DE2902241C3 - Process for the sputtering of a metallic thin layer on a substrate made of plastic - Google Patents

Process for the sputtering of a metallic thin layer on a substrate made of plastic

Info

Publication number
DE2902241C3
DE2902241C3 DE19792902241 DE2902241A DE2902241C3 DE 2902241 C3 DE2902241 C3 DE 2902241C3 DE 19792902241 DE19792902241 DE 19792902241 DE 2902241 A DE2902241 A DE 2902241A DE 2902241 C3 DE2902241 C3 DE 2902241C3
Authority
DE
Germany
Prior art keywords
plastic
sputtering
thin layer
substrate
metallic thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19792902241
Other languages
German (de)
Other versions
DE2902241A1 (en
DE2902241B2 (en
Inventor
Norbert Dipl.-Phys. Dr. 8757 Karlstein Rücker
Gudrun 6450 Hanau Ullrich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WC Heraus GmbH and Co KG
Original Assignee
WC Heraus GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WC Heraus GmbH and Co KG filed Critical WC Heraus GmbH and Co KG
Priority to DE19792902241 priority Critical patent/DE2902241C3/en
Publication of DE2902241A1 publication Critical patent/DE2902241A1/en
Publication of DE2902241B2 publication Critical patent/DE2902241B2/en
Application granted granted Critical
Publication of DE2902241C3 publication Critical patent/DE2902241C3/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C23C14/205—Metallic material, boron or silicon on organic substrates by cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)

Description

Die Erfindung betrifft ein Verfahren zum Aufstäuben einer metallischen Dünnschicht auf einem Substrat aus Kunststoff mit gegenüber der Dünnschicht stark abweichendem thermischen Ausdehnungskoeffizienten, insbesondere einer Kunststoffolie.The invention relates to a method for sputtering a metallic thin layer on a substrate Plastic with a thermal expansion coefficient that differs significantly from that of the thin layer, in particular a plastic film.

Werden solche Dünnschichten durch Aufstäuben, wie Hochfrequenzzerstäuben, auf Kunststoffolien aufgebracht, so führt dies wegen der Erwärmung des Substrats zum Aufrollen (Bimetall-Effekt).If such thin layers are applied to plastic films by sputtering, such as high-frequency sputtering, because of the heating of the substrate, this leads to rolling (bimetal effect).

Der Erfindung liegt die Aufgabe zugrunde bei einem Verfahren der eingangs genannten Art ein Aufrollen des Substrats zu vermeiden. Diese Aufgab-, wird erfindungsgemäß durch die im kennzeichnenden Teil des Patentanspruchs 1 beschriebenen Maßnahmen gelöst.The invention is based on the object, in a method of the type mentioned at the outset, of rolling up the Avoid substrate. This task is according to the invention solved by the measures described in the characterizing part of claim 1.

Dadurch lassen sich vorteilhafte mit metallischen Dünnschichten versehene Kunststoffolien schaffen, die sich durch eine hohe Haftfestigkeit auszeichnen und unter anderem für Meßfühler, insbesondere für Dehnungsmeßstreifen, geeignet sind.As a result, advantageous plastic films provided with metallic thin layers can be created which are characterized by high adhesive strength and are used, among other things, for measuring sensors, especially for strain gauges, are suitable.

Im folgenden ist ein Ausführungsbeispiel der Erfindung anhand der Zeichnung näher erläutert Dari-i istIn the following an embodiment of the invention is explained in more detail with reference to the drawing Dari-i ist

ίο die dünne metallische Schicht (auch Legierungsschicht) mit 1 bezeichnet, die Kunststoffolie als Substrat mit 2, die Klebeschicht mit 3 und die Unterlage mit 4. Bewährt hat sich eine photolithographische Mäandrierung der Metallschichtίο the thin metallic layer (also alloy layer) designated with 1, the plastic film as substrate with 2, the adhesive layer with 3 and the base with 4. A photolithographic meandering of the has proven itself Metal layer

Für die metallischen Dünnschichten haben sich besonders Edelmetall-Legierungsschichten (auch Legierung mit Unedelmetallen) im Bereich von 0,1 bis wenige μπι Dicke bewährt Die Hochfrequenzzerstäubung erfolgt in einem Argon-Sauerstoff-Gemisch mit einem Sauerstoff-Partialdruck bis etwa 20 Pa. Das Ausgangsvakuum in der Abscheidungskammer soll wenigstens 1O-2Pa betragen, die Abscheidungsgeschwindigkeit einige 1000 Ä/min.
Für die Kunststoffolie wird als Material eine bis mindestens 1500C temperaturbeständige Folie, wie eine Polyimid-Folie, gewählt, deren Dicke zwischen 5 μπι und 500 μπι beträgt Dpr Kleber, mit dessen Hilfe die Kunststoffolie auf einer Unterlage blasenfrei appliziert wird, ist ein synthetischer Polyester-Kleber vom TypFor the metallic thin layers, noble metal alloy layers (also alloy with base metals) in the range from 0.1 to a few μm thickness have proven particularly useful. The initial vacuum in the deposition chamber should be at least 10 -2 Pa, the deposition rate several 1000 Å / min.
For the plastic film, as the material a to at least 150 0 C temperature-resistant film such as a polyimide film, selected whose thickness μπι between 5 and is 500 μπι Dpr adhesive by means of which the plastic film is applied without bubbles on a base, is a synthetic Polyester glue of the type

»Lens-Bond« (MiI-A 0 03 920 B) wie er für optische Zwecke verwendet wird. Nach Abschluß der Verfahrensschritte kann die Folie wieder ohne Beschädigung abgelöst werden."Lens-Bond" (MiI-A 0 03 920 B) as it is used for optical purposes. After completing the procedural steps the film can be removed again without damage.

Hierzu 1 Blatt Zeichnungen 1 sheet of drawings

Claims (2)

Patentansprüche:Patent claims: 1, Verfahren zum Aufstäuben einer metallischen Dünnschicht auf einem Substrat aus Kunststoff mit gegenüber der Dünnschicht stark abweichendem Ausdehnungskoeffizienten, insbesondere einer Kunststoffolie, dadurch gekennzeichnet, daß das Substrat vor dem Beschichten auf einer Unterlage aufgeklebt wird, deren Ausdehnungskoeffizient demjenigen der Dünnschicht angenähert ist, und daß das Substrat nach dem Beschichten bzw. nach einem evtl Weiterverarbeiten von der Unterlage wieder abgelöst wird.1, method of sputtering a metallic thin film on a plastic substrate using Compared to the thin layer, the expansion coefficient differs greatly, in particular one Plastic film, characterized in that the substrate prior to coating on a Underlay is glued on, the coefficient of expansion of which approximates that of the thin layer, and that the substrate after coating or after any further processing of the Pad is detached again. 2. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß das Substrat mit einem synthetischen Polyester-Kleber blasenfrei aufgebracht wird.2. The method according to claim 1, characterized in that that the substrate is applied bubble-free with a synthetic polyester adhesive.
DE19792902241 1979-01-20 1979-01-20 Process for the sputtering of a metallic thin layer on a substrate made of plastic Expired DE2902241C3 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19792902241 DE2902241C3 (en) 1979-01-20 1979-01-20 Process for the sputtering of a metallic thin layer on a substrate made of plastic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792902241 DE2902241C3 (en) 1979-01-20 1979-01-20 Process for the sputtering of a metallic thin layer on a substrate made of plastic

Publications (3)

Publication Number Publication Date
DE2902241A1 DE2902241A1 (en) 1980-07-24
DE2902241B2 DE2902241B2 (en) 1981-06-19
DE2902241C3 true DE2902241C3 (en) 1982-03-04

Family

ID=6061065

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19792902241 Expired DE2902241C3 (en) 1979-01-20 1979-01-20 Process for the sputtering of a metallic thin layer on a substrate made of plastic

Country Status (1)

Country Link
DE (1) DE2902241C3 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3043890C2 (en) * 1980-11-21 1983-02-17 Philips Patentverwaltung Gmbh, 2000 Hamburg Strain gauges

Also Published As

Publication number Publication date
DE2902241A1 (en) 1980-07-24
DE2902241B2 (en) 1981-06-19

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C3 Grant after two publication steps (3rd publication)
8339 Ceased/non-payment of the annual fee