DE3008441A1 - Physical quantity sensor for e.g. pressure or force - has protective housing and membrane in contact with deformable sensor substrate - Google Patents

Physical quantity sensor for e.g. pressure or force - has protective housing and membrane in contact with deformable sensor substrate

Info

Publication number
DE3008441A1
DE3008441A1 DE19803008441 DE3008441A DE3008441A1 DE 3008441 A1 DE3008441 A1 DE 3008441A1 DE 19803008441 DE19803008441 DE 19803008441 DE 3008441 A DE3008441 A DE 3008441A DE 3008441 A1 DE3008441 A1 DE 3008441A1
Authority
DE
Germany
Prior art keywords
sensor
substrate
sensor element
membrane
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19803008441
Other languages
German (de)
Inventor
Eberhard Dipl Phys Dr Guenzel
Kurt Kaufmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE19803008441 priority Critical patent/DE3008441A1/en
Publication of DE3008441A1 publication Critical patent/DE3008441A1/en
Application status is Withdrawn legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/02Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using mechanical means
    • G01D5/06Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using mechanical means acting through a wall or enclosure, e.g. by bellows, by magnetic coupling
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow
    • G01F1/05Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow by using mechanical effects
    • G01F1/20Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow by using mechanical effects by detection of dynamic effects of the fluid flow
    • G01F1/28Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow by using mechanical effects by detection of dynamic effects of the fluid flow by drag-force, e.g. vane type or impact flowmeter
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress in general
    • G01L1/18Measuring force or stress in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress in general
    • G01L1/20Measuring force or stress in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2206Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
    • G01L1/2231Special supports with preselected places to mount the resistance strain gauges; Mounting of supports the supports being disc- or ring-shaped, adapted for measuring a force along a single direction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627Protection against aggressive medium in general
    • G01L19/0645Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges

Abstract

The pressure force or acceleration transducer consists of a sensor element mounted upon a mechanically deformable substrate. It is an economically manufactured, sensitive device which does not suffer from the long-term stability limitations conventionally associated with integrated semiconductor sensor circuits with piezoresistive elements caused by humidity and corrosive gases or vapours. The sensor element (1) is mounted inside a housing (6) which is hermetically sealed by a membrane (8) in contact with the deformable substrate (3). The sensor element may be a strain gauge or an integrated semiconducting circuit with a piezoresistive element. The deformable substrate (3) may be a steel spring. Alternatively, the sensor element and substrate may be a flexible silicon strip. The sensor and substrate assembly is attached to the housing using a slotted metal ring (4) and threaded ring (5).
DE19803008441 1980-03-05 1980-03-05 Physical quantity sensor for e.g. pressure or force - has protective housing and membrane in contact with deformable sensor substrate Withdrawn DE3008441A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19803008441 DE3008441A1 (en) 1980-03-05 1980-03-05 Physical quantity sensor for e.g. pressure or force - has protective housing and membrane in contact with deformable sensor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19803008441 DE3008441A1 (en) 1980-03-05 1980-03-05 Physical quantity sensor for e.g. pressure or force - has protective housing and membrane in contact with deformable sensor substrate

Publications (1)

Publication Number Publication Date
DE3008441A1 true DE3008441A1 (en) 1981-09-10

Family

ID=6096348

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19803008441 Withdrawn DE3008441A1 (en) 1980-03-05 1980-03-05 Physical quantity sensor for e.g. pressure or force - has protective housing and membrane in contact with deformable sensor substrate

Country Status (1)

Country Link
DE (1) DE3008441A1 (en)

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2535060A1 (en) * 1982-10-22 1984-04-27 Antivols Simplex Sa Piezoelectric detector
DE3313260A1 (en) * 1983-04-13 1984-10-25 Ermeto Armaturen Gmbh Sensor
DE3313261A1 (en) * 1983-04-13 1984-10-25 Ermeto Armaturen Gmbh sensor
EP0136701A2 (en) * 1983-10-05 1985-04-10 Dierks & Söhne GmbH & Co. KG Measuring device
EP0239703A1 (en) * 1986-01-07 1987-10-07 THORN EMI plc Force-sensitive flow sensor
DE3801828A1 (en) * 1987-01-26 1988-08-04 Tdk Corp Verschiebungsfuehler
US4773269A (en) * 1986-07-28 1988-09-27 Rosemount Inc. Media isolated differential pressure sensors
EP0312605A1 (en) * 1987-04-24 1989-04-26 Enplas Laboratories, Inc. Detector for force, acceleration and magnetism using resistor element
EP0333872A1 (en) * 1987-09-18 1989-09-27 Wacoh Corporation Gripper for a robot
WO1989010287A1 (en) * 1988-04-20 1989-11-02 Alfred Teves Gmbh Process for operating a master cylinder
DE4106442A1 (en) * 1990-02-28 1991-09-19 Atsugi Unisia Corp Sensor arrangement in a vibration isolating apparatus
DE4117462A1 (en) * 1990-05-28 1991-12-05 Atsugi Unisia Corp load sensor
US5263375A (en) * 1987-09-18 1993-11-23 Wacoh Corporation Contact detector using resistance elements and its application
US5421213A (en) * 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
EP0949484A1 (en) * 1998-04-07 1999-10-13 SPANNER-POLLUX GmbH Flowmeter
US6282956B1 (en) 1994-12-29 2001-09-04 Kazuhiro Okada Multi-axial angular velocity sensor
US6314823B1 (en) 1991-09-20 2001-11-13 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same

Cited By (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2535060A1 (en) * 1982-10-22 1984-04-27 Antivols Simplex Sa Piezoelectric detector
DE3313260A1 (en) * 1983-04-13 1984-10-25 Ermeto Armaturen Gmbh Sensor
DE3313261A1 (en) * 1983-04-13 1984-10-25 Ermeto Armaturen Gmbh sensor
EP0136701A3 (en) * 1983-10-05 1986-12-03 Dierks & Söhne GmbH & Co. KG Measuring device
EP0136701A2 (en) * 1983-10-05 1985-04-10 Dierks & Söhne GmbH & Co. KG Measuring device
EP0239703A1 (en) * 1986-01-07 1987-10-07 THORN EMI plc Force-sensitive flow sensor
AU577210B2 (en) * 1986-01-07 1988-09-15 Thorn Emi Plc Improvements in or relating to flow sensors
US4773269A (en) * 1986-07-28 1988-09-27 Rosemount Inc. Media isolated differential pressure sensors
DE3801828A1 (en) * 1987-01-26 1988-08-04 Tdk Corp Verschiebungsfuehler
EP0312605A4 (en) * 1987-04-24 1992-06-17 Kabushiki Kaisha Nexy Kenkyusho Detector for force, acceleration and magnetism using resistor element
EP0625701A1 (en) * 1987-04-24 1994-11-23 Enplas Laboratories, Inc. Force detector using piezoresistive elements
EP0312605A1 (en) * 1987-04-24 1989-04-26 Enplas Laboratories, Inc. Detector for force, acceleration and magnetism using resistor element
US5263375A (en) * 1987-09-18 1993-11-23 Wacoh Corporation Contact detector using resistance elements and its application
EP0333872A1 (en) * 1987-09-18 1989-09-27 Wacoh Corporation Gripper for a robot
EP0333872B1 (en) * 1987-09-18 1995-08-23 Wacoh Corporation Gripper for a robot
WO1989010287A1 (en) * 1988-04-20 1989-11-02 Alfred Teves Gmbh Process for operating a master cylinder
DE4106442A1 (en) * 1990-02-28 1991-09-19 Atsugi Unisia Corp Sensor arrangement in a vibration isolating apparatus
DE4117462A1 (en) * 1990-05-28 1991-12-05 Atsugi Unisia Corp load sensor
US6477903B2 (en) 1990-10-12 2002-11-12 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
US5811693A (en) * 1990-10-12 1998-09-22 Okada; Kazuhiro Force detector and acceleration detector and method of manufacturing the same
US7360455B2 (en) 1990-10-12 2008-04-22 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
US6053057A (en) * 1990-10-12 2000-04-25 Okada; Kazuhiro Force detector
US6158291A (en) * 1990-10-12 2000-12-12 Okada; Kazuhiro Force detector and acceleration detector
US7152485B2 (en) 1990-10-12 2006-12-26 Kazuhiro Okada Acceleration detector
US6779408B2 (en) 1990-10-12 2004-08-24 Kazuhiro Okada Force detector
US5421213A (en) * 1990-10-12 1995-06-06 Okada; Kazuhiro Multi-dimensional force detector
US6716253B2 (en) 1990-10-12 2004-04-06 Kazuhiro Okada Force detector
US6314823B1 (en) 1991-09-20 2001-11-13 Kazuhiro Okada Force detector and acceleration detector and method of manufacturing the same
US6941810B2 (en) 1993-03-30 2005-09-13 Kazuhiro Okada Angular velocity sensor
US7059188B2 (en) 1993-03-30 2006-06-13 Kazuhiro Okada Angular velocity sensor
US7900513B2 (en) 1993-03-30 2011-03-08 Kazuhiro Okada Multi-axial angular velocity sensor
US6865943B2 (en) 1994-12-29 2005-03-15 Kazuhiro Okada Angular velocity sensor
US6282956B1 (en) 1994-12-29 2001-09-04 Kazuhiro Okada Multi-axial angular velocity sensor
EP0949484A1 (en) * 1998-04-07 1999-10-13 SPANNER-POLLUX GmbH Flowmeter

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Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee