DE3404711A1 - Radiation sensor for microscopic photometry - Google Patents

Radiation sensor for microscopic photometry

Info

Publication number
DE3404711A1
DE3404711A1 DE19843404711 DE3404711A DE3404711A1 DE 3404711 A1 DE3404711 A1 DE 3404711A1 DE 19843404711 DE19843404711 DE 19843404711 DE 3404711 A DE3404711 A DE 3404711A DE 3404711 A1 DE3404711 A1 DE 3404711A1
Authority
DE
Grant status
Application
Patent type
Prior art keywords
waveguide
radiation sensor
detector
sample
photometry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19843404711
Other languages
German (de)
Inventor
Juergen Dr Schwarz
Peter Dr Baurschmidt
Gerhard Prof Dr Mueller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/58Photometry, e.g. photographic exposure meter using luminescence generated by light

Abstract

To complement, or to replace the detecting optical system normally used in microscopic photometry, use is made of a planar waveguide (6, 16) which is laid above or below the sample (4, 14) and contains fluorescent material. A detector (9, 19) is coupled to the waveguide, for example via an optical fibre (8, 18). The detector (9, 19) detects the scattered light of the sample converted in the waveguide into fluorescence radiation. <IMAGE>
DE19843404711 1984-02-10 1984-02-10 Radiation sensor for microscopic photometry Withdrawn DE3404711A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19843404711 DE3404711A1 (en) 1984-02-10 1984-02-10 Radiation sensor for microscopic photometry

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19843404711 DE3404711A1 (en) 1984-02-10 1984-02-10 Radiation sensor for microscopic photometry

Publications (1)

Publication Number Publication Date
DE3404711A1 true true DE3404711A1 (en) 1985-08-14

Family

ID=6227315

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19843404711 Withdrawn DE3404711A1 (en) 1984-02-10 1984-02-10 Radiation sensor for microscopic photometry

Country Status (1)

Country Link
DE (1) DE3404711A1 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0256310A2 (en) * 1986-08-18 1988-02-24 International Business Machines Corporation Fluorescent sensors for infrared free-space links in data communication systems
WO1988004414A1 (en) * 1986-12-08 1988-06-16 The General Electric Company, P.L.C. Radiation meters
WO1988006279A1 (en) * 1987-02-11 1988-08-25 The Secretary Of State For Defence In Her Britanni Ultraviolet radiation detector
EP0290167A2 (en) * 1987-05-02 1988-11-09 Thomas Swan And Co., Ltd. Improvements in or relating to the detection of ultraviolet radiation
DE3917571A1 (en) * 1989-05-30 1990-12-06 Sick Optik Elektronik Erwin A method for measuring intensity of scattered light and measuring device for carrying out the method
DE4317945A1 (en) * 1993-03-22 1994-09-29 Paul Dr Debbage Method and device for investigating an object

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0256310A2 (en) * 1986-08-18 1988-02-24 International Business Machines Corporation Fluorescent sensors for infrared free-space links in data communication systems
EP0256310A3 (en) * 1986-08-18 1990-03-28 International Business Machines Corporation Fluorescent sensors for infrared free-space links in data communication systems
WO1988004414A1 (en) * 1986-12-08 1988-06-16 The General Electric Company, P.L.C. Radiation meters
WO1988006279A1 (en) * 1987-02-11 1988-08-25 The Secretary Of State For Defence In Her Britanni Ultraviolet radiation detector
EP0290167A2 (en) * 1987-05-02 1988-11-09 Thomas Swan And Co., Ltd. Improvements in or relating to the detection of ultraviolet radiation
EP0290167A3 (en) * 1987-05-02 1990-11-14 Thomas Swan And Co., Ltd. Improvements in or relating to the detection of ultraviolet radiation
DE3917571A1 (en) * 1989-05-30 1990-12-06 Sick Optik Elektronik Erwin A method for measuring intensity of scattered light and measuring device for carrying out the method
DE4317945A1 (en) * 1993-03-22 1994-09-29 Paul Dr Debbage Method and device for investigating an object

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Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee