DE3373708D1 - Low voltage field emission electron gun - Google Patents
Low voltage field emission electron gunInfo
- Publication number
- DE3373708D1 DE3373708D1 DE8383902720T DE3373708T DE3373708D1 DE 3373708 D1 DE3373708 D1 DE 3373708D1 DE 8383902720 T DE8383902720 T DE 8383902720T DE 3373708 T DE3373708 T DE 3373708T DE 3373708 D1 DE3373708 D1 DE 3373708D1
- Authority
- DE
- Germany
- Prior art keywords
- low voltage
- field emission
- electron gun
- emission electron
- voltage field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Cold Cathode And The Manufacture (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/404,398 US4427886A (en) | 1982-08-02 | 1982-08-02 | Low voltage field emission electron gun |
PCT/US1983/001162 WO1984000610A1 (en) | 1982-08-02 | 1983-07-29 | Low voltage field emission electron gun |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3373708D1 true DE3373708D1 (en) | 1987-10-22 |
Family
ID=23599440
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8383902720T Expired DE3373708D1 (en) | 1982-08-02 | 1983-07-29 | Low voltage field emission electron gun |
Country Status (6)
Country | Link |
---|---|
US (1) | US4427886A (de) |
EP (1) | EP0116083B1 (de) |
JP (1) | JPS59501604A (de) |
CA (1) | CA1197928A (de) |
DE (1) | DE3373708D1 (de) |
WO (1) | WO1984000610A1 (de) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4588928A (en) * | 1983-06-15 | 1986-05-13 | At&T Bell Laboratories | Electron emission system |
DE3332549A1 (de) * | 1983-09-09 | 1985-03-28 | Fa. Carl Zeiss, 7920 Heidenheim | Verfahren und vorrichtung zur vermeidung von kathodenschaeden beim einschalten von feldemissionsstrahlern |
US4725736A (en) * | 1986-08-11 | 1988-02-16 | Electron Beam Memories | Electrostatic electron gun with integrated electron beam deflection and/or stigmating system |
US4760567A (en) * | 1986-08-11 | 1988-07-26 | Electron Beam Memories | Electron beam memory system with ultra-compact, high current density electron gun |
JPH0640475B2 (ja) * | 1988-01-25 | 1994-05-25 | 日本電子株式会社 | 電界放出型電子銃 |
EP0366851B1 (de) * | 1988-11-01 | 1994-02-16 | International Business Machines Corporation | Niederspannungsquelle für schmale Elektronen-/Ionenstrahlenbündel |
DE3930200A1 (de) * | 1989-09-09 | 1991-03-14 | Ptr Praezisionstech Gmbh | Elektronenstrahlerzeuger, insbesondere fuer eine elektronenstrahlkanone |
US5155412A (en) * | 1991-05-28 | 1992-10-13 | International Business Machines Corporation | Method for selectively scaling a field emission electron gun and device formed thereby |
JP4093590B2 (ja) * | 1994-10-03 | 2008-06-04 | エフイーアイ カンパニー | 針及び隔膜のような抽出電極を有する電子源を具えている粒子光学装置 |
US5557596A (en) * | 1995-03-20 | 1996-09-17 | Gibson; Gary | Ultra-high density storage device |
US5727978A (en) * | 1995-12-19 | 1998-03-17 | Advanced Micro Devices, Inc. | Method of forming electron beam emitting tungsten filament |
US5831272A (en) * | 1997-10-21 | 1998-11-03 | Utsumi; Takao | Low energy electron beam lithography |
WO2000016372A1 (fr) * | 1998-09-11 | 2000-03-23 | Japan Science And Technology Corporation | Appareil de diffraction d'electrons a haute energie |
US6077417A (en) * | 1998-11-19 | 2000-06-20 | Etec Systems, Inc. | Silicon microlens cleaning system |
US6555830B1 (en) * | 2000-08-15 | 2003-04-29 | Applied Materials, Inc. | Suppression of emission noise for microcolumn applications in electron beam inspection |
US6507552B2 (en) | 2000-12-01 | 2003-01-14 | Hewlett-Packard Company | AFM version of diode-and cathodoconductivity-and cathodoluminescence-based data storage media |
US20020095680A1 (en) * | 2001-01-12 | 2002-07-18 | Davidson Robert J. | Personal movie storage module |
US7170842B2 (en) * | 2001-02-15 | 2007-01-30 | Hewlett-Packard Development Company, L.P. | Methods for conducting current between a scanned-probe and storage medium |
US6791931B2 (en) | 2001-03-16 | 2004-09-14 | Hewlett-Packard Development Company, L.P. | Accelerometer using field emitter technology |
US20030081532A1 (en) * | 2001-10-30 | 2003-05-01 | Gibson Gary A. | Supplementary energy sources for atomic resolution storage memory devices |
US7102983B2 (en) * | 2001-10-30 | 2006-09-05 | Hewlett-Packard Development Company, L.P. | Current divider-based storage medium |
JP4261806B2 (ja) * | 2002-02-15 | 2009-04-30 | 株式会社日立ハイテクノロジーズ | 電子線装置及びその高電圧放電防止方法 |
EP1760762B1 (de) * | 2005-09-06 | 2012-02-01 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Vorrichtung und Verfahren zur Auswahl einer Emissionsfläche einer Emissionsstruktur |
US8642959B2 (en) * | 2007-10-29 | 2014-02-04 | Micron Technology, Inc. | Method and system of performing three-dimensional imaging using an electron microscope |
US8957394B2 (en) * | 2011-11-29 | 2015-02-17 | Kla-Tencor Corporation | Compact high-voltage electron gun |
US8810161B2 (en) | 2011-12-29 | 2014-08-19 | Elwha Llc | Addressable array of field emission devices |
US9171690B2 (en) | 2011-12-29 | 2015-10-27 | Elwha Llc | Variable field emission device |
US8575842B2 (en) | 2011-12-29 | 2013-11-05 | Elwha Llc | Field emission device |
US8928228B2 (en) | 2011-12-29 | 2015-01-06 | Elwha Llc | Embodiments of a field emission device |
US9349562B2 (en) | 2011-12-29 | 2016-05-24 | Elwha Llc | Field emission device with AC output |
US9018861B2 (en) | 2011-12-29 | 2015-04-28 | Elwha Llc | Performance optimization of a field emission device |
US8810131B2 (en) | 2011-12-29 | 2014-08-19 | Elwha Llc | Field emission device with AC output |
US8970113B2 (en) | 2011-12-29 | 2015-03-03 | Elwha Llc | Time-varying field emission device |
US8946992B2 (en) | 2011-12-29 | 2015-02-03 | Elwha Llc | Anode with suppressor grid |
US9646798B2 (en) | 2011-12-29 | 2017-05-09 | Elwha Llc | Electronic device graphene grid |
US8692226B2 (en) | 2011-12-29 | 2014-04-08 | Elwha Llc | Materials and configurations of a field emission device |
JP6278897B2 (ja) * | 2011-12-29 | 2018-02-14 | エルファー エルエルシー | 電界放出デバイスのための装置と方法 |
US9659735B2 (en) | 2012-09-12 | 2017-05-23 | Elwha Llc | Applications of graphene grids in vacuum electronics |
US9659734B2 (en) | 2012-09-12 | 2017-05-23 | Elwha Llc | Electronic device multi-layer graphene grid |
DE102015207484B4 (de) | 2015-04-23 | 2022-11-03 | Carl Zeiss Microscopy Gmbh | Hochspannungsversorgungseinheit und Schaltungsanordnung zur Erzeugung einer Hochspannung für ein Teilchenstrahlgerät sowie Teilchenstrahlgerät |
DE102016124673B3 (de) * | 2016-12-16 | 2018-05-30 | Ketek Gmbh | Vorrichtung zur Erzeugung eines Quellenstroms von Ladungsträgern mittels Feldemission und Verfahren zur Stabilisierung eines mittels eines Feldemissionselements emittierten Quellenstroms von Ladungsträgern |
JP6943701B2 (ja) * | 2017-09-15 | 2021-10-06 | 日本電子株式会社 | 冷陰極電界放出型電子銃の調整方法 |
RU2718693C1 (ru) * | 2019-05-07 | 2020-04-13 | Акционерное общество "Концерн "Созвездие" | Электронная пушка с автоэмиссионным катодом |
JP7523668B2 (ja) * | 2021-03-19 | 2024-07-26 | デンカ株式会社 | エミッター及びこれを備える装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3355618A (en) * | 1965-10-21 | 1967-11-28 | Rca Corp | Electron gun for use in a cathode ray tube exhibiting enhanced electron emission |
JPS5217392B1 (de) * | 1970-09-18 | 1977-05-14 | ||
US3863095A (en) * | 1971-04-12 | 1975-01-28 | Hitachi Ltd | Electron gun device of field emission type |
US3931517A (en) * | 1972-02-14 | 1976-01-06 | American Optical Corporation | Field emission electron gun |
US3925664A (en) * | 1972-02-14 | 1975-12-09 | American Optical Corp | Field emission electron gun |
US3927321A (en) * | 1974-04-24 | 1975-12-16 | American Optical Corp | Electron microscope beam tube |
-
1982
- 1982-08-02 US US06/404,398 patent/US4427886A/en not_active Expired - Fee Related
-
1983
- 1983-07-28 CA CA000433491A patent/CA1197928A/en not_active Expired
- 1983-07-29 JP JP58502813A patent/JPS59501604A/ja active Pending
- 1983-07-29 DE DE8383902720T patent/DE3373708D1/de not_active Expired
- 1983-07-29 WO PCT/US1983/001162 patent/WO1984000610A1/en active IP Right Grant
- 1983-07-29 EP EP83902720A patent/EP0116083B1/de not_active Expired
Also Published As
Publication number | Publication date |
---|---|
EP0116083B1 (de) | 1987-09-16 |
CA1197928A (en) | 1985-12-10 |
EP0116083A1 (de) | 1984-08-22 |
WO1984000610A1 (en) | 1984-02-16 |
US4427886A (en) | 1984-01-24 |
EP0116083A4 (de) | 1985-02-18 |
JPS59501604A (ja) | 1984-09-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |