DE2311299B2 - Device for vacuum evaporation from a thermal steam source - Google Patents

Description

greater inclination of the rotating diaphragms to the axis of rotation. But then this big angle is through Inclination of the axis with axially parallel slots can no longer be realized.

25 It is therefore the task of the specified in claim 1 Invention, good operating properties with low

The invention relates to an arrangement for achieving less space requirements,
evaporation from a thermal steam source The arrangement according to the invention has the

with a reduced temperature load, this is due to the fact that vapor deposition processes are carried out in a high vacuum steaming object, which emitted from the steam source 30 with reduced thermal load of the sub Allows thermal radiation due to their larger strates, whereby they - due to the besorr propagation speed by means of a rotating, whose construction of its aperture system - a BJendensystems is separated from the steam jet. very low overall height and otherwise also in

In the Austrian patent 2 31 530 conventional preparation systems are built in directly Process described which makes it possible to use 35 bar.

thermal evaporation processes with reduced Another advantage is above all their lower level

thermal load of the sub-space requirement to be vaporized, which undertakes the installation in the usual way of publishing materials. This process consists of turned preparation machines,
its essence is that the resulting from the thermal An embodiment of the invention is an

see the source of evaporation escaping heat rays- 40 hand of the drawing explained in more detail,
because of their greater speed of propagation

space is separated from the steam jets. In FIG. 1 the arrangement according to the invention,

mentioned patent are also some devices. 2 the rotating and the fixed shutter system

described which the implementation of this in its details, in plan and elevation,
general procedural principle. 45 The in F i g. 1 arrangement shown consists of

Such a device of a known type consists of a recipient 6, a vapor deposition source 1, for example a rotating hollow cylinder, which has stationary diaphragms 2, 4, a rotating diaphragm 3, 8, more likely on its circumferential surface, and in a motor 7 and a Auffänger S. This whole system related to the thermal evaporation source is connected to a pumping system and arranged and with such a speed 50 is found on high vacuum,
is set in rotation that the separation of the steam emitted from the steam source 1

Heat from the corpuscular radiation to the radiation 9 is transmitted through the diaphragms 2, 4 to the aforementioned Purpose is achieved. similar cross-section (size of the catcher S)

Furthermore, blinds are provided for carrying out this method (FIG. 1). Between the two panels principle in the patent mentioned there are two 55 rotating a cylinder 3 with lamellae 8 on the circumference, further devices are described, which in turn are made from as shown in FIG. 2 shown. The geometry of these laeinem System of rotating disks, on the other hand from mellen 8 is chosen so that in the area of the oscillating out Shutters exist. dazzled steam jet 9 no direct view between

From the Austrian patent 2 93 814 is see steam source 1 and catcher 5 consists. The one device known, which is thereby gekennzeich- 60 arranged on the circumference of the cylinder 3 Lamelnet that in a known manner the slots len 8 represent helical surfaces with the pitch wind aperture system in the direction of the axis of rotation of this angle α and thus form helical channels system one after the other The peripheral speed ν of the lamellas 8 is located, which like the surface lines of a cylinder 65 through the angle <x and the central steam jet are arranged around a common axis. speed c is determined. The angle <* in turn this common axis is opposite to the vapor- is a function of the quantities B, b, s, d, h and the ray is inclined by such an angle that in Rieh- condition of the optical opacity.

The function of the arrangement results from the above description. The conditions for a special case are shown in the following example ν = circumferential speed, c = mean steam jet speed, D = cylinder diameter, η = cylinder speed, α = angle of the lamellae, s = distance between the lamellae (pitch), b = Width of the screen at the steam source, B = width of the screen at the collector, d = wall thickness of the lamellas, h = height of the cylinder,

S = depth of the lamellas. For the steam jet to pass through

tga = - c, from this is the required peripheral speed ν = c tg α.

The speed of the cylinder is then

η =

GO

ν
0

Assuming D = 0.2m and = 15 ° for a concrete case, the result is

The steam jets of interest have velocities between 100 and 1000 m / s; it surrender So speeds between 2500 and 25,000 per minute. These values are based on the status of Technology easy to implement even in a high vacuum.

For this purpose 2 sheets of drawings

Claims (1)

the steam jets make the optical transparency Patent claim: defends is. The known devices have the disadvantage Device for vacuum vaporization from a very high speed required during operation thermal steam source with reduced 5 on the order of 50,000 revolutions per TeanperatuA load for the minute to be steamed, which causes the arrangement in the vacuum per object, consisting of a fool with lamellas. see rotating cylinder, which is made of the case of such devices, among others Steam source emitted heat rays on points of view also take into account that m the Due to their greater speed of propagation, the substrate to be vaporized is usually perpendicular Separate ability and the optical transparency is above the evaporation source and that in in the direction of the steam refuse to emit small attachments, such as those especially in the electrons passing through characterized that lamellar microscopy is commonly used only one len (8) helically on the shell of the Zy- limited space for the installation of such a Linders (3) are attached. 15 additional facility is available. Frequently it is also necessary to bring the evaporation sources closer to the substrate. The latter However, the requirement also requires that the overall height of the rotating cylinder be as small as possible must be. But this in turn requires one