DE3014328C2 - Device for modulating the optical transmittance of a beam path - Google Patents

Device for modulating the optical transmittance of a beam path

Info

Publication number
DE3014328C2
DE3014328C2 DE3014328A DE3014328A DE3014328C2 DE 3014328 C2 DE3014328 C2 DE 3014328C2 DE 3014328 A DE3014328 A DE 3014328A DE 3014328 A DE3014328 A DE 3014328A DE 3014328 C2 DE3014328 C2 DE 3014328C2
Authority
DE
Germany
Prior art keywords
modulation element
piezoelectric material
modulating
beam path
path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3014328A
Other languages
German (de)
Other versions
DE3014328A1 (en
Inventor
Siegfried 5177 Titz Berger
Karl H. Dipl.-Phys. 5170 Jülich Besocke
Karl 5170 Jülich Boden
Johan K. Dipl.-Phys. Dr. 5300 Bonn Fremerey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
Original Assignee
Kernforschungsanlage Juelich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungsanlage Juelich GmbH filed Critical Kernforschungsanlage Juelich GmbH
Priority to DE3014328A priority Critical patent/DE3014328C2/en
Priority to GB8110247A priority patent/GB2076173B/en
Priority to CH2419/81A priority patent/CH653141A5/en
Priority to FR8107373A priority patent/FR2480446B1/en
Priority to CA000375403A priority patent/CA1175499A/en
Priority to SE8102415A priority patent/SE8102415L/en
Priority to ZA00812462A priority patent/ZA812462B/en
Priority to AU69495/81A priority patent/AU542586B2/en
Priority to JP5569981A priority patent/JPS56154703A/en
Publication of DE3014328A1 publication Critical patent/DE3014328A1/en
Application granted granted Critical
Publication of DE3014328C2 publication Critical patent/DE3014328C2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0403—Mechanical elements; Supports for optical elements; Scanning arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/044—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using shutters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
    • G01J1/20—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void intensity of the measured or reference value being varied to equalise their effects at the detectors, e.g. by varying incidence angle
    • G01J1/34—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void intensity of the measured or reference value being varied to equalise their effects at the detectors, e.g. by varying incidence angle using separate light paths used alternately or sequentially, e.g. flicker
    • G01J1/36—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void intensity of the measured or reference value being varied to equalise their effects at the detectors, e.g. by varying incidence angle using separate light paths used alternately or sequentially, e.g. flicker using electric radiation detectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G02B26/04—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light by periodically varying the intensity of light, e.g. using choppers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0488—Optical or mechanical part supplementary adjustable parts with spectral filtering

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

Die Erfindung bezieht sich auf eine Vorrichtung zur Modulation der optischen Durchlaessigkeit eines Strahlenganges, insbesondere einer Lichtstrecke. Es sind eine Reihe von Vorrichtungen der genannten Art bekannt (Kerr-Zellen, rotierende Spiegel), die aber Nachteile haben. Die Erfindung hat sich insbesondere die Aufgabe gestellt, eine Vorrichtung der eingangs genannten Art zu schaffen, die sich auszeichnet durch hohe Lebenserwartung, geringe Antriebsleistung, hohe Wartungsfreiheit, gefahrlose Anwendung, gute Frequenzkonstanz, M!glichkeit der Amplitudenvariation, geringes Gewicht, einfachen Aufbau und geringe Herstellungspreise. Die Erfindung ist dadurch gekennzeichnet, dass wenigstens ein piezoelektrisches Schwingelement vorgesehen ist, mittels dessen jeweils mindestens ein Modulationselement periodisch im Gang des Strahles bewegbar ist. mungskanaelen fuer Heissgas und aufzuheizendes Medium, die ebeThe invention relates to a device for modulating the optical transmittance of a beam path, in particular a light path. A number of devices of the type mentioned are known (Kerr cells, rotating mirrors), but they have disadvantages. The invention has set itself the task of creating a device of the type mentioned, which is characterized by long life expectancy, low drive power, high maintenance-free, safe use, good frequency constancy, possibility of amplitude variation, low weight, simple structure and low Manufacturing prices. The invention is characterized in that at least one piezoelectric oscillating element is provided, by means of which at least one modulation element can be periodically moved in the path of the beam. flow channels for hot gas and medium to be heated, the same

Description

3535

Die Erfindung betrifft eine Vw ichtung zur Modulation der optischen Durchlässigkeit -;ines Sirahienganges, insbesondere einer Lichtstrecke, mit einem mittels piezoelektrischem Material angetriebenen und periodisch in den Strahlengang bewegbaren Modulationselement Eine derartige Vorrichtung ist in der US-PS 31 10 824 beschrieben. Das Modulationselement ist bei dieser Vorrichtung an einem Stab befestigt, der praktisch vollständig aus piezoelektrischem Material besteht Da hierfür eine vergleichsweise große Menge piezoelektrisches Materia! notwendig ist, ist diese Vorrichtung sehr aufwendig. Außerdem muß für die Erzielung einer bestimmten Amplitude eine rohe Erregerieistung aufgebracht werden. Davon abgesehen ist nicht offenbart, wie die Ruhelage des Modulationselementes eingestellt werden kann.The invention relates to a weighting for modulation the optical transparency -; ines Sirahienganges, in particular a light path, with a driven by means of piezoelectric material and periodic Modulation element movable in the beam path. Such a device is disclosed in US Pat 31 10 824. The modulation element is attached to a rod in this device, the consists practically entirely of piezoelectric material because a comparatively large amount for this purpose piezoelectric materia! is necessary is this Device very expensive. In addition, a raw amplitude must be used to achieve a certain amplitude Excitation power can be applied. Apart from that, it is not disclosed how the rest position of the modulation element can be adjusted.

Die gleichen Nachteile weist auch die in der US-PS 35 25 873 dargestellte Vorrichtung auf. da auch hier der abzulenkende Stab vollständig aus piezoelektrischem Material besteht, nämlich aus zwei aufeinandergelegten oder im Abstand zueinander angeordneten Streifen, dieThe device shown in US Pat. No. 3,525,873 has the same disadvantages. there too the to be deflected rod consists entirely of piezoelectric material, namely of two superimposed or spaced apart strips that

Auch die GB-PS 5 35 507 zeigt vollständig aus piezoelektrischem Material bestehende Stäbe, die als Schalter oder zur Ablenkung von Lichtstrahlen mittels eines davon bewegten Spiegels dienen. Ähnliche Vorrichtungen zeigen die GB-PS 4 77 989 und US-FS 37 58 199. Die Nachteile bestehen hier gleichfalls darin, daß größere Mengen des teuren piezoelektrischen Materials notwendig sind und die erforderliche Erregerleistung hoch istGB-PS 5 35 507 also shows rods made entirely of piezoelectric material, which serve as switches or for deflecting light beams by means of a mirror moved by them. GB-PS 4 77 989 and US-FS 37 58 199 show similar devices. The disadvantages here also consist in the fact that larger quantities of the expensive piezoelectric material are necessary and the required excitation power is high

In der DE-AS 25 03 096 ist eine Vorrichtung für die Zweistrahiphotometrie beschrieben, bei der ein Modulationselement am freien Ende eines starren Tragarms befestigt ist Das andere Ende des Tragarms ist an einem zwischen zwei Potschuhen angeordneten Elektromagneten angebracht w bei die Aufhängung über einen torsionsfähigen Blechstreifen erfolgt Durch Anlegen einer Wechselspannung bringt der Elektromagnet den Anker und damit den Tragann zu periodischen Schwingungen entsprechend der Frequenz des Wechselstroms. Die Einstellung der Ruhelage des Tragarms geschieht mechanisch, & h. durch Lageversetzung der gesamten Vorrichtung mittels zweier Winkelbüg<~l.In DE-AS 25 03 096 a device for two-beam photometry is described in which a modulation element is attached to the free end of a rigid support arm. The other end of the support arm is on a mounted between two pot shoes arranged electromagnet w with the suspension via a torsion-proof sheet metal strips are produced by applying an alternating voltage to the electromagnet Anchor and thus the Tragann to periodic oscillations according to the frequency of the alternating current. The rest position of the support arm is set mechanically, & h. by relocating the entire device by means of two angle brackets <~ l.

Diese Vorrichtung ist in ihrem Aufbau aufwendig und voluminös. Außerdem ist die für eine exakte Funktion notwendige Ruhelageeinstellung umständlich zu handhaben. This device is complex and voluminous in its construction. In addition, it is for an exact function necessary rest position adjustment cumbersome to handle.

Nur beispielhaft unr1 beiläufig wird in der D^-AS 25 03 096 auf einen Antrieb mit piezoelektrischen Kristallen hingewiesen. Näheres ist hierzu nicht offenbart Ein solcher Antrieb wird zudem als nachteilig beurteilt weil die Energie, die mit einer so'chen Vorrichtung geliefert werden kann, geringer ist als bei der Vorrichtung mit Elektromagnet und Anker.For example only, UNR 1 casual is pointed out in the D ^ -AS 25 03 096 a drive piezoelectric crystals. No further details are disclosed in this regard. Such a drive is also judged to be disadvantageous because the energy that can be supplied with such a device is less than in the case of the device with an electromagnet and armature.

Der Erfindung liegt die Aufgabe zugrunde, eine Vorrichtung der eingangs genannten Art so zu verbessern, daß sie kostengünstiger herzustellen ist. wobei gleichzeitig auf einfache Weise eine Verstellung der Ruhelage des Modulationselementes möglich sein soll.The invention is based on the object of providing a device of the type mentioned at the beginning improve that it is cheaper to manufacture. at the same time an adjustment in a simple manner the rest position of the modulation element should be possible.

Diese Aufgabe win.' erfindungsgemäß dadurch gelöst, daß das Modulationselement an einem Federelement befestigt ist das an seinem Einspannende mit dem piezoelektrischen Material fest verbunden ist wobei die Ruhelage des Modulationselements durch Variation einer am piezoelektrischen Material anliegenden Gleichspannung einstellbar ist.This task win. ' solved according to the invention by that the modulation element is attached to a spring element at its clamping end with the piezoelectric material is firmly connected with the rest position of the modulation element by variation a DC voltage applied to the piezoelectric material can be set.

Diese Vorrichtung, die in ihrer Grundkonzeption ähnlich aufgebaut ist wie der in der DE-PS 26 13 528 beschriebene Schwingkondensator, zeichnet sich durch besonders einfache konstruktive Gestaltung aus. weil der Aufwand an piezoelektrischem Material gering gehalten werden kann. Auch die erforderliche Erregerleistung ist im Vergleich zu den bekannten Vorrichtungen erheblich geringer. Ferner ist die Vorrichtung wegen ihrer einfachen Ruhelageverstellung leicht zu handhaben.This device, whose basic concept is similar to that in DE-PS 26 13 528 oscillating capacitor described, is characterized by a particularly simple structural design. because the cost of piezoelectric material can be kept low. Also the required excitation power is considerably lower compared to the known devices. Furthermore, the device easy to use because of their simple rest position adjustment.

Weitere Merkmale der Erfindung sind in den Unteransprüchen enthalten.Further features of the invention are contained in the subclaims.

Die Erfindung wird im nachstehenden an Hand der Zeichnungen erläutert. Das Modulationselement 1. das den Strahl 2 moduliert ist am Federelement 3 befestigt Der Antrieb des Federelements 3 erfolgt von einem piezoelektrischen Material 4.das mit dem Federelement 3 fest verbunden ist. Das piezoelektrische Material 4 ist auf beiden Seiten kontaktiert und mit elektrischen Anschlüssen 5 versehen. Federelement 3 und piezoelektrisches Material 4 werden in eine Halterung 6 mn Hilfe der Schraube 7 zwischen zwei Isolationsscheiben 8 eingeklemmt.The invention is explained below with reference to the drawings. The modulation element 1. the the beam 2 modulated is attached to the spring element 3. The spring element 3 is driven by a piezoelectric material 4 that is firmly connected to the spring element 3. The piezoelectric material 4 is contacted on both sides and provided with electrical connections 5. Spring element 3 and piezoelectric Material 4 are in a holder 6 mn aid the screw 7 clamped between two insulating washers 8.

Beim Anlegen einer Spannung an die Anschlüsse 5 kommt es zu einer Längenänderung im piezoelektrischen Material 4. was eine Verbiegung des Federelements 3 zur Foige hai. MH einem geeigneten Wechselspannungsgenerator 9 (Sinusgenerator oder Selbsterregerschaltung) läßt sich das Federelemeni 3 in genügend starke Schwingungen versetzen, so daß das Modulationselement 1 periodisch in den Strahl 2 taucht und diesen moduliert. Die Schwingungsamplitude kann stufenlos durch Variation der Antriebsspannung gere-When a voltage is applied to the connections 5, there is a change in length in the piezoelectric material 4, which leads to a bending of the spring element 3. With a suitable alternating voltage generator 9 (sine wave generator or self-exciting circuit), the spring element 3 can be set in sufficiently strong vibrations so that the modulation element 1 dips periodically into the beam 2 and modulates it. The vibration amplitude can be continuously regulated by varying the drive voltage.

gelt werden. Zur genauen Positionierung des Modulationselemcntcs I relativ zum Strahl 2 kann dem Wechselspannungsgenerator 9 eine Gleichspannung iO überlagert werden. Damit entfallen weitgehend die sonst notwendigen mechanischen Feinjustierungen.apply. For precise positioning of the modulation element I relative to the beam 2, the AC voltage generator 9 can have a DC voltage OK are superimposed. This largely eliminates the need for mechanical fine adjustments.

