCTOR ARRANGEMENT.
IT8420126A0 (en) HIGH POWER MOSFET, WITH DIRECT CONNECTION FROM THE CONNECTION AREAS TO THE SILICON UNDERLYING.
IT8467374A1 (en) Heat sink for semiconductor devices.
DE3675565D1 (en) SUBSTRATE STRUCTURE FOR SEMICONDUCTOR ARRANGEMENT.
IT8349330A0 (en) METHOD FOR MANUFACTURING A SEMICONDUCTOR COMPOSITE SUBSTRATE ON INSULATION, WITH A CONTROLLED DEFENSITY-FREE PROFILE
IT8567329A1 (en) Process and device for manufacturing a gasket for motor vehicles, and gasket obtained with the process.
EP0264892A3 (en) Cooling objects, for example semiconductor devices
DE3679108D1 (en) SEMICONDUCTOR ARRANGEMENTS.
IT8423650A0 (en) SEMICONDUCTOR DEVICE FOR THE PRODUCTION OF ELECTROMAGNETIC RADIATION.
IT8419317A0 (en) PROCEDURE FOR THE PRODUCTION OF A SEMICONDUCTOR DEVICE.
IT8719199A0 (en) PROCEDURE FOR THE PRODUCTION OF PETROL.
DE3667879D1 (en) SEMICONDUCTOR ARRANGEMENT.
DE3783404D1 (en) GUIDED ACTIVATION CONNECTIONS FOR SEMICONDUCTOR ARRANGEMENTS.
DE3686383D1 (en) SEALING STRUCTURE FOR SEMICONDUCTOR COMPONENTS.
DE3686490D1 (en) SEMICONDUCTOR STRUCTURE.
IT8420726A0 (en) PROCEDURE FOR PRODUCING SEMICONDUCTOR DEVICES.
DE3689393D1 (en) Monolithic semiconductor superlattice structure.
DE68918799D1 (en) Compound semiconductor substrate.
DE3787848D1 (en) Semiconductor diode.
DE3668716D1 (en) SEMICONDUCTOR SUBSTRATE Bias Generator.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee