DE3373708D1 - Low voltage field emission electron gun - Google Patents

Low voltage field emission electron gun

Info

Publication number
DE3373708D1
DE3373708D1 DE8383902720T DE3373708T DE3373708D1 DE 3373708 D1 DE3373708 D1 DE 3373708D1 DE 8383902720 T DE8383902720 T DE 8383902720T DE 3373708 T DE3373708 T DE 3373708T DE 3373708 D1 DE3373708 D1 DE 3373708D1
Authority
DE
Germany
Prior art keywords
low voltage
field emission
electron gun
emission electron
voltage field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383902720T
Other languages
English (en)
Inventor
Joe Martin
Max Lagally
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wisconsin Alumni Research Foundation
Original Assignee
Wisconsin Alumni Research Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wisconsin Alumni Research Foundation filed Critical Wisconsin Alumni Research Foundation
Application granted granted Critical
Publication of DE3373708D1 publication Critical patent/DE3373708D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Cold Cathode And The Manufacture (AREA)
DE8383902720T 1982-08-02 1983-07-29 Low voltage field emission electron gun Expired DE3373708D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/404,398 US4427886A (en) 1982-08-02 1982-08-02 Low voltage field emission electron gun
PCT/US1983/001162 WO1984000610A1 (en) 1982-08-02 1983-07-29 Low voltage field emission electron gun

Publications (1)

Publication Number Publication Date
DE3373708D1 true DE3373708D1 (en) 1987-10-22

Family

ID=23599440

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383902720T Expired DE3373708D1 (en) 1982-08-02 1983-07-29 Low voltage field emission electron gun

Country Status (6)

Country Link
US (1) US4427886A (de)
EP (1) EP0116083B1 (de)
JP (1) JPS59501604A (de)
CA (1) CA1197928A (de)
DE (1) DE3373708D1 (de)
WO (1) WO1984000610A1 (de)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4588928A (en) * 1983-06-15 1986-05-13 At&T Bell Laboratories Electron emission system
DE3332549A1 (de) * 1983-09-09 1985-03-28 Fa. Carl Zeiss, 7920 Heidenheim Verfahren und vorrichtung zur vermeidung von kathodenschaeden beim einschalten von feldemissionsstrahlern
US4760567A (en) * 1986-08-11 1988-07-26 Electron Beam Memories Electron beam memory system with ultra-compact, high current density electron gun
US4725736A (en) * 1986-08-11 1988-02-16 Electron Beam Memories Electrostatic electron gun with integrated electron beam deflection and/or stigmating system
JPH0640475B2 (ja) * 1988-01-25 1994-05-25 日本電子株式会社 電界放出型電子銃
DE3887891T2 (de) * 1988-11-01 1994-08-11 Ibm Niederspannungsquelle für schmale Elektronen-/Ionenstrahlenbündel.
DE3930200A1 (de) * 1989-09-09 1991-03-14 Ptr Praezisionstech Gmbh Elektronenstrahlerzeuger, insbesondere fuer eine elektronenstrahlkanone
US5155412A (en) * 1991-05-28 1992-10-13 International Business Machines Corporation Method for selectively scaling a field emission electron gun and device formed thereby
JP4093590B2 (ja) * 1994-10-03 2008-06-04 エフイーアイ カンパニー 針及び隔膜のような抽出電極を有する電子源を具えている粒子光学装置
US5557596A (en) * 1995-03-20 1996-09-17 Gibson; Gary Ultra-high density storage device
US5727978A (en) * 1995-12-19 1998-03-17 Advanced Micro Devices, Inc. Method of forming electron beam emitting tungsten filament
US5831272A (en) * 1997-10-21 1998-11-03 Utsumi; Takao Low energy electron beam lithography
EP1113482B1 (de) * 1998-09-11 2010-05-05 Japan Science and Technology Agency Hochenergie elektronen beugungsgerät
US6077417A (en) * 1998-11-19 2000-06-20 Etec Systems, Inc. Silicon microlens cleaning system
US6555830B1 (en) * 2000-08-15 2003-04-29 Applied Materials, Inc. Suppression of emission noise for microcolumn applications in electron beam inspection
US6507552B2 (en) 2000-12-01 2003-01-14 Hewlett-Packard Company AFM version of diode-and cathodoconductivity-and cathodoluminescence-based data storage media
US20020095680A1 (en) * 2001-01-12 2002-07-18 Davidson Robert J. Personal movie storage module
US7170842B2 (en) * 2001-02-15 2007-01-30 Hewlett-Packard Development Company, L.P. Methods for conducting current between a scanned-probe and storage medium
US6791931B2 (en) 2001-03-16 2004-09-14 Hewlett-Packard Development Company, L.P. Accelerometer using field emitter technology
US20030081532A1 (en) * 2001-10-30 2003-05-01 Gibson Gary A. Supplementary energy sources for atomic resolution storage memory devices
US7102983B2 (en) * 2001-10-30 2006-09-05 Hewlett-Packard Development Company, L.P. Current divider-based storage medium
JP4261806B2 (ja) * 2002-02-15 2009-04-30 株式会社日立ハイテクノロジーズ 電子線装置及びその高電圧放電防止方法
EP1760762B1 (de) * 2005-09-06 2012-02-01 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Vorrichtung und Verfahren zur Auswahl einer Emissionsfläche einer Emissionsstruktur
US8642959B2 (en) * 2007-10-29 2014-02-04 Micron Technology, Inc. Method and system of performing three-dimensional imaging using an electron microscope
US8957394B2 (en) * 2011-11-29 2015-02-17 Kla-Tencor Corporation Compact high-voltage electron gun
US8810131B2 (en) 2011-12-29 2014-08-19 Elwha Llc Field emission device with AC output
US8692226B2 (en) 2011-12-29 2014-04-08 Elwha Llc Materials and configurations of a field emission device
US8970113B2 (en) 2011-12-29 2015-03-03 Elwha Llc Time-varying field emission device
US8575842B2 (en) 2011-12-29 2013-11-05 Elwha Llc Field emission device
US9646798B2 (en) 2011-12-29 2017-05-09 Elwha Llc Electronic device graphene grid
US9349562B2 (en) 2011-12-29 2016-05-24 Elwha Llc Field emission device with AC output
US9171690B2 (en) 2011-12-29 2015-10-27 Elwha Llc Variable field emission device
US8810161B2 (en) 2011-12-29 2014-08-19 Elwha Llc Addressable array of field emission devices
US8946992B2 (en) 2011-12-29 2015-02-03 Elwha Llc Anode with suppressor grid
US9018861B2 (en) 2011-12-29 2015-04-28 Elwha Llc Performance optimization of a field emission device
WO2013101948A1 (en) * 2011-12-29 2013-07-04 Elwha Llc Materials and configurations of a field emission device
US8928228B2 (en) 2011-12-29 2015-01-06 Elwha Llc Embodiments of a field emission device
US9659735B2 (en) 2012-09-12 2017-05-23 Elwha Llc Applications of graphene grids in vacuum electronics
US9659734B2 (en) 2012-09-12 2017-05-23 Elwha Llc Electronic device multi-layer graphene grid
DE102015207484B4 (de) * 2015-04-23 2022-11-03 Carl Zeiss Microscopy Gmbh Hochspannungsversorgungseinheit und Schaltungsanordnung zur Erzeugung einer Hochspannung für ein Teilchenstrahlgerät sowie Teilchenstrahlgerät
DE102016124673B3 (de) * 2016-12-16 2018-05-30 Ketek Gmbh Vorrichtung zur Erzeugung eines Quellenstroms von Ladungsträgern mittels Feldemission und Verfahren zur Stabilisierung eines mittels eines Feldemissionselements emittierten Quellenstroms von Ladungsträgern
JP6943701B2 (ja) * 2017-09-15 2021-10-06 日本電子株式会社 冷陰極電界放出型電子銃の調整方法
RU2718693C1 (ru) * 2019-05-07 2020-04-13 Акционерное общество "Концерн "Созвездие" Электронная пушка с автоэмиссионным катодом

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3355618A (en) * 1965-10-21 1967-11-28 Rca Corp Electron gun for use in a cathode ray tube exhibiting enhanced electron emission
JPS5217392B1 (de) * 1970-09-18 1977-05-14
US3863095A (en) * 1971-04-12 1975-01-28 Hitachi Ltd Electron gun device of field emission type
US3931517A (en) * 1972-02-14 1976-01-06 American Optical Corporation Field emission electron gun
US3925664A (en) * 1972-02-14 1975-12-09 American Optical Corp Field emission electron gun
US3927321A (en) * 1974-04-24 1975-12-16 American Optical Corp Electron microscope beam tube

Also Published As

Publication number Publication date
EP0116083A4 (de) 1985-02-18
CA1197928A (en) 1985-12-10
WO1984000610A1 (en) 1984-02-16
JPS59501604A (ja) 1984-09-06
EP0116083B1 (de) 1987-09-16
US4427886A (en) 1984-01-24
EP0116083A1 (de) 1984-08-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee