DE2908288C2 - - Google Patents
Info
- Publication number
- DE2908288C2 DE2908288C2 DE2908288A DE2908288A DE2908288C2 DE 2908288 C2 DE2908288 C2 DE 2908288C2 DE 2908288 A DE2908288 A DE 2908288A DE 2908288 A DE2908288 A DE 2908288A DE 2908288 C2 DE2908288 C2 DE 2908288C2
- Authority
- DE
- Germany
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/08—Reaction chambers; Selection of materials therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Glass Compositions (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Glass Melting And Manufacturing (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2908288A DE2908288B1 (de) | 1979-03-03 | 1979-03-03 | Glocke aus Quarzglas fuer halbleitertechnologische Zwecke |
| GB8001583A GB2047226B (en) | 1979-03-03 | 1980-01-17 | Bell-jars and like tubular vessels |
| CH57880A CH644409A5 (de) | 1979-03-03 | 1980-01-24 | Glocke aus quarzglas fuer halbleitertechnologische zwecke. |
| FR8004231A FR2450884A1 (fr) | 1979-03-03 | 1980-02-26 | Cloche en verre quartzeux pour la technologie des semi-conducteurs |
| JP2535280A JPS55118630A (en) | 1979-03-03 | 1980-03-03 | Quartz glass bellljar container for semiconductor technique |
| US06/345,513 US4530818A (en) | 1979-03-03 | 1982-02-04 | Transparent fused silica bell for purposes relating to semiconductor technology |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2908288A DE2908288B1 (de) | 1979-03-03 | 1979-03-03 | Glocke aus Quarzglas fuer halbleitertechnologische Zwecke |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE2908288B1 DE2908288B1 (de) | 1980-01-17 |
| DE2908288C2 true DE2908288C2 (US08063081-20111122-C00115.png) | 1980-09-25 |
Family
ID=6064354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2908288A Granted DE2908288B1 (de) | 1979-03-03 | 1979-03-03 | Glocke aus Quarzglas fuer halbleitertechnologische Zwecke |
Country Status (6)
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3107421C2 (de) * | 1981-02-27 | 1985-02-14 | Heraeus Quarzschmelze Gmbh, 6450 Hanau | Glocke aus Quarzgut für die Abscheidung von Poly-Silizium |
| US6784033B1 (en) | 1984-02-15 | 2004-08-31 | Semiconductor Energy Laboratory Co., Ltd. | Method for the manufacture of an insulated gate field effect semiconductor device |
| US6786997B1 (en) | 1984-11-26 | 2004-09-07 | Semiconductor Energy Laboratory Co., Ltd. | Plasma processing apparatus |
| JPH0752718B2 (ja) | 1984-11-26 | 1995-06-05 | 株式会社半導体エネルギー研究所 | 薄膜形成方法 |
| US6673722B1 (en) | 1985-10-14 | 2004-01-06 | Semiconductor Energy Laboratory Co., Ltd. | Microwave enhanced CVD system under magnetic field |
| US6230650B1 (en) | 1985-10-14 | 2001-05-15 | Semiconductor Energy Laboratory Co., Ltd. | Microwave enhanced CVD system under magnetic field |
| JP2601355B2 (ja) * | 1989-10-26 | 1997-04-16 | 東芝セラミックス株式会社 | ウェハボート用の搬送治具 |
| DE19930817C1 (de) * | 1999-07-01 | 2001-05-03 | Sico Jena Gmbh Quarzschmelze | Verfahren zur Herstellung von Verbundkörpern aus Quarzmaterial |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR342018A (fr) * | 1904-04-08 | 1904-08-25 | Leon Appert | Procédé de fabrication mécanique du verre plan dit "verre à vitres" |
| FR1297582A (fr) * | 1960-11-22 | 1962-06-29 | Hughes Aircraft Co | Procédé et appareil pour diffuser des impuretés dans les semi-conducteurs |
| DE1262244B (de) * | 1964-12-23 | 1968-03-07 | Siemens Ag | Verfahren zum epitaktischen Abscheiden einer kristallinen Schicht, insbesondere aus Halbleitermaterial |
| JPS4423937Y1 (US08063081-20111122-C00115.png) * | 1966-08-17 | 1969-10-09 | ||
| DE1917016B2 (de) * | 1969-04-02 | 1972-01-05 | Siemens AG, 1000 Berlin u. 8000 München | Verfahren zur herstellung von hohlkoerpern aus halbleiter material |
| US3853974A (en) * | 1970-04-06 | 1974-12-10 | Siemens Ag | Method of producing a hollow body of semiconductor material |
| JPS4942351B1 (US08063081-20111122-C00115.png) * | 1970-08-12 | 1974-11-14 | ||
| US3715197A (en) * | 1970-12-10 | 1973-02-06 | Bendix Corp | Method and preform for reshaping glass tubing |
| JPS568105B2 (US08063081-20111122-C00115.png) * | 1972-04-12 | 1981-02-21 | ||
| JPS49387A (US08063081-20111122-C00115.png) * | 1972-04-17 | 1974-01-05 | ||
| DE2259353C3 (de) * | 1972-12-04 | 1975-07-10 | Heraeus-Quarzschmelze Gmbh, 6450 Hanau | Tiegel aus Quarzglas oder Quarzgut zur Verwendung beim Züchten von Einkristallen |
| CH612657A5 (en) * | 1975-06-13 | 1979-08-15 | Heraeus Schott Quarzschmelze | Quartz glass and process for the preparation thereof |
| US4173944A (en) * | 1977-05-20 | 1979-11-13 | Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh | Silverplated vapor deposition chamber |
-
1979
- 1979-03-03 DE DE2908288A patent/DE2908288B1/de active Granted
-
1980
- 1980-01-17 GB GB8001583A patent/GB2047226B/en not_active Expired
- 1980-01-24 CH CH57880A patent/CH644409A5/de not_active IP Right Cessation
- 1980-02-26 FR FR8004231A patent/FR2450884A1/fr active Granted
- 1980-03-03 JP JP2535280A patent/JPS55118630A/ja active Pending
-
1982
- 1982-02-04 US US06/345,513 patent/US4530818A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55118630A (en) | 1980-09-11 |
| GB2047226A (en) | 1980-11-26 |
| FR2450884B1 (US08063081-20111122-C00115.png) | 1982-12-10 |
| FR2450884A1 (fr) | 1980-10-03 |
| US4530818A (en) | 1985-07-23 |
| CH644409A5 (de) | 1984-07-31 |
| GB2047226B (en) | 1982-12-15 |
| DE2908288B1 (de) | 1980-01-17 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8327 | Change in the person/name/address of the patent owner |
Owner name: HERAEUS QUARZGLAS GMBH, 6450 HANAU, DE |
|
| 8339 | Ceased/non-payment of the annual fee |