DE3377791D1 - Vapor-phase axial deposition system - Google Patents

Vapor-phase axial deposition system

Info

Publication number
DE3377791D1
DE3377791D1 DE8585201655T DE3377791T DE3377791D1 DE 3377791 D1 DE3377791 D1 DE 3377791D1 DE 8585201655 T DE8585201655 T DE 8585201655T DE 3377791 T DE3377791 T DE 3377791T DE 3377791 D1 DE3377791 D1 DE 3377791D1
Authority
DE
Germany
Prior art keywords
vapor
deposition system
axial deposition
phase axial
phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8585201655T
Other languages
German (de)
Inventor
Matthew Julius Andrejco
Eugene Potkay
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
American Telephone and Telegraph Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/371,628 external-priority patent/US4417692A/en
Priority claimed from US06/371,630 external-priority patent/US4435199A/en
Priority claimed from US06/371,629 external-priority patent/US4428762A/en
Application filed by American Telephone and Telegraph Co Inc filed Critical American Telephone and Telegraph Co Inc
Priority claimed from EP19830901859 external-priority patent/EP0105926B1/en
Application granted granted Critical
Publication of DE3377791D1 publication Critical patent/DE3377791D1/en
Expired legal-status Critical Current

Links

DE8585201655T 1982-04-26 1983-04-22 Vapor-phase axial deposition system Expired DE3377791D1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US06/371,628 US4417692A (en) 1982-04-26 1982-04-26 Vapor-phase axial deposition torch
US06/371,630 US4435199A (en) 1982-04-26 1982-04-26 Exhaust system for a vapor deposition chamber
US06/371,629 US4428762A (en) 1982-04-26 1982-04-26 Vapor-phase axial deposition system
EP19830901859 EP0105926B1 (en) 1982-04-26 1983-04-22 Vapor-phase axial deposition system

Publications (1)

Publication Number Publication Date
DE3377791D1 true DE3377791D1 (en) 1988-09-29

Family

ID=27440597

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585201655T Expired DE3377791D1 (en) 1982-04-26 1983-04-22 Vapor-phase axial deposition system

Country Status (1)

Country Link
DE (1) DE3377791D1 (en)

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee