DE2953066A1 - CONTROL TECHNIQUES FOR ANNEALING SEMICONDUCTORS - Google Patents

CONTROL TECHNIQUES FOR ANNEALING SEMICONDUCTORS

Info

Publication number
DE2953066A1
DE2953066A1 DE19792953066 DE2953066T DE2953066A1 DE 2953066 A1 DE2953066 A1 DE 2953066A1 DE 19792953066 DE19792953066 DE 19792953066 DE 2953066 T DE2953066 T DE 2953066T DE 2953066 A1 DE2953066 A1 DE 2953066A1
Authority
DE
Germany
Prior art keywords
control techniques
semiconductors
annealing
annealing semiconductors
techniques
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19792953066
Other languages
German (de)
Inventor
J Golovchenko
D Auston
T Venkatesan
R Slusher
C Surko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/935,665 external-priority patent/US4155779A/en
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of DE2953066A1 publication Critical patent/DE2953066A1/en
Withdrawn legal-status Critical Current

Links

DE19792953066 1978-08-21 1979-08-14 CONTROL TECHNIQUES FOR ANNEALING SEMICONDUCTORS Withdrawn DE2953066A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US05/935,665 US4155779A (en) 1978-08-21 1978-08-21 Control techniques for annealing semiconductors
PCT/US1979/000834 WO1980000509A1 (en) 1978-08-21 1979-08-14 Control techniques for annealing semiconductors

Publications (1)

Publication Number Publication Date
DE2953066A1 true DE2953066A1 (en) 1980-11-27

Family

ID=26761426

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19792953066 Withdrawn DE2953066A1 (en) 1978-08-21 1979-08-14 CONTROL TECHNIQUES FOR ANNEALING SEMICONDUCTORS

Country Status (1)

Country Link
DE (1) DE2953066A1 (en)

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Legal Events

Date Code Title Description
8141 Disposal/no request for examination
8127 New person/name/address of the applicant

Owner name: AT & T TECHNOLOGIES, INC., NEW YORK, N.Y., US