DE3561180D1 - Thermionic electron emitter - Google Patents

Thermionic electron emitter

Info

Publication number
DE3561180D1
DE3561180D1 DE8585300230T DE3561180T DE3561180D1 DE 3561180 D1 DE3561180 D1 DE 3561180D1 DE 8585300230 T DE8585300230 T DE 8585300230T DE 3561180 T DE3561180 T DE 3561180T DE 3561180 D1 DE3561180 D1 DE 3561180D1
Authority
DE
Germany
Prior art keywords
electron emitter
thermionic electron
thermionic
emitter
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8585300230T
Other languages
English (en)
Inventor
Heather Barbara Skinner
Richard Alan Tuck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EMI Varian Ltd
Thorn EMI Varian Ltd
Original Assignee
EMI Varian Ltd
Thorn EMI Varian Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EMI Varian Ltd, Thorn EMI Varian Ltd filed Critical EMI Varian Ltd
Application granted granted Critical
Publication of DE3561180D1 publication Critical patent/DE3561180D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
    • H01J1/28—Dispenser-type cathodes, e.g. L-cathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/14—Solid thermionic cathodes characterised by the material
    • H01J1/146—Solid thermionic cathodes characterised by the material with metals or alloys as an emissive material
DE8585300230T 1984-02-24 1985-01-14 Thermionic electron emitter Expired DE3561180D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8404943 1984-02-24

Publications (1)

Publication Number Publication Date
DE3561180D1 true DE3561180D1 (en) 1988-01-21

Family

ID=10557160

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585300230T Expired DE3561180D1 (en) 1984-02-24 1985-01-14 Thermionic electron emitter

Country Status (2)

Country Link
EP (1) EP0156454B1 (de)
DE (1) DE3561180D1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2188771B (en) * 1986-04-01 1990-12-19 Ceradyne Inc Dispenser cathode and method of manufacture therefor
DE3782543T2 (de) * 1986-06-06 1993-05-06 Toshiba Kawasaki Kk Impregnierte kathode.
GB2268325B (en) * 1992-07-01 1996-01-03 Thorn Emi Electronics Ltd Thermionic cathode structure
JP3640947B2 (ja) 2002-10-07 2005-04-20 株式会社東芝 イオン源、イオン注入装置、半導体装置の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4165473A (en) * 1976-06-21 1979-08-21 Varian Associates, Inc. Electron tube with dispenser cathode
GB2050045A (en) * 1979-05-29 1980-12-31 Emi Varian Ltd Thermionic cathode

Also Published As

Publication number Publication date
EP0156454A1 (de) 1985-10-02
EP0156454B1 (de) 1987-12-09

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee