DE3232953A1 - Light-deflecting device for deflecting in the x- and y-directions by means of mirrors - Google Patents

Abstract

The heretofore spatially separated deflecting mirrors have not been adequate for the complete exploitation of a flat-field scanning lens, i.e. its freedom from distortion, processing field size and beam diameter. The complete exploitation of such a lens is achieved by means of deflection in the x- and y-directions using a mirror which is mounted about a centre point. Moreover, completely symmetrical imaging characteristics are produced in all other light-deflecting systems which deflect in the x- and y-directions. <IMAGE>

Description

description

Light deflection device for the deflection in the x and y directions by means of Mirroring The invention relates to a light deflection device for the deflection in x- and y-direction by means of mirroring.

There are light deflection devices are known in which the x and the y-deflection with the help of two mirrors, each rotatably mounted on one axis is made. A third, rigidly attached auxiliary mirror is often necessary.

(a, book, Guide for material processing by lasers; Laser Institute of America; The Paul M. Harrod Company, Baltimore 2nd Edition 1978; p 8-43 and 8-49.

b, prospectus, General Scanning Inc; Introduction sheet-xy Optical Scanners; Watertown, Mass 02172; p 2.

c, Prospectus, Chicago Laser Systems Inc .; Chicago Laser Systems Inc.

providing practical solutions to net work trimming problems; UNITED STATES.

1980; p 7.) With the known deflection systems it is not possible to a flatfield-scanni-ng-lens-system to make full use, since these systems for exactly one Mirror spacing are corrected. By using two, necessarily spatial separate mirrors there is an additional barrel or Pincushion distortion.

Due to the deflection of the first mirror, the second must follow one Mirror be bigger. The theoretically achievable processing field size can also be cannot be used in one direction without strong distortions. Furthermore With these arrangements, the maximum permissible beam diameter cannot be increased by the full permissible deflection angle or must be deflected with the same beam power a worsening of the beam divergence (directly proportional to the focusability) be accepted.

The object of the present invention is to provide a light deflecting device to create a distortion-free lens system with a corrected lens system Image can be achieved with a larger beam diameter adapted to the objective system and thus smaller beam divergence can be operated and larger processing surfaces allows.

Furthermore, this light deflection device should be used for any other use a fully symmetrical mapping should be possible. In addition, all light deflection devices, which deflect in two axes can be replaced by this invention.

This object is achieved in that only a single deflecting mirror is provided.

The advantages achieved with the invention are in particular: that a fully symmetrical, distortion-free image is possible: larger beam diameters and thus beams of smaller divergence and higher power can be deflected and larger edit fields can be reached.

An embodiment of the invention is shown in the drawing and is described in more detail below.

The figure shows a perspective view of the light deflection system.

In the middle is the deflection mirror (1) for the respective Wavelength on its front surface (20) has dielectric interference layers or as a broadband mirror. Again, this can be done with dielectric or done with metal layers.

When using dielectric interference layers, the Mirror still selected for a certain deflection range, e.g. B. 450 deflection + 12.5 Deflection range in order to obtain favorable reflection properties. To the mirror are now on all 4 outer surfaces (24) opposite each other and in the connecting line the center point (21) intersecting the bearing holders (2 and 3) and the bearing pins (10 and 11), (also bearing balls, bearing points or bearing bolts) attached.

In the figure, a game gel (1) is shown the two bearing holders (2) with bearing pins (10) and two bearing holders (3) with bearing balls (11). the Bearing pins (10) are now stored in the bearing blocks (4) (e.g. watch stones). The bearing blocks (4) are mechanically connected to a U-profile (6). It can also a semicircle or other suitable geometric shape can be used. the The connecting line of the two bearing pins (10) forms a straight line through the center point (21) of the mirror (1). The center point is perpendicular to this straight line and in the extension (21) cutting a hole (7) is made in the U-profile (6). Through this Bore (7) is now attached to a shaft (8). This shaft (8) is z. B. in one Galvanometer scanner, in turn, extends the center (21) of the mirror (1) cutting, stored. This wave (8) can now through an electromagnetic Field rotated clockwise or counterclockwise by a defined amount will. With this arrangement, the deflecting mirror (1) can now be rotated about an axis The movement around the axis is measured by means of a second galvanometer scanner controlled.

The mechanical structure is carried out as follows: The two now remaining Bearings (3) with bearing balls (11) are perpendicular to the bearing pins (10) mirror-free taken in a spherical half-shell (5). (Instead of balls, bearing pins can also be used used and connected to one another by means of a semicircular profile. The movement then takes place by rolling a wave on the semicircle with the support of tensioned metal straps in order to avoid slippage.) a rod (9) is attached. On the linkage (9) is at equal intervals of the spherical half-shells (5) a hole (12) is attached perpendicular to the bearing axis. A bearing (22) is placed in each of these bores (12). Through these camps (22) an axle (23) is inserted into each of the ends in the bearings (13) a kind of fork (14) are taken. The two forks (14) are mechanically with one Rod (16) connected. This rod (16) has a hole (15) in the middle vertically below the center point (21) of the mirror (1) or offset in parallel in each case at a distance (spherical shell (5) - bore (12)) of the two rods (9) through one shaft (17) is inserted perpendicular to the rod (16) and firmly connected. By Turning on this shaft (17) the mirror (1) moves around its Center (21) exactly at the same angle as the shaft (parallelogram displacement). This shaft (17) can now be mounted in a galvanometer scanner.

By changing the electromagnetic field in the galvanometer scanner this shaft (17) can be deflected by a certain amount. Now he can Mirror (1) rotated independently in the x and y directions about its center point (21) will. The basic mechanical position of the mirror (1) is like this. that a ray of light is steered by the deflection in the center of the processing field. Included the rod (9) with the spherical shells (5) is perpendicular to the mirror surface (20), since only from this position the angular deflection in the plus and minus direction allows equal amounts. Any other basic position can be used for special cases will. This suspension of an x-y deflection system, shown in the figure, can a fully symmetrical processing field can now always be achieved, regardless of whether the arrangement in front of a lens, behind a lens or without any additional optical components is used. Blank page

Claims (5)

Claims 1. Light deflection device for the deflection in x and y-direction by means of mirrors, characterized in that a single deflecting mirror is provided. 2. Light deflection device according to claim 1, characterized that the deflection mirror is rotatably mounted about the point at which the optical axis hits the mirror. 3. light deflection device according to claim 1, characterized in that that the mirror is gimbaled. 4. light deflection device according to claim 1, characterized in that that the distraction is mechanical, electrical. takes place electromagnetically, hydraulically or pneumatically. 5. light deflection device according to claim 1, characterized in that that the mirror moves with the help of two galvanometer scanners over a linkage will.