DE29815297U1 - Device for recognizing the position of a sample to be examined relative to a detection system - Google Patents

Device for recognizing the position of a sample to be examined relative to a detection system

Info

Publication number
DE29815297U1
DE29815297U1 DE29815297U DE29815297U DE29815297U1 DE 29815297 U1 DE29815297 U1 DE 29815297U1 DE 29815297 U DE29815297 U DE 29815297U DE 29815297 U DE29815297 U DE 29815297U DE 29815297 U1 DE29815297 U1 DE 29815297U1
Authority
DE
Germany
Prior art keywords
recognizing
sample
detection system
examined relative
examined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE29815297U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zegema GmbH
Original Assignee
Nanophotonics GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanophotonics GmbH filed Critical Nanophotonics GmbH
Priority to DE29815297U priority Critical patent/DE29815297U1/en
Publication of DE29815297U1 publication Critical patent/DE29815297U1/en
Priority to EP99106726A priority patent/EP0950881A3/en
Priority to US09/291,119 priority patent/US6091499A/en
Priority to JP11116099A priority patent/JP3247660B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
DE29815297U 1998-04-17 1998-08-26 Device for recognizing the position of a sample to be examined relative to a detection system Expired - Lifetime DE29815297U1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE29815297U DE29815297U1 (en) 1998-04-17 1998-08-26 Device for recognizing the position of a sample to be examined relative to a detection system
EP99106726A EP0950881A3 (en) 1998-04-17 1999-04-01 Method and device for automatically positioning samples relative to an ellipsometer
US09/291,119 US6091499A (en) 1998-04-17 1999-04-14 Method and device for automatic relative adjustment of samples in relation to an ellipsometer
JP11116099A JP3247660B2 (en) 1998-04-17 1999-04-19 Method and apparatus for automatically adjusting a sample for an ellipsometer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE1998116974 DE19816974C1 (en) 1998-04-17 1998-04-17 Device to identify relative position of sample to be tested
DE29815297U DE29815297U1 (en) 1998-04-17 1998-08-26 Device for recognizing the position of a sample to be examined relative to a detection system

Publications (1)

Publication Number Publication Date
DE29815297U1 true DE29815297U1 (en) 1998-12-17

Family

ID=7864782

Family Applications (2)

Application Number Title Priority Date Filing Date
DE1998116974 Expired - Fee Related DE19816974C1 (en) 1998-04-17 1998-04-17 Device to identify relative position of sample to be tested
DE29815297U Expired - Lifetime DE29815297U1 (en) 1998-04-17 1998-08-26 Device for recognizing the position of a sample to be examined relative to a detection system

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE1998116974 Expired - Fee Related DE19816974C1 (en) 1998-04-17 1998-04-17 Device to identify relative position of sample to be tested

Country Status (1)

Country Link
DE (2) DE19816974C1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1114979A1 (en) * 1999-12-27 2001-07-11 Leica Microsystems Jena GmbH Uncoupled wafer inclination measurement with an ellipsometer with spectral photometer and measurement of focus by a reflecting objective
CN113376170A (en) * 2021-06-16 2021-09-10 博众精工科技股份有限公司 Calibration method and calibration block of product appearance detection equipment

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10139645C2 (en) * 2001-08-11 2003-07-10 Nanofilm Technologie Gmbh goniometer
DE10217028C1 (en) * 2002-04-11 2003-11-20 Nanophotonics Ag Measuring module for wafer production plants
DE102012103428A1 (en) 2012-04-19 2013-10-24 Hseb Dresden Gmbh inspection arrangement

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3880524A (en) * 1973-06-25 1975-04-29 Ibm Automatic ellipsometer
EP0632256B1 (en) * 1993-06-28 1998-08-26 International Business Machines Corporation Micropolarimeter, microsensor system and method of characterizing thin films

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1114979A1 (en) * 1999-12-27 2001-07-11 Leica Microsystems Jena GmbH Uncoupled wafer inclination measurement with an ellipsometer with spectral photometer and measurement of focus by a reflecting objective
CN113376170A (en) * 2021-06-16 2021-09-10 博众精工科技股份有限公司 Calibration method and calibration block of product appearance detection equipment

Also Published As

Publication number Publication date
DE19816974C1 (en) 2000-01-13

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 19990204

R150 Term of protection extended to 6 years

Effective date: 20011218

R151 Term of protection extended to 8 years

Effective date: 20041201

R158 Lapse of ip right after 8 years

Effective date: 20070301