Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Mat GmbH
Original Assignee
Varian Mat GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Mat GmbHfiledCriticalVarian Mat GmbH
Priority to DE19742438338priorityCriticalpatent/DE2438338A1/de
Publication of DE2438338A1publicationCriticalpatent/DE2438338A1/de