DE2833615C2 - - Google Patents

Info

Publication number
DE2833615C2
DE2833615C2 DE2833615A DE2833615A DE2833615C2 DE 2833615 C2 DE2833615 C2 DE 2833615C2 DE 2833615 A DE2833615 A DE 2833615A DE 2833615 A DE2833615 A DE 2833615A DE 2833615 C2 DE2833615 C2 DE 2833615C2
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE2833615A
Other languages
German (de)
Other versions
DE2833615A1 (de
Inventor
Noel De Frederikssund Dk Leon
Arno Ivan Marc Holbaek Dk Larsen
Poul E. Randboel Dk Knudsen
Erik Helander Hundested Dk Jensen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOPSIL FREDERIKSSUND DK AS
Original Assignee
TOPSIL FREDERIKSSUND DK AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOPSIL FREDERIKSSUND DK AS filed Critical TOPSIL FREDERIKSSUND DK AS
Publication of DE2833615A1 publication Critical patent/DE2833615A1/de
Application granted granted Critical
Publication of DE2833615C2 publication Critical patent/DE2833615C2/de
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating
    • C30B13/285—Crystal holders, e.g. chucks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/911—Seed or rod holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1084—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone having details of a stabilizing feature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE19782833615 1977-08-22 1978-07-31 Vorrichtung zur veredelung eines halbleitermaterials Granted DE2833615A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DK371977A DK371977A (da) 1977-08-22 1977-08-22 Fremgangsmaade og apparat til raffinering af halvledermateriale

Publications (2)

Publication Number Publication Date
DE2833615A1 DE2833615A1 (de) 1979-03-08
DE2833615C2 true DE2833615C2 (US07534539-20090519-C00452.png) 1987-04-09

Family

ID=8126023

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19782833615 Granted DE2833615A1 (de) 1977-08-22 1978-07-31 Vorrichtung zur veredelung eines halbleitermaterials

Country Status (4)

Country Link
US (1) US4258009A (US07534539-20090519-C00452.png)
JP (1) JPS6054916B2 (US07534539-20090519-C00452.png)
DE (1) DE2833615A1 (US07534539-20090519-C00452.png)
DK (1) DK371977A (US07534539-20090519-C00452.png)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6041038B2 (ja) * 1981-05-19 1985-09-13 フエロフルイデイクス・コ−ポレイシヨン 結晶成長炉からの結晶の処理装置及び処理方法
US4350560A (en) * 1981-08-07 1982-09-21 Ferrofluidics Corporation Apparatus for and method of handling crystals from crystal-growing furnaces
US4532000A (en) * 1983-09-28 1985-07-30 Hughes Aircraft Company Fabrication of single crystal fibers from congruently melting polycrystalline fibers
JPS60174821U (ja) * 1984-04-28 1985-11-19 株式会社山武 計器類の連結装置
JPS62153185A (ja) * 1985-12-25 1987-07-08 Komatsu Denshi Kinzoku Kk 浮遊帯域溶融法単結晶支持装置
JPH0617280B2 (ja) * 1987-03-18 1994-03-09 社団法人生産技術振興協会 ＺｎＳｅ単結晶作製法
US5114528A (en) * 1990-08-07 1992-05-19 Wisconsin Alumni Research Foundation Edge-defined contact heater apparatus and method for floating zone crystal growth
US5217565A (en) * 1991-11-13 1993-06-08 Wisconsin Alumni Research Foundation Contactless heater floating zone refining and crystal growth
DE102012213715A1 (de) * 2012-08-02 2014-02-06 Siltronic Ag Vorrichtung zur Herstellung eines Einkristalls durch Kristallisieren des Einkristalls an einer Schmelzenzone
CN108496271B (zh) * 2016-01-26 2019-10-15 株式会社丰田自动织机 电极层叠装置和电极层叠方法
CN109563637B (zh) * 2016-08-10 2021-01-22 胜高股份有限公司 单晶的制造方法和装置
JP6694652B2 (ja) * 2016-09-02 2020-05-20 信越化学工業株式会社 光モジュール、及び、光路光軸調整方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2712394A (en) * 1948-06-19 1955-07-05 Pirelli Box for holding contents under internal pressure
DE1061527B (de) * 1953-02-14 1959-07-16 Siemens Ag Verfahren zum zonenweisen Umschmelzen von Staeben und anderen langgestreckten Werkstuecken
US3428436A (en) * 1963-12-16 1969-02-18 Monsanto Co Methods and apparatus for zone melting
DE1519901A1 (de) * 1966-09-23 1970-02-12 Siemens Ag Verfahren zum tiegelfreien Zonenschmelzen eines kristallinen Stabes
US3897590A (en) * 1968-05-18 1975-07-29 Battelle Development Corp Method and apparatus for making monocrystals
NL6917398A (US07534539-20090519-C00452.png) * 1969-03-18 1970-09-22
US3771780A (en) * 1971-03-11 1973-11-13 Standard Tool & Manu Co Clamping device for an accurately located workpiece
US3961906A (en) * 1973-11-22 1976-06-08 Siemens Aktiengesellschaft Apparatus for crucible-free zone melting of semiconductor crystal rods including oscillation dampening material
US4078897A (en) * 1975-04-11 1978-03-14 Leybold-Heraeus Gmbh & Co. Kg Apparatus for producing monocrystals
DE2515850C3 (de) * 1975-04-11 1980-04-24 Leybold-Heraeus Gmbh, 5000 Koeln Vorrichtung zum Stützen des Kristallstabs beim tiegellosen Zonenschmelzen
US4033569A (en) * 1976-10-15 1977-07-05 Dunn Garf L Deformation-preventing workpiece-holding fixture for machine tools
US4116329A (en) * 1976-12-21 1978-09-26 Barrie Franklin Garden Safety container having vent means
US4045181A (en) * 1976-12-27 1977-08-30 Monsanto Company Apparatus for zone refining
DE2712506C2 (de) * 1977-03-22 1986-06-12 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zum Haltern des mit dem Keimkristall versehenen Stabendes beim tiegelfreien Zonenschmelzen von Halbleiterkristallstäben
DE2706851C2 (de) * 1977-02-17 1986-05-07 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zum Haltern des mit dem Keimkristall versehenen Endes eines Halbleiterkristallstabes
FR2382266A1 (fr) * 1977-03-04 1978-09-29 Crouzet Sa Dispositif pour permettre le tirage de cristaux cylindriques en continu

Also Published As

Publication number Publication date
DK371977A (da) 1979-02-23
US4258009A (en) 1981-03-24
DE2833615A1 (de) 1979-03-08
JPS5435879A (en) 1979-03-16
JPS6054916B2 (ja) 1985-12-02

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee