DE3406375A1 - Device for determining the surface profiles of non transparent material by digital evaluation of a sequence of micrographs having different focal planes - Google Patents

Device for determining the surface profiles of non transparent material by digital evaluation of a sequence of micrographs having different focal planes

Info

Publication number
DE3406375A1
DE3406375A1 DE19843406375 DE3406375A DE3406375A1 DE 3406375 A1 DE3406375 A1 DE 3406375A1 DE 19843406375 DE19843406375 DE 19843406375 DE 3406375 A DE3406375 A DE 3406375A DE 3406375 A1 DE3406375 A1 DE 3406375A1
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Germany
Prior art keywords
image
pixel
sequence
index
further characterized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19843406375
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German (de)
Inventor
Hayo Dr.-Ing. 8131 Traubing Giebel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SIGNUM COMPUTER fur SIGNALVER
Original Assignee
SIGNUM COMPUTER fur SIGNALVER
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by SIGNUM COMPUTER fur SIGNALVER filed Critical SIGNUM COMPUTER fur SIGNALVER
Priority to DE19843406375 priority Critical patent/DE3406375A1/en
Publication of DE3406375A1 publication Critical patent/DE3406375A1/en
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

In order to test the surface profile of non transparent material, e.g. in the field of workpiece inspection, a microscope which can be automatically adjusted in height is used to produce a sequence of micrographs having different focal planes, which are transmitted with the aid of a television camera into a digital evaluation unit. For each pixel, this evaluation unit determines that image number within the sequence for which the maximum absolute grey value difference with respect to the corresponding pixel of the preceding image occurs. This image number is input as index into a result image and indicates after evaluation of the entire sequence the plane of maximum sharpness for each pixel. This evaluation process requires always only two stored micrographs, the one respectively newly acquired and the preceding one. Furthermore, the maximum difference image and the index image must be stored. On the basis of the simple pixel by pixel comparison operations, an evaluation which keeps step with the television image frequency is achieved using present day technology.

Description

Beschreibung description

Gerät zur Bestimmung des Oberflächenprofils von nichttransparentem Material durch digitale Auswertung einer Sequenz von Mirkoskopbildern mit unterschiedlichen Schärfeebenen.Device for determining the surface profile of non-transparent Material through digital evaluation of a sequence of microscopic images with different Planes of sharpness.

Die Erfindung betrifft eine Anordnung nach dem Oberbegriff des Anspruchs 1, wie sie zur automatisierten Prüfung der Oberflächenbeschaffenheit von Werkstücken benötigt wird. So gibt die quantitative Vermessung des Oberflächenprofils Aufschluß darüber, ob z.B. während des Bearbeitungsvorganges eines Werkstückes bestimmte Oberflächeneigenschaften wie Rauhigeit, Riefentiefe, Tragrauhtiefe und dergl. innerhalb vorgegebener Toleranzen liegen. Das Prüfungsergebnis gibt entscheidente Hinweise darüber, ob innerhalb des Fertigungsprozesses Justagen an Bearbeitungsmaschinen, der Austausch eines Werkzeugs oder die Aussonderung des geprüften Werkstükkes erforderlich ist.The invention relates to an arrangement according to the preamble of the claim 1, as used for the automated testing of the surface quality of workpieces is needed. The quantitative measurement of the surface profile provides information whether, for example, certain surface properties during the machining process of a workpiece such as roughness, groove depth, load-bearing surface roughness and the like within specified tolerances lie. The test result provides decisive information about whether within the Manufacturing process, adjustments to processing machines, the exchange of a tool or the segregation of the tested workpiece is necessary.

Ein anderes Verfahren zur Auswertung von Mikroskopbildern mit dem Ziel, dreidimensionale Strukturen zu rekonstruieren, nutzt die Kenntnis der Ubertragungsfunktion des Mikroskopoptik. Es wird gezeigt, daß mit der Methode der Fouriertransformation eine teilweise Rekonstruktion möglich ist (Zinser, G. et al. : Erzeugung und Rekonstruktion von dreidimensionalen Lichtmikroskopischer Bilder. VDE-Fachberichte 35, Mustererkennung 1983 Karlsruhe, VDE-Verlag 1983, S. 294 -299). Another method for evaluating microscope images with the The aim of reconstructing three-dimensional structures uses knowledge of the transfer function of the microscope optics. It is shown that with the Fourier transform method partial reconstruction is possible (Zinser, G. et al.: Generation and Reconstruction of three-dimensional light microscopic images. VDE technical reports 35, pattern recognition 1983 Karlsruhe, VDE-Verlag 1983, pp. 294-299).

Der Nachteil hierbei ist jedoch darin zu sehen, daß für die Rekonstruktion mittels Fouriertransformation die gesamte Mikroskopbild-Sequenz gespeichert werden muß. Weiterhin schließt der hohe Rechenzeitbedarf einen industriellen Einsatz im Bereich der Serienprüfung aus. The disadvantage here, however, is to be seen in the fact that for the reconstruction the entire microscope image sequence can be saved by means of Fourier transformation got to. Furthermore, the high computing time requirement excludes industrial use in The area of series testing.

Der Erfindung liegt die Aufgabe zugrunde, mit einem geringen Geräteaufwand eine beliebig lange Sequenz von Mikroskopbildern zu verarbeiten. Weiterhin soll diese Verarbeitung schritthaltend mit der maximal möglichen Aufnahmegeschwindigkeit, die durch die Mechanik der Mikroskopverstellung oder durch die Fernsehbildfolgefrequenz begrenzt wird, erfolgen. Die Auswertung der Bildsequenz muß einen geringen Zeitbedarf aufweisen, um einen Einsatz in der industriellen Serienprüfung von Werkstücken zu ermöglichen. The invention is based on the object with a low outlay on equipment process a sequence of microscope images of any length. Furthermore should these Processing keeping pace with the maximum possible recording speed, by the mechanics of the microscope adjustment or by the television frame rate is limited. The evaluation of the image sequence must take a little time have to be used in the industrial series testing of workpieces enable.

Diese Aufgabe wird erfinderisch dadurch gelöst, daß bezüglich des Geräteaufwands gemäß der kennzeichnenden Merkmale nach Anspruch 1 unabhängig von der Länge der Mikroskopbild-Sequenz neben dem Maximum- und Indexbild immer nur zwei Mikroskopbilder mit benachbarten Schärfeebenen für die Berechnung gespeichert werden müssen. This object is achieved according to the invention in that with respect to the Equipment costs according to the characterizing features of claim 1 regardless of the length of the microscope image sequence, in addition to the maximum and index image, always only two Microscope images with neighboring focal planes can be saved for the calculation have to.

Aufgrund der einfachen bildpunktweisen Vergleichsoperationen, die mit heutiger Technologie schritthaltend mit der Fernsehbildfolgefrequenz ausgeführt werden können, wird eine maximale Verarbeitungsgeschwindigkeit erreicht.Due to the simple pixel-by-pixel comparison operations that executed with today's technology in step with the television frame rate maximum processing speed is achieved.

Die mit der Erfindung erzielten Vorteile bestehen insbesondere darin, daß mit geringem gerätetechnischem Aufwand eine Mikroskopbildsequenz mit beliebig vielen und beliebig genau abgestuften Schärfeebenen, soweit dies nicht durch die Eigenschaften der Mikroskopoptik und deren Verstelleinrichtung sowie durch das Kamerarauschen begrenzt wird, schritthaltend mit der Fernsehbildfolgefrequenz verarbeitet werden kann. The advantages achieved with the invention are in particular: that with little technical equipment a microscope image sequence with any many and arbitrarily precisely graduated sharpness levels, as far as this is not due to the Properties of the microscope optics and their adjustment device as well as the camera noise is limited, processed in step with the television frame rate can.

Claims (1)

Patentansprüche 1. Anordnung zur Bestimmung von Oberflächenprofilen von nichttransparentem Material, wobei eine digitale Auswertung von Mikroskopbildern in verschiedenen Schärfeebenen durchgeführt wird, dadurch gekennzeichnet, daß eine Sequenz von Mikroskopbildern mit unterschiedlichen Schärfeebenen mittels einer automatisch gesteuerte Schärfeeinstellung durch Schrittmotor oder durch einen kontinuierlichen Motorantrieb erstellt wird, ferner gekennzeichnet dadurch, daß jedes Mikroskopbild mittels einer Fersehkamera aufgezeichnet wird und in den Bildspeicher einer digitalen Verarbeitungseinheit übertragen wird, ferner gekennzeichnet dadurch, daß schritthaltend mit der sequentiellen Aufzeichnung jeweils nur das aktuell aufgezeichnete Bild mit dem vorausgehend aufgezeichneten und gespeicherten Bild verglichen wird, indem für jeden Bildpunkt die absolute Grauwertänderung bestimmt wird, ferner gekennzeichnet dadurch, daß innerhalb der Bildsequenz für jeden Bildpunkt die maximale Grauwertänderung registriert wird, ferner gekennzeichnet dadurch, daß für jeden Bildpunkt die Bildnummer, bei der diese maximale Grauwertänderung festgestellt wurde, als Index in ein Ergebnisbild ei-ngetragen wird, ferner gekennzeichnet dadurch, daß, nachdem die gesamte Bildsequenz durchlaufen wurde, für jeden Bildpunkt, dem kein Index zugewiesen werden konnte, d.h bei dem innerhalb der gesamten Bildsequenz nur eine geringe, unter einer Schwelle liegende Änderung des Grauwertes festzustellen war, der Index desjenigen Nachbarbildpunktes zugewiesen wird, der örtlich am nächsten liegt und dem bereits ein Index zugewiesen ist, ferner gekennzeichnet dadurch, daß in dem so gewonnenen Ergebnisbild für jeden Bildpunkt der entsprechende Indexwert den Ort der maximalen Schärfe parallel zur optischen Achse des Mikroskops angibt. Claims 1. Arrangement for determining surface profiles of non-transparent material, with a digital evaluation of microscope images is carried out in different focal planes, characterized in that one Sequence of microscope images with different levels of focus by means of an automatic controlled focus setting by stepper motor or by a continuous one Motor drive is created, further characterized in that each microscope image is recorded by means of a television camera and in the image memory of a digital one Processing unit is transmitted, further characterized in that in step with sequential recording, only the currently recorded image is included the previously recorded and stored image is compared by for the absolute change in gray value is determined for each pixel, further identified in that within the image sequence for each pixel the maximum change in gray value is registered, further characterized in that for each pixel the image number, at which this maximum change in gray value was determined, as an index in a result image is entered, further characterized in that, after the entire image sequence was run through for each pixel to which no index could be assigned, i.e. only a small one, below a threshold, within the entire image sequence The change in the gray value was to be determined, the index of that neighboring pixel is assigned which is the closest in location and to which an index has already been assigned is, further characterized in that in the result image thus obtained for each Pixel the corresponding index value the location of the maximum sharpness parallel to the indicating the optical axis of the microscope.
DE19843406375 1984-02-22 1984-02-22 Device for determining the surface profiles of non transparent material by digital evaluation of a sequence of micrographs having different focal planes Ceased DE3406375A1 (en)

Priority Applications (1)

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DE19843406375 DE3406375A1 (en) 1984-02-22 1984-02-22 Device for determining the surface profiles of non transparent material by digital evaluation of a sequence of micrographs having different focal planes

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DE19843406375 DE3406375A1 (en) 1984-02-22 1984-02-22 Device for determining the surface profiles of non transparent material by digital evaluation of a sequence of micrographs having different focal planes

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DE3406375A1 true DE3406375A1 (en) 1985-08-22

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19623183A1 (en) * 1996-06-11 1997-12-18 Keim Hans Joachim Method of locating even distributions of material, clusters and segregated regions of materials in workpieces
DE19941771A1 (en) * 1999-09-02 2001-03-15 Zoller Gmbh & Co Kg E Measuring single- or multi-blade cutting tools, locating tool to be measured in field of vision of camera in image processing system altering distances between camera and tool and processing readings on computer
DE19944516A1 (en) * 1999-09-16 2001-04-12 Brainlab Med Computersyst Gmbh Three dimensional shape measurement system for computer tomography set up uses successive focussing of camera on set of planes
EP1199542A2 (en) * 2000-10-13 2002-04-24 Leica Microsystems Imaging Solutions Ltd. Method and apparatus for the optical determination of a surface profile of an object
WO2003078924A2 (en) * 2002-03-18 2003-09-25 E. Zoller Gmbh & Co. Kg Method and device for detecting at least one section of a workpiece or tool
US8155426B2 (en) 2004-05-27 2012-04-10 Oy Ekspansio Engineering Ltd. Inspection of wood surface roughness
DE102018129833A1 (en) 2017-12-04 2019-06-06 Leica Microsystems Cms Gmbh Microscope system, microscope system detection unit and method for microscopically imaging a sample

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2409173A1 (en) * 1974-02-26 1975-09-04 Philips Patentverwaltung METHOD FOR APPROXIMATELY DETERMINING THE CONTOUR OF A PULSING OBJECT
DE2546070A1 (en) * 1974-10-17 1976-04-22 Westinghouse Electric Corp DIFFERENTIAL IMAGE ANALYZER
DE2949303A1 (en) * 1978-12-18 1980-06-19 Loepfe Ag Geb METHOD AND DEVICE FOR CONTINUOUSLY MEASURING THE CROSS DIMENSION OF A LENGTH-MOVING THREAD-LIKE FORM
US4435079A (en) * 1981-08-28 1984-03-06 American Optical Corporation Apparatus for testing lenses by determining best focus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2409173A1 (en) * 1974-02-26 1975-09-04 Philips Patentverwaltung METHOD FOR APPROXIMATELY DETERMINING THE CONTOUR OF A PULSING OBJECT
DE2546070A1 (en) * 1974-10-17 1976-04-22 Westinghouse Electric Corp DIFFERENTIAL IMAGE ANALYZER
DE2949303A1 (en) * 1978-12-18 1980-06-19 Loepfe Ag Geb METHOD AND DEVICE FOR CONTINUOUSLY MEASURING THE CROSS DIMENSION OF A LENGTH-MOVING THREAD-LIKE FORM
US4435079A (en) * 1981-08-28 1984-03-06 American Optical Corporation Apparatus for testing lenses by determining best focus

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Zinser, G. et al.: Erzeugung und Rekonstruktion dreidimensionaler lichtmikroskopischer Bilder, in: VDE-Fachberichte 35, Mustererkennung, 1983, Karsruhe VDE-Verlg, S. 294-299 *

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19623183A1 (en) * 1996-06-11 1997-12-18 Keim Hans Joachim Method of locating even distributions of material, clusters and segregated regions of materials in workpieces
DE19941771A1 (en) * 1999-09-02 2001-03-15 Zoller Gmbh & Co Kg E Measuring single- or multi-blade cutting tools, locating tool to be measured in field of vision of camera in image processing system altering distances between camera and tool and processing readings on computer
DE19941771B4 (en) * 1999-09-02 2010-10-21 E. Zoller GmbH & Co. KG Einstell- und Messgeräte Method for measuring single or multi-bladed cutting tools
DE19944516B4 (en) * 1999-09-16 2006-08-17 Brainlab Ag Three-dimensional shape detection with camera images
DE19944516A1 (en) * 1999-09-16 2001-04-12 Brainlab Med Computersyst Gmbh Three dimensional shape measurement system for computer tomography set up uses successive focussing of camera on set of planes
EP1199542A2 (en) * 2000-10-13 2002-04-24 Leica Microsystems Imaging Solutions Ltd. Method and apparatus for the optical determination of a surface profile of an object
EP1199542A3 (en) * 2000-10-13 2003-01-15 Leica Microsystems Imaging Solutions Ltd. Method and apparatus for the optical determination of a surface profile of an object
WO2003078924A3 (en) * 2002-03-18 2004-02-05 Zoller Gmbh & Co Kg E Method and device for detecting at least one section of a workpiece or tool
WO2003078924A2 (en) * 2002-03-18 2003-09-25 E. Zoller Gmbh & Co. Kg Method and device for detecting at least one section of a workpiece or tool
US8155426B2 (en) 2004-05-27 2012-04-10 Oy Ekspansio Engineering Ltd. Inspection of wood surface roughness
DE102018129833A1 (en) 2017-12-04 2019-06-06 Leica Microsystems Cms Gmbh Microscope system, microscope system detection unit and method for microscopically imaging a sample
WO2019110367A1 (en) 2017-12-04 2019-06-13 Leica Microsystems Cms Gmbh Microscope system, detection unit for a microscope system, and method for microscopically imaging a sample
DE102018129833B4 (en) 2017-12-04 2020-01-02 Leica Microsystems Cms Gmbh Microscope system, detection unit for microscope system and method for microscopic imaging of a sample

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