DE29624216U1 - Photoelectric length and angle measuring device - Google Patents

Photoelectric length and angle measuring device

Info

Publication number
DE29624216U1
DE29624216U1 DE29624216U DE29624216U DE29624216U1 DE 29624216 U1 DE29624216 U1 DE 29624216U1 DE 29624216 U DE29624216 U DE 29624216U DE 29624216 U DE29624216 U DE 29624216U DE 29624216 U1 DE29624216 U1 DE 29624216U1
Authority
DE
Germany
Prior art keywords
measuring device
angle measuring
photoelectric length
scanning fields
photoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE29624216U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Priority to DE29624216U priority Critical patent/DE29624216U1/en
Priority claimed from DE19636675A external-priority patent/DE19636675A1/en
Publication of DE29624216U1 publication Critical patent/DE29624216U1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Description

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßt The description text was not recorded electronically  

Der Beschreibungstext wurde nicht elektronisch erfaßtThe description text was not recorded electronically

Claims (14)

1. Photoelektrische Längen- oder Winkelmeßeinrichtung mit einer Ab­ tasteinheit mit mehreren zueinander verschoben angeordneten Teil- Abtastfeldern (3a, 3b; 3a5, 3b5, 3c5; 3a7', 3b7', 3c7', 3a7, 3b7, 3c7, 3a7', 3b7', 3c7') sowie den Teil-Abtastfeldern (3a, 3b; 3a5, 3b5, 3c5; 3a7', 3b7', 3c7', 3a7, 3b7, 3c7, 3a7', 3b7', 3c7') zugeordneten Detek­ torelementen (5, 6, 7, 8, 9, 10, 11, 12), die bei der photoelektrischen Abtastung eines Maßstabes (45, 4, 470) modulierte und phasenver­ schobene Ausgangssignale liefern, wobei den Teil-Abtastfeldern (3a, 3b; 3a5, 3b5, 3c5; 3a7', 3b7', 3c7', 3a7, 3b7, 3c7, 3a7', 3b7', 3c7') desweiteren räumlich getrennte, richtungsselektiv wirkende Ab­ lenkmittel (3d5, 3e5, 3f5; 3e, 3f; A7', A'7, A7, A'7, A7', A'7') zugeord­ net sind, die eine Ablenkung zumindest eines Teiles der durch die Teil-Abtastfelder (3a, 3b; 3a5, 3b5, 3c5; 3a7', 3b7', 3c7', 3a7, 3b7, 3c7, 3a7', 3b7', 3c7') tretenden Teilstrahlenbündel in Richtung eines ge­ meinsam beaufschlagten Teilbereiches auf dem Maßstab (45, 4, 470) bewirken.1. Photoelectric length or angle measuring device with a scanning unit with a plurality of sub-scanning fields arranged shifted relative to one another ( 3 a, 3 b; 3 a5, 3 b5, 3 c5; 3 a 7 ' , 3 b 7' , 3 c 7 ' , 3 a 7 , 3 b 7 , 3 c 7 , 3 a 7 ' , 3 b 7' , 3 c 7 ' ) and the partial scanning fields ( 3 a, 3 b; 3 a5, 3 b5, 3 c5; 3 a 7 ' , 3 b 7' , 3 c 7 ' , 3 a 7 , 3 b 7 , 3 c 7 , 3 a 7' , 3 b 7 ' , 3 c 7' ) associated detector elements ( 5 , 6 , 7 , 8 , 9 , 10 , 11 , 12 ), which deliver modulated and phase-shifted output signals during the photoelectric scanning of a scale (45, 4, 470), the partial scanning fields ( 3 a, 3 b; 3 a5, 3 b5, 3 c5; 3 a 7 ' , 3 b 7' , 3 c 7 ' , 3 a 7 , 3 b 7 , 3 c 7 , 3 a 7' , 3 b 7 ' , 3 c 7' ) furthermore spatially separated, directionally selective Acting deflection means (3d5, 3e5, 3f5; 3e, 3f; A 7 ' , A' 7 , A 7 , A ' 7 , A 7' , A '7' ) are assigned, which are a deflection of at least part of the the partial scanning fields ( 3 a, 3 b; 3 a5, 3 b5, 3 c5; 3 a 7 ' , 3 b 7 ' , 3 c 7' , 3 a 7 , 3 b 7 , 3 c 7 , 3 a 7 ' , 3 b 7' , 3 c 7 ' ) partial beam coming in the direction of a jointly applied partial area on the scale ( 45, 4, 470). 2. Photoelektrische Längen- oder Winkelmeßeinrichtung nach An­ spruch 1, wobei die Teil-Abtastfelder (3a, 3b; 3a5, 3b5, 3c5; 3a7', 3b7', 3c7', 3a7, 3b7, 3c7, 3a7', 3b7', 3c7') und die richtungsselektiv wirkenden Ablenkmittel (3d5, 3e5, 3f5; 3e, 3f; A7', A'7', A7, A'7, A7', A'7') auf der Vorder- und Rückseite eines gemeinsamen Träger­ substrates angeordnet sind. 2. Photoelectric length or angle measuring device according to claim 1, wherein the partial scanning fields ( 3 a, 3 b; 3 a5, 3 b5, 3 c5; 3 a 7 ' , 3 b 7' , 3 c 7 ' , 3 a 7 , 3 b 7 , 3 c 7 , 3 a 7 ' , 3 b 7' , 3 c 7 ' ) and the directionally selective deflecting means (3d5, 3e5, 3f5; 3e, 3f; A 7' , A '7' , A 7 , A ' 7 , A 7' , A '7' ) are arranged on the front and back of a common carrier substrate. 3. Photoelektrische Längen- oder Winkelmeßeinrichtung nach An­ spruch 1, wobei die richtungsselektiv wirkenden Ablenkmittel als Beugungsgitter ausgebildet sind.3. Photoelectric length or angle measuring device according to An saying 1, wherein the directionally selective deflecting means as Diffraction gratings are formed. 4. Photoelektrische Längen- oder Winkelmeßeinrichtung nach An­ spruch 1, wobei die verschiedenen Teil-Abtastfeldern (3a, 3b; 3a5, 3b5, 3c5; 3a7', 3b7', 3c7', 3a7, 3b7, 3c7, 3a7', 3b7', 3c7') zugeordne­ ten Beugungsgitter unterschiedliche Gitterkonstanten aufweisen.4. Photoelectric length or angle measuring device according to claim 1, wherein the different partial scanning fields ( 3 a, 3 b; 3 a5, 3 b5, 3 c5; 3 a 7 ' , 3 b 7' , 3 c 7 ' , 3rd a 7 , 3 b 7 , 3 c 7 , 3 a 7 ' , 3 b 7' , 3 c 7 ' ) assigned diffraction gratings have different grating constants. 5. Photoelektrische Längen- oder Winkelmeßeinrichtung nach An­ spruch 1, wobei die richtungsselektiv wirkenden Ablenkmittel als dif­ fraktive optische Elemente ausgebildet sind.5. Photoelectric length or angle measuring device according to An saying 1, wherein the directionally selective deflecting means as dif fractive optical elements are formed. 6. Photoelektrische Längen- oder Winkelmeßeinrichtung nach An­ spruch 1, wobei die richtungsselektiv wirkenden Ablenkmittel als re­ fraktive optische Elemente ausgebildet sind.6. Photoelectric length or angle measuring device according to An saying 1, wherein the directionally selective deflecting means as re fractive optical elements are formed. 7. Photoelektrische Längen- oder Winkelmeßeinrichtung nach An­ spruch 1, wobei die richtungsselektiv wirkenden Ablenkmittel (3d5, 3e5, 3f5; 3e, 3f) als binäre Stufengitter ausgebildet sind.7. Photoelectric length or angle measuring device according to claim 1, wherein the directionally acting deflecting means ( 3 d5, 3 e5, 3 f5; 3 e, 3 f) are designed as a binary step grating. 8. Photoelektrische Längen- oder Winkelmeßeinrichtung nach An­ spruch 1, wobei die richtungsselektiv wirkenden Ablenkmittel als ge­ blazte Phasenstrukturen (A7', A'7', A7, A'7, A7', A'7') ausgebildet sind.8. Photoelectric length or angle measuring device according to claim 1, wherein the directionally selective deflecting means as ge blazed phase structures (A 7 ' , A' 7 ' , A 7 , A' 7 , A 7 ' , A' 7 ' ) are formed. 9. Photoelektrische Längen- oder Winkelmeßeinrichtung nach An­ spruch 1, wobei die richtungsselektiv wirkenden Ablenkmittel als ho­ lographisch optische Elemente ausgebildet sind.9. Photoelectric length or angle measuring device according to An saying 1, wherein the directionally selective deflecting means as ho lographically optical elements are formed. 10. Photoelektrische Längen- oder Winkelmeßeinrichtung nach An­ spruch 1, wobei die Teil-Abtastfelder (3a, 3b; 3a5, 3b5, 3c5; 3a7', 3b7', 3c7', 3a7, 3b7, 3c7, 3a7', 3b7', 3c7') in Meßrichtung zueinander verschoben angeordnet sind. 10. Photoelectric length or angle measuring device according to claim 1, wherein the partial scanning fields ( 3 a, 3 b; 3 a5, 3 b5, 3 c5; 3 a 7 ' , 3 b 7' , 3 c 7 ' , 3 a 7 , 3 b 7 , 3 c 7 , 3 a 7 ' , 3 b 7' , 3 c 7 ' ) are arranged shifted in relation to each other. 11. Photoelektrische Längen- oder Winkelmeßeinrichtung nach An­ spruch 10, wobei die Teil-Abtastfelder (3a, 3b; 3a5, 3b5, 3c5; 3a7', 3b7', 3c7', 3a7, 3b7, 3c7, 3a7', 3b7', 3c7') parallel zueinander in Meß­ richtung (X) angeordnet sind.11. Photoelectric length or angle measuring device according to claim 10, wherein the partial scanning fields ( 3 a, 3 b; 3 a5, 3 b5, 3 c5; 3 a 7 ' , 3 b 7' , 3 c 7 ' , 3 a 7 , 3 b 7 , 3 c 7 , 3 a 7 ' , 3 b 7' , 3 c 7 ' ) are arranged parallel to each other in the measuring direction (X). 12. Photoelektrische Längen- oder Winkelmeßeinrichtung nach An­ spruch 11, wobei symmetrisch zu einem mittleren Teil-Abtastfeld (3b5, 3a, 3b7') auf den beiden benachbarten Seiten die verschobe­ nen weiteren Teil-Abtastfelder (3b; 3a5, 3c5; 3a7', 3b7', 3c7', 3a7, 3b7, 3c7, 3a7', 3c7') angeordnet sind.12. Photoelectric length or angle measuring device according to claim 11, being symmetrical to a central partial scanning field ( 3 b5, 3 a, 3 b 7 ' ) on the two adjacent sides, the shifted NEN further partial scanning fields ( 3 b; 3 a5 , 3 c5; 3 a 7 ' , 3 b 7' , 3 c 7 ' , 3 a 7 , 3 b 7 , 3 c 7 , 3 a 7' , 3 c 7 ' ) are arranged. 13. Photoelektrische Längen- oder Winkelmeßeinrichtung nach An­ spruch 2 und 10, wobei auf der Rückseite des Trägersubstrates transversal zu den Teil-Abtastfeldern (3a, 3b; 3a5, 3b5, 3c5; 3a7', 3b7', 3c7', 3a7, 3b7, 3c7, 3a7', 3b7', 3c7') Bereiche mit Ablenkmitteln angeordnet sind, die den verschiedenen Teil-Abtastfeldern (3a, 3b; 3a5, 3b5, 3c5; 3a7', 3b7', 3c7', 3a7, 3b7, 3c7, 3a7', 3b7', 3c7') zuge­ ordnet sind und jeweils unterschiedliche ablenkende Wirkung haben.13. Photoelectric length or angle measuring device according to claim 2 and 10, being on the back of the carrier substrate transversely to the partial scanning fields ( 3 a, 3 b; 3 a5, 3 b5, 3 c5; 3 a 7 ' , 3 b 7 ' , 3 c 7' , 3 a 7 , 3 b 7 , 3 c 7 , 3 a 7 ' , 3 b 7' , 3 c 7 ' ) areas are arranged with deflection means which correspond to the different partial scanning fields ( 3 a, 3 b; 3 a5, 3 b5, 3 c5; 3 a 7 ' , 3 b 7' , 3 c 7 ' , 3 a 7 , 3 b 7 , 3 c 7 , 3 a 7' , 3 b 7 ' , 3 c 7 ' ) are assigned and each have different distracting effects. 14. Photoelektrische Längen- oder Winkelmeßeinrichtung nach An­ spruch 10, wobei die Teil-Abtastfelder (3a, 3b; 3a7', 3b7', 3c7', 3a7, 3b7, 3c7, 3a7', 3b7', 3c7') und die Ablenkmittel (3e, 3f; A7', A'7', A7, A'7, A7', A'7') senkrecht zur Meßrichtung (X) mehrfach wiederholt angeordnet sind.14. Photoelectric length or angle measuring device according to claim 10, wherein the partial scanning fields ( 3 a, 3 b; 3 a 7 ' , 3 b 7' , 3 c 7 ' , 3 a 7 , 3 b 7 , 3 c 7 , 3 a 7 ' , 3 b 7' , 3 c 7 ' ) and the deflection means (3e, 3f; A 7' , A '7' , A 7 , A ' 7 , A 7' , A '7' ) vertically to the measuring direction (X) are repeatedly arranged.
DE29624216U 1995-10-07 1996-09-10 Photoelectric length and angle measuring device Expired - Lifetime DE29624216U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE29624216U DE29624216U1 (en) 1995-10-07 1996-09-10 Photoelectric length and angle measuring device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19537416 1995-10-07
DE29624216U DE29624216U1 (en) 1995-10-07 1996-09-10 Photoelectric length and angle measuring device
DE19636675A DE19636675A1 (en) 1995-10-07 1996-09-10 Photoelectric length or angle measuring device

Publications (1)

Publication Number Publication Date
DE29624216U1 true DE29624216U1 (en) 2001-03-15

Family

ID=26019307

Family Applications (1)

Application Number Title Priority Date Filing Date
DE29624216U Expired - Lifetime DE29624216U1 (en) 1995-10-07 1996-09-10 Photoelectric length and angle measuring device

Country Status (1)

Country Link
DE (1) DE29624216U1 (en)

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Legal Events

Date Code Title Description
R207 Utility model specification

Effective date: 20010419

R150 Term of protection extended to 6 years

Effective date: 20010504

R151 Term of protection extended to 8 years

Effective date: 20021105

R158 Lapse of ip right after 8 years

Effective date: 20050401