Hierzu 1 Blatt Zeichnungen1 sheet of drawings

Claims (6)

Patentansprüche:Patent claims: 1. Vorrichtung zur Modulation der optischen Durchlässigkeit eines Strahlenganges, insbesondere einer Lichtstrecke, mit einem mittels piezoelektrischem Material angetriebenen und periodisch in den Strahlengang bewegbaren Modulationselement, dadurch gekennzeichnet, daß das Modulationselement (1) an einem Federelement (3) befestigt ist. das an seinem Einspannende mit dem piezoelektrischen Material (4) fest verbunden ist, wobei die Ruhelage des Modulationselements (1) durch Variation einer am piezoelektrischen Material (4) anliegenden Gleichspannung (10) einstellbar ist1. Device for modulating the optical Permeability of a beam path, in particular a light path, with a means of piezoelectric Material-driven modulation element that can be periodically moved into the beam path, characterized in that the modulation element (1) is attached to a spring element (3). the one at its clamping end with the piezoelectric Material (4) is firmly connected, the rest position of the modulation element (1) by variation a DC voltage (10) applied to the piezoelectric material (4) can be set 2. Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, daß das Modulationselement (1) als Filter ausgebildet 'st.2. Device according to claim 1, characterized in that that the modulation element (1) designed as a filter 'st. 3. Vorrichtung nach Anspruch 2. dadurch gekennzeichnet, daß das Filter Bereiche unterschiedlicher Durchlässigkeit aufweist3. Device according to claim 2, characterized in that that the filter has areas of different permeability 4. Vorrich. ing nach Anspruch 3, dadurch gek ' zeichnet daß die Bereiche unterschiedlicher Dui ^.. Lässigkeit des Filters durch Variation der Schwingungsamplitude einstellbar sind.4. Vorrich. ing according to claim 3, characterized in that it is marked that the areas of different dui ^ .. nonchalance of the filter can be adjusted by varying the oscillation amplitude. 5. Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, daß das Modulationselement (1) als Blende ausgebildet ist5. Apparatus according to claim 1, characterized in that the modulation element (1) as a diaphragm is trained 6. Vorrichtung nach Anspruch 1, dadurch gekennzeichnet daß das Modulationselement (1) aus einer Kombination von Blende und Filter besteht.6. Apparatus according to claim 1, characterized in that the modulation element (1) consists of a There is a combination of diaphragm and filter.
DE3014328A 1980-04-15 1980-04-15 Device for modulating the optical transmittance of a beam path Expired DE3014328C2 (en)

Priority Applications (9)

Application Number Priority Date Filing Date Title
DE3014328A DE3014328C2 (en) 1980-04-15 1980-04-15 Device for modulating the optical transmittance of a beam path
GB8110247A GB2076173B (en) 1980-04-15 1981-04-01 A device for modulating the permeability of the path of electro-magnetic radiation
CH2419/81A CH653141A5 (en) 1980-04-15 1981-04-10 DEVICE FOR MODULATION OF THE OPTICAL TRANSMISSION OF A RADIATION PATH, AND A GAS ANALYZER WITH SUCH DEVICE.
FR8107373A FR2480446B1 (en) 1980-04-15 1981-04-13 DEVICE FOR MODULATING THE OPTICAL TRANSMISSION OF A RADIATION BEAM AND ITS USE IN GAS ANALYSIS APPARATUS
CA000375403A CA1175499A (en) 1980-04-15 1981-04-14 Optical modulator
SE8102415A SE8102415L (en) 1980-04-15 1981-04-14 DEVICE FOR MODULATING THE OPTICAL TRANSPARENCY OF A RADIATION, SPECIFICALLY A BRIGHT
ZA00812462A ZA812462B (en) 1980-04-15 1981-04-14 Apparatus for modulating the optical permeability of an optical path
AU69495/81A AU542586B2 (en) 1980-04-15 1981-04-14 Electromagnetic beam modulation
JP5569981A JPS56154703A (en) 1980-04-15 1981-04-15 Optical transmissibility mondultor in light ray passage and specially in light ray zone

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3014328A DE3014328C2 (en) 1980-04-15 1980-04-15 Device for modulating the optical transmittance of a beam path

Publications (2)

Publication Number Publication Date
DE3014328A1 DE3014328A1 (en) 1981-10-22
DE3014328C2 true DE3014328C2 (en) 1984-01-12

Family

ID=6099998

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3014328A Expired DE3014328C2 (en) 1980-04-15 1980-04-15 Device for modulating the optical transmittance of a beam path

Country Status (9)

Country Link
JP (1) JPS56154703A (en)
AU (1) AU542586B2 (en)
CA (1) CA1175499A (en)
CH (1) CH653141A5 (en)
DE (1) DE3014328C2 (en)
FR (1) FR2480446B1 (en)
GB (1) GB2076173B (en)
SE (1) SE8102415L (en)
ZA (1) ZA812462B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3326660A1 (en) * 1982-11-01 1984-05-03 Veb Kombinat Nagema, Ddr 8045 Dresden Device for modulating optical path differences
DE4207194A1 (en) * 1991-03-07 1992-09-10 Mitsubishi Materials Corp OPTICAL SWITCH
DE19809908A1 (en) * 1998-03-07 1999-09-09 Univ Dresden Tech Tuned, resonant vibrating chopper modulating radiation reaching sensors in row and matrix arrangements

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2528990A1 (en) * 1982-06-22 1983-12-23 Thomson Csf Electrically driven optical periodic modulator - has piezoelectric resonator with dihedral edge illuminated by incident radiation
JPS6033315U (en) * 1983-08-12 1985-03-07 株式会社村田製作所 light modulator
JPS61118U (en) * 1984-06-05 1986-01-06 株式会社村田製作所 light modulator
DE3520867A1 (en) * 1985-06-11 1986-12-11 Grün Optik Wetzlar GmbH, 6330 Wetzlar DEVICE FOR SEPARATELY DETECTING RADIATION PROPORTS PROVIDED WITH A POLARIZATION IDENTIFIER OF A MEASURING LIGHT BEAM
DE3525148A1 (en) * 1985-07-13 1987-04-02 Hartmann & Braun Ag GAS ANALYZER WITH LARGE AREA PYROELECTRIC DETECTOR
JPS62106209U (en) * 1985-12-24 1987-07-07
US4850697A (en) * 1988-03-16 1989-07-25 Dynatech Electro-Optics Corporation Resonant piezoelectric chopper for infrared radiation
GB2379746A (en) * 2001-09-18 2003-03-19 Marconi Caswell Ltd Shutter assembly for telecommunication networks

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB535507A (en) * 1939-04-05 1941-04-10 Electrical Res Prod Inc Piezo-electric devices
US3110824A (en) * 1960-10-31 1963-11-12 Eastman Kodak Co Piezoelectric actuating element
US3259014A (en) * 1961-06-30 1966-07-05 Bell Telephone Labor Inc Light modulator using a variable spacing diffraction grating
US3442570A (en) * 1966-03-02 1969-05-06 Hughes Aircraft Co Piezoelectric laser beam deflector
GB1455774A (en) * 1974-02-07 1976-11-17 Pye Ltd Radiation detecting system
JPS5352137A (en) * 1976-10-22 1978-05-12 Nippon Telegr & Teleph Corp <Ntt> Optical waveguide simple connector

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3326660A1 (en) * 1982-11-01 1984-05-03 Veb Kombinat Nagema, Ddr 8045 Dresden Device for modulating optical path differences
DE4207194A1 (en) * 1991-03-07 1992-09-10 Mitsubishi Materials Corp OPTICAL SWITCH
DE19809908A1 (en) * 1998-03-07 1999-09-09 Univ Dresden Tech Tuned, resonant vibrating chopper modulating radiation reaching sensors in row and matrix arrangements
DE19809908C2 (en) * 1998-03-07 2003-06-26 Univ Dresden Tech Vibration chopper for an optical modulator for radiation sensors in a row or matrix arrangement

Also Published As

Publication number Publication date
CA1175499A (en) 1984-10-02
FR2480446A1 (en) 1981-10-16
SE8102415L (en) 1981-10-16
DE3014328A1 (en) 1981-10-22
GB2076173A (en) 1981-11-25
GB2076173B (en) 1984-08-15
CH653141A5 (en) 1985-12-13
ZA812462B (en) 1982-05-26
FR2480446B1 (en) 1985-08-02
AU6949581A (en) 1981-10-22
JPS56154703A (en) 1981-11-30
AU542586B2 (en) 1985-02-28

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