DE3509871C2 - - Google Patents

Info

Publication number
DE3509871C2
DE3509871C2 DE3509871A DE3509871A DE3509871C2 DE 3509871 C2 DE3509871 C2 DE 3509871C2 DE 3509871 A DE3509871 A DE 3509871A DE 3509871 A DE3509871 A DE 3509871A DE 3509871 C2 DE3509871 C2 DE 3509871C2
Authority
DE
Germany
Prior art keywords
reference mark
measure
sensing device
concave mirror
sensing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3509871A
Other languages
German (de)
Other versions
DE3509871A1 (en
Inventor
Guenther Dr.-Ing. 8221 Bergen De Nelle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Priority to DE19853509871 priority Critical patent/DE3509871A1/en
Priority to EP85116417A priority patent/EP0195130B1/en
Priority to AT85116417T priority patent/ATE60948T1/en
Priority to DE8585116417T priority patent/DE3581803D1/en
Publication of DE3509871A1 publication Critical patent/DE3509871A1/en
Application granted granted Critical
Publication of DE3509871C2 publication Critical patent/DE3509871C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/366—Particular pulse shapes

Abstract

According to Figure 1 of this position measuring device (1), an optical transmitter/receiver in the form of a sensing device (4) is provided for the embodiment of a measure (2) with incremental divisions (3). The sensing device (4) has a reference mark (R) and a reference mark sensing array (RA). A datum position defining the relative position of the embodiment of a measure (2) and the sensing device (4) is indicated by a cylindrical concave mirror (5) on the embodiment of a measure (2) if the concave mirror (5) produces a complete image of the reference mark (R) on the reference mark sensing array (RA). <IMAGE>
DE19853509871 1985-03-19 1985-03-19 POSITION MEASURING DEVICE Granted DE3509871A1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE19853509871 DE3509871A1 (en) 1985-03-19 1985-03-19 POSITION MEASURING DEVICE
EP85116417A EP0195130B1 (en) 1985-03-19 1985-12-21 Position measuring device
AT85116417T ATE60948T1 (en) 1985-03-19 1985-12-21 POSITION MEASUREMENT DEVICE.
DE8585116417T DE3581803D1 (en) 1985-03-19 1985-12-21 POSITION MEASURING DEVICE.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19853509871 DE3509871A1 (en) 1985-03-19 1985-03-19 POSITION MEASURING DEVICE

Publications (2)

Publication Number Publication Date
DE3509871A1 DE3509871A1 (en) 1986-10-02
DE3509871C2 true DE3509871C2 (en) 1987-03-12

Family

ID=6265683

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19853509871 Granted DE3509871A1 (en) 1985-03-19 1985-03-19 POSITION MEASURING DEVICE
DE8585116417T Expired - Fee Related DE3581803D1 (en) 1985-03-19 1985-12-21 POSITION MEASURING DEVICE.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE8585116417T Expired - Fee Related DE3581803D1 (en) 1985-03-19 1985-12-21 POSITION MEASURING DEVICE.

Country Status (3)

Country Link
EP (1) EP0195130B1 (en)
AT (1) ATE60948T1 (en)
DE (2) DE3509871A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19516154A1 (en) * 1995-05-03 1996-11-14 Hell Ag Linotype Optical position determining arrangement for rotating objects

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994025830A1 (en) * 1993-05-01 1994-11-10 Renishaw Plc Opto-electronic scale reading apparatus
DE19726935B4 (en) * 1997-06-25 2014-06-12 Dr. Johannes Heidenhain Gmbh Optical position measuring device
EP2615425B1 (en) * 2012-01-13 2018-03-07 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Measurement system for optical touch trigger or scanning probe with a concave mirror
EP3623769A1 (en) * 2018-09-12 2020-03-18 Renishaw PLC Measurement device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1814785A1 (en) * 1968-12-14 1970-06-25 Johannes Heidenhain Feinmechan Counting arrangement
GB1525049A (en) * 1976-05-08 1978-09-20 Ferranti Ltd Displacement-indicating apparatus
DD215162B1 (en) * 1983-05-02 1988-01-06 Bernd Wieduwilt PHOTOELECTRIC TRANSMISSION-WAY AND ANGLE MEASURING SYSTEM

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19516154A1 (en) * 1995-05-03 1996-11-14 Hell Ag Linotype Optical position determining arrangement for rotating objects

Also Published As

Publication number Publication date
DE3581803D1 (en) 1991-03-28
DE3509871A1 (en) 1986-10-02
ATE60948T1 (en) 1991-03-15
EP0195130A3 (en) 1988-05-04
EP0195130B1 (en) 1991-02-20
EP0195130A2 (en) 1986-09-24

Similar Documents

Publication Publication Date Title
DE59102126D1 (en) Interferential position measuring device.
DE3465776D1 (en) Measuring apparatus
EP0566828A3 (en) Length measuring device with temperature compensation
FR2631445B1 (en) DEVICE FOR MEASURING TEMPERATURE USING A SENSOR ELEMENT
WO1998001853A3 (en) Optical scanning device, and apparatus provided with such a device
FR2650389B1 (en) DEVICE FOR MEASURING DEFORMATION OF A MEMBRANE
EP0025175A3 (en) Circuit for sensor controlled distance measurement provided with a light measuring means
FR2800565B1 (en) RELATIVE POSITION ERROR MEASURING DEVICE
DE3509871C2 (en)
EP0303008A3 (en) Incremental length or angle measuring device
EP0182394A3 (en) A method of increasing the accuracy of a length measuring system by calibrating the system against a more accurate reference system
ATE101264T1 (en) ANGLE MEASUREMENT DEVICE.
EP0157239A3 (en) Position-measuring device
ATE71717T1 (en) DEVICE FOR MEASUREMENT OF CONTACT PRESSURE AT PANTS WITH A PRESSURE SENSOR.
ES2000931A6 (en) Apparatus with a telecentric F-theta lens for a contactless measuring system, and use of said apparatus.
EP0194611A3 (en) Measuring device
EP0239768A3 (en) Measuring device measuring device
DE3681479D1 (en) VEHICLE CONTROL DEVICE.
ATE51445T1 (en) DEVICE FOR INCREMENTAL LENGTH MEASUREMENT.
FR2619909B1 (en) DEVICE FOR INCREMENTALLY MEASURING LINEAR DISPLACEMENT
FR2534016B1 (en) MEASURING DEVICE WITH DISPLACEMENT SENSOR
FR2688881B1 (en) DEVICE FOR MONITORING THE ACCURACY OF THE MEASUREMENT OF A FLUID VOLUME.
SU1049659A1 (en) Apparatus for permanent marking-out of logging cable
FR2683319B1 (en) DEVICE FOR MEASURING THE TEMPERATURE OF A SAMPLE.
FR2581200B1 (en) MONITORING DEVICE FOR A PROXIMITY SENSOR.

Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee