DE3377791D1 - Vapor-phase axial deposition system - Google Patents
Vapor-phase axial deposition systemInfo
- Publication number
- DE3377791D1 DE3377791D1 DE8585201655T DE3377791T DE3377791D1 DE 3377791 D1 DE3377791 D1 DE 3377791D1 DE 8585201655 T DE8585201655 T DE 8585201655T DE 3377791 T DE3377791 T DE 3377791T DE 3377791 D1 DE3377791 D1 DE 3377791D1
- Authority
- DE
- Germany
- Prior art keywords
- vapor
- deposition system
- axial deposition
- phase axial
- phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/371,628 US4417692A (en) | 1982-04-26 | 1982-04-26 | Vapor-phase axial deposition torch |
US06/371,630 US4435199A (en) | 1982-04-26 | 1982-04-26 | Exhaust system for a vapor deposition chamber |
US06/371,629 US4428762A (en) | 1982-04-26 | 1982-04-26 | Vapor-phase axial deposition system |
EP19830901859 EP0105926B1 (en) | 1982-04-26 | 1983-04-22 | Vapor-phase axial deposition system |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3377791D1 true DE3377791D1 (en) | 1988-09-29 |
Family
ID=27440597
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585201655T Expired DE3377791D1 (en) | 1982-04-26 | 1983-04-22 | Vapor-phase axial deposition system |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE3377791D1 (en) |
-
1983
- 1983-04-22 DE DE8585201655T patent/DE3377791D1/en not_active Expired
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |