DE296002T1 - METHOD AND DEVICE FOR TREATING THE SURFACE OF AN OBJECT. - Google Patents

METHOD AND DEVICE FOR TREATING THE SURFACE OF AN OBJECT.

Info

Publication number
DE296002T1
DE296002T1 DE1988401329 DE88401329T DE296002T1 DE 296002 T1 DE296002 T1 DE 296002T1 DE 1988401329 DE1988401329 DE 1988401329 DE 88401329 T DE88401329 T DE 88401329T DE 296002 T1 DE296002 T1 DE 296002T1
Authority
DE
Germany
Prior art keywords
container
nitrogen
discharge tube
plasma
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE1988401329
Other languages
German (de)
Inventor
Odile F-59800 Lille Dessaux
Brigitte F-59650 Villeneuve D'ascq Mutel
Stephan F-62360 Condette Szarzynski
Original Assignee
Rifa S.A., Boulogne-Sur-Mer
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rifa S.A., Boulogne-Sur-Mer filed Critical Rifa S.A., Boulogne-Sur-Mer
Publication of DE296002T1 publication Critical patent/DE296002T1/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)

Claims (6)

Patentansprüche:Patent claims: 1.1. 2.2. Verfahren zur Behandlung der Oberfläche von Gegenständen, um auf Ihnen eine Beschichtung haften zu lassen, bei dem die Gegenstände in einen Behälter (11, 16) eingebracht werden, in dem ein gasförmiges Plasma durch eine Mikrowellenentladung gebildet wird, und bei dem zur Bildung des Plasmas Gas in ein Entladungsrohr (3) eingeleitet wird, das einen mit einem Zentimeter- oder Dezimeterwellengenerator (1) verbundenen Koppler (4) kreuzt, wobei der genannte Behandlungsbehälter (11, 16) mit dem Entladungsrohr (3) verbunden und bezüglich der Gaszirkulation stromabwärts von ihm angeordnet ist und das Volumen des Behälters (11, 16) deutlich größer ist als das des Entladungsrohres (3), so daß sich das Gas in dem genannten Behälter (11, 16) entspannen kann, dadurch gekennzeichnet, daß das Gas Stickstoff ist und daß das in dem Behälter entspannte Plasma im wesentlichen Stickstoffatome und angeregte Stickstoffmoleküle enthält und im wesentlichen frei von freien Ionen und Elektronen ist.Method for treating the surface of objects in order to allow a coating to adhere to them, in which the objects are introduced into a container (11, 16) in which a gaseous plasma is formed by a microwave discharge, and in which, in order to form the plasma, gas is introduced into a discharge tube (3) which crosses a coupler (4) connected to a centimeter or decimeter wave generator (1), said treatment container (11, 16) being connected to the discharge tube (3) and arranged downstream of it with respect to the gas circulation, and the volume of the container (11, 16) being significantly larger than that of the discharge tube (3), so that the gas in said container (11, 16) can expand, characterized in that the gas is nitrogen and that the plasma expanded in the container essentially contains nitrogen atoms and excited nitrogen molecules and is essentially free of free ions and electrons. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß im wesentlichen reiner Stickstoff verwendet wird.A process according to claim 1, characterized in that substantially pure nitrogen is used. Theodor-Heuss-Straße 2 D-3300 BraunschweigTheodor-Heuss-Strasse 2 D-3300 Braunschweig Bundesrepublik DeutschlandFederal Republic of Germany Telefon 0531-80079
Telex 0-9 52620 gramm d : Telefax 0531-81297 (CCITT 2 + 3)Telephone 0531-80079
Telex 0-9 52620 gramm d : Telefax 0531-81297 (CCITT 2 + 3) 2 0286002 2 0286002 3. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß der verwendete Stickstoff mit einem Anteil von weniger oder gleich 4 Mol% von CF4 und/oder NF3 angereichert ist.3. Process according to claim 1, characterized in that the nitrogen used is enriched with a proportion of less than or equal to 4 mol% of CF 4 and/or NF 3 . 4. Verfahren nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß das Plasma unter einem Druck zwischen 0,0013 und 0,13 bar gebildet ist.4. Method according to one of claims 1 to 3, characterized in that the plasma is formed under a pressure between 0.0013 and 0.13 bar. 5. Vorrichtung zur Durchführung des Verfahrens nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, daß sie ein Entladungsrohr (3) aufweist, das mit einem mit einem Zentimeter- oder Dezimeterwellengenerator (1) verbundenen Koppler (2) zusammenwirkt und das auf einer Seite mit einem Stickstoffvorrat (5) und auf der anderen Seite mit einem Behälter (11, 16) verbunden ist, der zur Aufnahme des zu behandelnden Objektes oder der zu behandelnden Objekte bestimmt ist und der mit einer Vakuumpumpe (15) verbunden ist.5. Device for carrying out the method according to one of claims 1 to 4, characterized in that it comprises a discharge tube (3) which cooperates with a coupler (2) connected to a centimeter or decimeter wave generator (1) and which is connected on one side to a nitrogen supply (5) and on the other side to a container (11, 16) which is intended to receive the object or objects to be treated and which is connected to a vacuum pump (15). 6. Vorrichtung nach Anspruch 5, dadurch gekennzeichnet, daß das : Entladungsrohr (3) mit einem Stickstoffvorrat (6) verbunden ist, der einen geringen Anteil an CF4 und/oder NF3 aufweist.6. Device according to claim 5, characterized in that the discharge tube (3) is connected to a nitrogen supply (6) which has a small proportion of CF 4 and/or NF 3 . Patentanwälte
Gramm + Lins
Li/krPatent attorneys
Gram + Lins
Li/kr
DE1988401329 1987-06-03 1988-06-01 METHOD AND DEVICE FOR TREATING THE SURFACE OF AN OBJECT. Pending DE296002T1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8707733A FR2616088B1 (en) 1987-06-03 1987-06-03 METHOD AND INSTALLATION FOR TREATING THE SURFACE OF OBJECTS

Publications (1)

Publication Number Publication Date
DE296002T1 true DE296002T1 (en) 1989-04-20

Family

ID=9351690

Family Applications (2)

Application Number Title Priority Date Filing Date
DE1988401329 Pending DE296002T1 (en) 1987-06-03 1988-06-01 METHOD AND DEVICE FOR TREATING THE SURFACE OF AN OBJECT.
DE8888401329T Expired - Lifetime DE3862245D1 (en) 1987-06-03 1988-06-01 METHOD FOR TREATING THE SURFACE OF AN OBJECT.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE8888401329T Expired - Lifetime DE3862245D1 (en) 1987-06-03 1988-06-01 METHOD FOR TREATING THE SURFACE OF AN OBJECT.

Country Status (4)

Country Link
EP (1) EP0296002B1 (en)
DE (2) DE296002T1 (en)
ES (1) ES2006422B3 (en)
FR (1) FR2616088B1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5419861A (en) * 1990-02-15 1995-05-30 Elf Aquitaine Production Method for improving the paintability of objects fashioned from polyamide and polyolefin blends
FR2664294B1 (en) * 1990-07-06 1992-10-23 Plasmametal METHOD FOR METALLIZING A SURFACE.
FR2862070B1 (en) * 2003-11-06 2006-02-03 Vector Advanced Surface Techno CONTINUOUS SURFACE TREATMENT SYSTEM FOR OBJECTS AND METHOD FOR THE IMPLEMENTATION THEREOF
US20050221000A1 (en) * 2004-03-31 2005-10-06 Tokyo Electron Limited Method of forming a metal layer
AU2006228986B2 (en) * 2005-03-31 2011-08-11 Agilent Technologies Australia (M) Pty Ltd A plasma spectroscopy system with a gas supply
JP5317692B2 (en) 2005-03-31 2013-10-16 アジレント・テクノロジーズ・オーストラリア（エム）プロプライエタリー・リミテッド Plasma spectroscopy system with gas supply

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3309299A (en) * 1963-08-22 1967-03-14 Aerochem Res Lab Method of treating synthetic resinous material to increase the wettability thereof
FR2395663A1 (en) * 1977-01-24 1979-01-19 Commissariat Energie Atomique Microwave heat treatment of articles, e.g. of refractory material - with avoidance of plasma formation near article being treated, increasing speed of treatment and possibly higher temps.
JPS58204171A (en) * 1982-05-21 1983-11-28 Toshiba Corp Formation of oxidized aluminum film
JPS5925902A (en) * 1982-07-31 1984-02-10 Sumitomo Electric Ind Ltd Sintering method
AU549376B2 (en) * 1983-02-25 1986-01-23 Toyota Jidosha Kabushiki Kaisha Plasma treatment
JPS6016424A (en) * 1983-07-08 1985-01-28 Fujitsu Ltd Microwave plasma processing method and apparatus thereof
SE8404974L (en) * 1983-11-03 1985-05-04 Westinghouse Electric Corp SET TO MANUFACTURE A LAMINATE
US4536271A (en) * 1983-12-29 1985-08-20 Mobil Oil Corporation Method of plasma treating a polymer film to change its properties

Also Published As

Publication number Publication date
ES2006422B3 (en) 1991-11-16
EP0296002A2 (en) 1988-12-21
FR2616088B1 (en) 1991-07-05
DE3862245D1 (en) 1991-05-08
EP0296002A3 (en) 1989-01-11
EP0296002B1 (en) 1991-04-03
FR2616088A1 (en) 1988-12-09
ES2006422A4 (en) 1989-05-01

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