DE3174542D1 - Centrifugal wafer processor - Google Patents
Centrifugal wafer processorInfo
- Publication number
- DE3174542D1 DE3174542D1 DE8181900893T DE3174542T DE3174542D1 DE 3174542 D1 DE3174542 D1 DE 3174542D1 DE 8181900893 T DE8181900893 T DE 8181900893T DE 3174542 T DE3174542 T DE 3174542T DE 3174542 D1 DE3174542 D1 DE 3174542D1
- Authority
- DE
- Germany
- Prior art keywords
- wafer processor
- centrifugal wafer
- centrifugal
- processor
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/127,660 US4300581A (en) | 1980-03-06 | 1980-03-06 | Centrifugal wafer processor |
PCT/US1981/000257 WO1981002533A1 (en) | 1980-03-06 | 1981-02-27 | Centrifugal wafer processor |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3174542D1 true DE3174542D1 (en) | 1986-06-12 |
Family
ID=26764362
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8181900893T Expired DE3174542D1 (en) | 1980-03-06 | 1981-02-27 | Centrifugal wafer processor |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE3174542D1 (en) |
-
1981
- 1981-02-27 DE DE8181900893T patent/DE3174542D1/en not_active Expired
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |