DE3174542D1 - Centrifugal wafer processor - Google Patents

Centrifugal wafer processor

Info

Publication number
DE3174542D1
DE3174542D1 DE8181900893T DE3174542T DE3174542D1 DE 3174542 D1 DE3174542 D1 DE 3174542D1 DE 8181900893 T DE8181900893 T DE 8181900893T DE 3174542 T DE3174542 T DE 3174542T DE 3174542 D1 DE3174542 D1 DE 3174542D1
Authority
DE
Germany
Prior art keywords
wafer processor
centrifugal wafer
centrifugal
processor
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8181900893T
Other languages
German (de)
Inventor
Raymon F Thompson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semitool Inc
Original Assignee
Semitool Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/127,660 external-priority patent/US4300581A/en
Application filed by Semitool Inc filed Critical Semitool Inc
Application granted granted Critical
Publication of DE3174542D1 publication Critical patent/DE3174542D1/en
Expired legal-status Critical Current

Links

DE8181900893T 1980-03-06 1981-02-27 Centrifugal wafer processor Expired DE3174542D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/127,660 US4300581A (en) 1980-03-06 1980-03-06 Centrifugal wafer processor
PCT/US1981/000257 WO1981002533A1 (en) 1980-03-06 1981-02-27 Centrifugal wafer processor

Publications (1)

Publication Number Publication Date
DE3174542D1 true DE3174542D1 (en) 1986-06-12

Family

ID=26764362

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8181900893T Expired DE3174542D1 (en) 1980-03-06 1981-02-27 Centrifugal wafer processor

Country Status (1)

Country Link
DE (1) DE3174542D1 (en)

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition