DE2862471D1 - Method and apparatus for sputtering photoconductive coating on endless flexible belts or cylinders - Google Patents
Method and apparatus for sputtering photoconductive coating on endless flexible belts or cylindersInfo
- Publication number
- DE2862471D1 DE2862471D1 DE7878101856T DE2862471T DE2862471D1 DE 2862471 D1 DE2862471 D1 DE 2862471D1 DE 7878101856 T DE7878101856 T DE 7878101856T DE 2862471 T DE2862471 T DE 2862471T DE 2862471 D1 DE2862471 D1 DE 2862471D1
- Authority
- DE
- Germany
- Prior art keywords
- sputtering
- cylinders
- endless flexible
- flexible belts
- photoconductive coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
- H01J37/3277—Continuous moving of continuous material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/864,330 US4137142A (en) | 1977-12-27 | 1977-12-27 | Method and apparatus for sputtering photoconductive coating on endless flexible belts or cylinders |
Publications (1)
Publication Number | Publication Date |
---|---|
DE2862471D1 true DE2862471D1 (en) | 1985-09-26 |
Family
ID=25343035
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE7878101856T Expired DE2862471D1 (en) | 1977-12-27 | 1978-12-27 | Method and apparatus for sputtering photoconductive coating on endless flexible belts or cylinders |
Country Status (4)
Country | Link |
---|---|
US (1) | US4137142A (de) |
EP (1) | EP0002832B1 (de) |
AU (1) | AU524590B2 (de) |
DE (1) | DE2862471D1 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3572198D1 (en) * | 1984-02-14 | 1989-09-14 | Energy Conversion Devices Inc | Method and apparatus for making electrophotographic devices |
US4560462A (en) * | 1984-06-22 | 1985-12-24 | Westinghouse Electric Corp. | Apparatus for coating nuclear fuel pellets with a burnable absorber |
US5472509A (en) * | 1993-11-30 | 1995-12-05 | Neomecs Incorporated | Gas plasma apparatus with movable film liners |
US6376018B1 (en) | 1998-06-17 | 2002-04-23 | Wilfred C. Kittler, Jr. | Method for the production of unsupported thin film particles |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE516556A (de) * | ||||
US564353A (en) * | 1896-07-21 | Method of and apparatus for coloring webs of paper | ||
US1974441A (en) * | 1929-10-09 | 1934-09-25 | Celluloid Corp | Process and apparatus for electroplating |
GB424504A (en) * | 1933-09-06 | 1935-02-22 | Gardiner S Conveyors Ltd | Improvements in or relating to endless conveyors |
NL103862C (de) * | 1957-01-09 | |||
US3650737A (en) * | 1968-03-25 | 1972-03-21 | Ibm | Imaging method using photoconductive element having a protective coating |
US3594301A (en) * | 1968-11-22 | 1971-07-20 | Gen Electric | Sputter coating apparatus |
DE2024005A1 (en) * | 1970-05-15 | 1971-11-25 | Kawamura Y | Organic polymers contng fine particles produced by vacuum - deposition of the particles |
US3718117A (en) * | 1971-04-26 | 1973-02-27 | Armstrong Cork Co | Grooved rod coater |
US4046712A (en) * | 1972-11-30 | 1977-09-06 | United Kingdom Atomic Energy Authority | Catalysts sputtered on substantially nonporous low surface area particulate supports |
US3829373A (en) * | 1973-01-12 | 1974-08-13 | Coulter Information Systems | Thin film deposition apparatus using segmented target means |
US3905887A (en) * | 1973-01-12 | 1975-09-16 | Coulter Information Systems | Thin film deposition method using segmented plasma |
BE817875A (fr) * | 1973-07-30 | 1974-11-18 | Procede pour augmenter l'adherence d'une couche isolante photoconductrice sur un substrat conducteur et application a un element de formation d'image utilise dans un appareil electrophotographique | |
US3989569A (en) * | 1975-02-10 | 1976-11-02 | Columbia Ribbon And Carbon Manufacturing Co., Inc. | Continuous copying method |
-
1977
- 1977-12-27 US US05/864,330 patent/US4137142A/en not_active Expired - Lifetime
-
1978
- 1978-12-27 EP EP78101856A patent/EP0002832B1/de not_active Expired
- 1978-12-27 DE DE7878101856T patent/DE2862471D1/de not_active Expired
-
1979
- 1979-01-02 AU AU43032/79A patent/AU524590B2/en not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
EP0002832A1 (de) | 1979-07-11 |
AU524590B2 (en) | 1982-09-23 |
EP0002832B1 (de) | 1985-08-21 |
US4137142A (en) | 1979-01-30 |
AU4303279A (en) | 1980-07-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee | ||
8328 | Change in the person/name/address of the agent |
Free format text: DORNER, J., DIPL.-ING. DR.-ING., PAT.-ANW., 85354 FREISING |